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1. 发明申请

US20120141674A1 EVAPORATOR AND METHOD FOR DEPOSITING ORGANIC MATERIAL 审中-公开
标题翻译：蒸发器和沉积有机材料的方法
公开(公告)号：US20120141674A1
公开(公告)日：2012-06-07
申请号：US13197876
申请日：2011-08-04
申请人： Il-Soo PARK , Jun-Sik Oh , Won-Hyouk Jang
发明人： Il-Soo PARK , Jun-Sik Oh , Won-Hyouk Jang
IPC分类号： C23C16/448 , C23C16/455
CPC分类号： C23C14/12 , C23C14/243
摘要： An evaporator for depositing material on a substrate includes a crucible configured to receive a deposition material, and a plurality of nozzles in fluid communication with the crucible and facing the substrate, the nozzles projecting away from the crucible and being arranged in a first direction along the crucible, at least two of the nozzles being inclined with respect to a normal to the substrate.
摘要翻译：用于在衬底上沉积材料的蒸发器包括构造成接收沉积材料的坩埚和与坩埚流体连通并面对衬底的多个喷嘴，喷嘴远离坩埚突出并且沿着第一方向沿着坩埚中，至少两个喷嘴相对于基板的法线倾斜。

2. 发明授权

US08392010B2 Method for controlling critical dimension in semiconductor production process, and semiconductor manufacturing line supporting the same 失效
标题翻译：用于控制半导体生产过程中的关键尺寸的方法，以及支持其的半导体制造线
公开(公告)号：US08392010B2
公开(公告)日：2013-03-05
申请号：US12912935
申请日：2010-10-27
申请人： Eugene Kang , Won-Hyouk Jang , Joo-Hwa Lee
发明人： Eugene Kang , Won-Hyouk Jang , Joo-Hwa Lee
IPC分类号： G06F19/00 , G05B13/02
CPC分类号： G05B19/41875 , G05B2219/32177 , G05B2219/32191 , G05B2219/32201 , G05B2219/45031 , Y02P90/22
摘要： A critical dimension controlling method in a semiconductor production process includes determining whether a model is to undergo a discontinuous production process when a run is inserted in a semiconductor manufacturing line, applying an offset for said model or a common offset for a model group including said model according to the determination, executing a production process in dependence upon a process variation along with the offset for the model or the common offset for the model group, and measuring an actual critical dimension in the production process. The offset for the model is calculated based on a previously measured actual critical dimension, and the calculated offset for the model is applied to the calculation of the common offset for the model group.
摘要翻译：半导体制造过程中的关键尺寸控制方法包括：当在半导体制造线中插入运行时，确定模型是否经历不连续生产过程，对所述模型应用偏移量或对包括所述模型的模型组应用偏移量根据确定，根据工艺变化以及模型组的偏移量或模型组的共同偏移量执行生产过程，并测量生产过程中的实际临界尺寸。基于先前测量的实际临界尺寸计算模型的偏移量，并将模型的计算偏移量应用于模型组的公差值的计算。

3. 发明申请

US20110224819A1 METHOD FOR CONTROLLING CRITICAL DIMENSION IN SEMICONDUCTOR PRODUCTION PROCESS, AND SEMICONDUCTOR MANUFACTURING LINE SUPPORTING THE SAME 失效
标题翻译：用于控制半导体生产过程中的关键尺寸的方法，以及支持其的半导体制造线
公开(公告)号：US20110224819A1
公开(公告)日：2011-09-15
申请号：US12912935
申请日：2010-10-27
申请人： Eugene Kang , Won-Hyouk Jang , Joo-Hwa Lee
发明人： Eugene Kang , Won-Hyouk Jang , Joo-Hwa Lee
IPC分类号： G05B13/04
CPC分类号： G05B19/41875 , G05B2219/32177 , G05B2219/32191 , G05B2219/32201 , G05B2219/45031 , Y02P90/22
摘要： A critical dimension controlling method in a semiconductor production process includes determining whether a model is to undergo a discontinuous production process when a run is inserted in a semiconductor manufacturing line, applying an offset for said model or a common offset for a model group including said model according to the determination, executing a production process in dependence upon a process variation along with the offset for the model or the common offset for the model group, and measuring an actual critical dimension in the production process. The offset for the model is calculated based on a previously measured actual critical dimension, and the calculated offset for the model is applied to the calculation of the common offset for the model group.
摘要翻译：半导体制造过程中的关键尺寸控制方法包括：当在半导体制造线中插入运行时，确定模型是否经历不连续生产过程，对所述模型应用偏移量或对包括所述模型的模型组应用偏移量根据确定，根据工艺变化以及模型组的偏移量或模型组的共同偏移量执行生产过程，并测量生产过程中的实际临界尺寸。基于先前测量的实际临界尺寸计算模型的偏移量，并将模型的计算偏移量应用于模型组的公差值的计算。

