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    • 5. 发明授权
    • Particle beam processing apparatus
    • 粒子束处理装置
    • US06426507B1
    • 2002-07-30
    • US09434380
    • 1999-11-05
    • Imtiaz RangwallaHarvey CloughGeorge Hannafin
    • Imtiaz RangwallaHarvey CloughGeorge Hannafin
    • A61N500
    • H01J33/00B05D3/068
    • The present invention is directed to a particle beam processing apparatus that is smaller in size and operates at a higher efficiency. The processing apparatus includes a particle beam generating assembly, a foil support assembly, and a processing assembly. In the particle beam generating assembly, a cloud of particles, for example, electrons, are generated by heating at least one tungsten filament. The electrons are then extracted to travel at a high speed to the foil support assembly which is set at a much lower voltage than the particle beam generating assembly. A substrate is fed to the processing apparatus through the processing zone and is exposed to the electrons exiting the particle beam generating assembly and entering the processing zone. The electrons penetrate and cure the substrate causing a chemical reaction, such as polymerization, cross-linking, or sterilization.
    • 本发明涉及一种尺寸更小并以更高效率工作的粒子束处理装置。 处理装置包括粒子束产生组件,箔支撑组件和处理组件。 在粒子束产生组件中,通过加热至少一根钨丝来产生颗粒云,例如电子。 然后提取电子以高速行进到箔片支撑组件,箔片支撑组件设置在比颗粒束产生组件低得多的电压下。 衬底通过处理区被馈送到处理装置,并暴露于离开粒子束产生组件并进入处理区的电子。 电子穿透和固化基板,导致化学反应,如聚合,交联或灭菌。