4. 发明授权

US07824819B2 Membrane-electrode assembly for mixed reactant fuel cell and mixed reactant fuel cell system including the same 有权
标题翻译：用于混合反应物燃料电池的膜 - 电极组件和包括其的混合反应物燃料电池系统
公开(公告)号：US07824819B2
公开(公告)日：2010-11-02
申请号：US11705827
申请日：2007-02-14
申请人： Chan Kwak , Alexey Alexandrovichserov , Jun-Won Suh , Won-Hyouk Jang , Si-Hyun Lee
发明人： Chan Kwak , Alexey Alexandrovichserov , Jun-Won Suh , Won-Hyouk Jang , Si-Hyun Lee
IPC分类号： H01M8/02 , H01M8/10 , H01M4/86
CPC分类号： H01M8/1004 , H01M4/8605 , H01M4/9083 , H01M4/926 , H01M8/0234 , H01M8/04089 , H01M8/04186 , H01M8/1011 , H01M8/1023 , H01M8/1039 , Y02E60/523
摘要： A membrane-electrode assembly for a mixed reactant fuel cell system is provided. The membrane-electrode assembly does not require a separator that physically separates the membrane-electrode assemblies from each other in a stack. The membrane-electrode assembly of the present invention instead includes an electrode substrate that is disposed on a surface of an anode or a cathode of the membrane-electrode assembly. The electrode substrate has a flow path, through which a fuel and an oxidant are supplied. The fuel and oxidant are absorbed into the electrode substrate and further into the anode and the cathode. The fuel and the oxidant are selectively oxidized and reduced in the anode and the cathode, respectively, to produce electricity.
摘要翻译：提供了一种用于混合反应物燃料电池系统的膜 - 电极组件。膜 - 电极组件不需要将叠层中的膜 - 电极组件彼此物理隔离的分离器。本发明的膜 - 电极组件包括设置在膜 - 电极组件的阳极或阴极的表面上的电极基板。电极基板具有供给燃料和氧化剂的流路。燃料和氧化剂被吸收到电极基底中并进一步吸收到阳极和阴极中。燃料和氧化剂分别在阳极和阴极中被选择性地氧化和还原以产生电。

5. 发明申请

US20070224487A1 Membrane-electrode assembly for mixed reactant fuel cell and mixed reactant fuel cell system including the same 有权
标题翻译：用于混合反应物燃料电池的膜 - 电极组件和包括其的混合反应物燃料电池系统
公开(公告)号：US20070224487A1
公开(公告)日：2007-09-27
申请号：US11705827
申请日：2007-02-14
申请人： Chan Kwak , Alexey Alexandrovichserov , Jun-Won Suh , Won-Hyouk Jang , Si-Hyun Lee
发明人： Chan Kwak , Alexey Alexandrovichserov , Jun-Won Suh , Won-Hyouk Jang , Si-Hyun Lee
IPC分类号： H01M4/86 , H01M8/10 , H01M4/96
CPC分类号： H01M8/1004 , H01M4/8605 , H01M4/9083 , H01M4/926 , H01M8/0234 , H01M8/04089 , H01M8/04186 , H01M8/1011 , H01M8/1023 , H01M8/1039 , Y02E60/523
摘要： A membrane-electrode assembly for a mixed reactant fuel cell system is provided. The membrane-electrode assembly does not require a separator that physically separates the membrane-electrode assemblies from each other in a stack. The membrane-electrode assembly of the present invention instead includes an electrode substrate that is disposed on a surface of an anode or a cathode of the membrane-electrode assembly. The electrode substrate has a flow path, through which a fuel and an oxidant are supplied. The fuel and oxidant are absorbed into the electrode substrate and further into the anode and the cathode. The fuel and the oxidant are selectively oxidized and reduced in the anode and the cathode, respectively, to produce electricity.
摘要翻译：提供了一种用于混合反应物燃料电池系统的膜 - 电极组件。膜 - 电极组件不需要将叠层中的膜 - 电极组件彼此物理隔离的分离器。本发明的膜 - 电极组件包括设置在膜 - 电极组件的阳极或阴极的表面上的电极基板。电极基板具有供给燃料和氧化剂的流路。燃料和氧化剂被吸收到电极基底中并进一步吸收到阳极和阴极中。燃料和氧化剂分别在阳极和阴极中被选择性地氧化和还原以产生电。

6. 发明授权

US08161798B2 Density sensing device and fuel cell system with it 有权
标题翻译：密度传感装置和燃料电池系统
公开(公告)号：US08161798B2
公开(公告)日：2012-04-24
申请号：US11889028
申请日：2007-08-08
申请人： Won-Hyouk Jang , Do-Young Kim , Si-Hyun Lee , Jung-Kurn Park , Myeong-Ju Ha , Sang-Min Jeon
发明人： Won-Hyouk Jang , Do-Young Kim , Si-Hyun Lee , Jung-Kurn Park , Myeong-Ju Ha , Sang-Min Jeon
IPC分类号： G01N9/00
CPC分类号： G01N9/002 , G01N27/06 , G01N2291/02863 , G01N2291/0427 , H01M8/04194 , H01M8/04373 , H01M8/04447 , H01M8/04738 , H01M8/04798 , H01M8/1011 , H01M2008/1095 , Y02E60/523
摘要： The disclosed is a density sensing device of a fuel cell system and a fuel cell system having the density sensing device. The density sensing device includes a density sensor that includes a collision sensor and a variable resistor coupled to the collision sensor. The collision sensor is dipped into a fuel solution, and the collisions of molecules of the fuel solution are detected in the collision sensor. The resistance of the variable resistor varies depending on an amount of the collision detected by the collision sensor. The resistance further is converted to a density by the use of a table that includes a relationship between resistance and density. The density sensing device can further include a sensor driver. The sensor driver can be a piezoelectric member that is attached to the collision sensor. The collision sensor vibrates together with the piezoelectric member when a driving signal is applied to the piezoelectric member, which improves the accuracy of the measurement of the density.
摘要翻译：所公开的是具有密度感测装置的燃料电池系统和燃料电池系统的密度感测装置。密度感测装置包括密度传感器，其包括碰撞传感器和耦合到碰撞传感器的可变电阻器。将碰撞传感器浸入燃料溶液中，并在碰撞传感器中检测燃料溶液的分子碰撞。可变电阻器的电阻根据碰撞传感器检测到的碰撞量而变化。电阻进一步通过使用包括电阻和密度之间的关系的表转换为密度。密度感测装置还可以包括传感器驱动器。传感器驱动器可以是附接到碰撞传感器的压电元件。当将驱动信号施加到压电元件时，碰撞传感器与压电元件一起振动，这提高了密度测量的精度。

7. 发明授权

US07836912B2 Fuel cartridge coupler for fuel cell 有权
标题翻译：用于燃料电池的燃油箱联接器
公开(公告)号：US07836912B2
公开(公告)日：2010-11-23
申请号：US11797625
申请日：2007-05-04
申请人： Won-Hyouk Jang , Woong-Ho Cho , Sang-Hyeon Choi , Jong-Ki Lee , Hyung-Keun Lee
发明人： Won-Hyouk Jang , Woong-Ho Cho , Sang-Hyeon Choi , Jong-Ki Lee , Hyung-Keun Lee
IPC分类号： H01M2/02
CPC分类号： H01M8/04201 , Y10T137/87949 , Y10T137/87957
摘要： A fuel cartridge coupler to couple a cartridge body storing fuel to a fuel cell system, the fuel cartridge coupler including: a first coupling member arranged in the cartridge body; a second coupling member assembled with the first coupling member in the fuel cell system; a first nozzle assembly including a first fluid path to discharge fuel stored in the cartridge body, the fuel cartridge being elastically supported by the first coupling member and biased by the second coupling member to open and close the first fluid path; and a second nozzle assembly including a second fluid path to inject the fuel passing through the first fluid path into the fuel cell system, the second nozzle assembly being elastically supported by the second coupling member and biased by the first nozzle assembly to open and close the second fluid path.
摘要翻译：一种燃料盒联接器，用于将存储燃料的盒体联接到燃料电池系统，所述燃料盒联接器包括：布置在所述盒体中的第一联接构件; 与燃料电池系统中的第一联接构件组装的第二联接构件; 第一喷嘴组件，包括用于排放存储在所述盒体中的燃料的第一流体路径，所述燃料盒由所述第一联接构件弹性支撑并由所述第二联接构件偏压以打开和关闭所述第一流体路径; 以及第二喷嘴组件，其包括第二流体路径，以将通过所述第一流体路径的燃料喷射到所述燃料电池系统中，所述第二喷嘴组件由所述第二联接构件弹性支撑并且被所述第一喷嘴组件偏压以打开和关闭第二流体路径。

8. 发明授权

US08658002B2 System for sputtering and method thereof 有权
标题翻译：溅射系统及其方法
公开(公告)号：US08658002B2
公开(公告)日：2014-02-25
申请号：US12911569
申请日：2010-10-25
申请人： Eu-Gene Kang , Won-Hyouk Jang
发明人： Eu-Gene Kang , Won-Hyouk Jang
IPC分类号： C23C14/34
CPC分类号： C23C14/34 , C23C14/545 , H01J37/32963 , H01J37/3299 , H01J37/34
摘要： A sputtering method includes receiving etch time information for a first substrate detected in a dry etching process, calculating a deposition time for a second substrate from the etch time information for the first substrate, and executing sputtering for the second substrate based the calculated deposition time. The thickness of the thin film deposited on the substrate in the sputter device may be uniformly maintained by using etch end point information detected in an end point detection (EPD) device. A sputtering system comprises a sputter device for executing a sputtering process for depositing a thin film on a substrate by a sputtering method, an EPD device for generating EPD information including etch time information for the substrate for a calculation of a deposition time during which the thin film is deposited, and a controller for calculating a deposition time by using the EPD information, and for controlling the sputter device based on the calculated deposition time.
摘要翻译：溅射方法包括接收在干蚀刻工艺中检测到的第一衬底的蚀刻时间信息，根据第一衬底的蚀刻时间信息计算第二衬底的沉积时间，以及基于计算的沉积时间执行第二衬底的溅射。可以通过使用在端点检测（EPD）装置中检测到的蚀刻终点信息，均匀地保持沉积在溅射装置中的基板上的薄膜的厚度。溅射系统包括用于执行用于通过溅射法在衬底上沉积薄膜的溅射工艺的溅射装置，用于产生EPD信息的EPD装置，包括用于计算沉积时间的衬底的蚀刻时间信息，以及用于通过使用EPD信息计算沉积时间的控制器，以及基于计算出的沉积时间来控制溅射装置。

9. 发明申请

US20110272275A1 System for Sputtering and Method Thereof 有权
标题翻译：溅射系统及其方法
公开(公告)号：US20110272275A1
公开(公告)日：2011-11-10
申请号：US12911569
申请日：2010-10-25
申请人： Eu-Gene Kang , Won-Hyouk Jang
发明人： Eu-Gene Kang , Won-Hyouk Jang
IPC分类号： C23C14/34
CPC分类号： C23C14/34 , C23C14/545 , H01J37/32963 , H01J37/3299 , H01J37/34
摘要： A sputtering method includes receiving etch time information for a first substrate detected in a dry etching process, calculating a deposition time for a second substrate from the etch time information for the first substrate, and executing sputtering for the second substrate based the calculated deposition time. The thickness of the thin film deposited on the substrate in the sputter device may be uniformly maintained by using etch end point information detected in an end point detection (EPD) device. A sputtering system comprises a sputter device for executing a sputtering process for depositing a thin film on a substrate by a sputtering method, an EPD device for generating EPD information including etch time information for the substrate for a calculation of a deposition time during which the thin film is deposited, and a controller for calculating a deposition time by using the EPD information, and for controlling the sputter device based on the calculated deposition time.
摘要翻译：溅射方法包括接收在干蚀刻工艺中检测到的第一衬底的蚀刻时间信息，根据第一衬底的蚀刻时间信息计算第二衬底的沉积时间，以及基于计算的沉积时间执行第二衬底的溅射。可以通过使用在端点检测（EPD）装置中检测到的蚀刻终点信息，均匀地保持沉积在溅射装置中的基板上的薄膜的厚度。溅射系统包括用于执行用于通过溅射法在衬底上沉积薄膜的溅射工艺的溅射装置，用于产生EPD信息的EPD装置，包括用于计算沉积时间的衬底的蚀刻时间信息，以及用于通过使用EPD信息计算沉积时间的控制器，以及基于计算出的沉积时间来控制溅射装置。

10. 发明申请

US20060292405A1 Fuel cell system and method of driving the same 审中-公开
标题翻译：燃料电池系统及其驱动方法
公开(公告)号：US20060292405A1
公开(公告)日：2006-12-28
申请号：US11475465
申请日：2006-06-26
申请人： Won-Hyouk Jang , Jong-Ki Lee , Dong-Yun Lee , Si-Hyun Lee
发明人： Won-Hyouk Jang , Jong-Ki Lee , Dong-Yun Lee , Si-Hyun Lee
IPC分类号： H01M16/00 , H01M8/04
CPC分类号： H01M16/006 , H01M8/04626 , H01M8/0494 , H01M8/04955 , H01M8/0612 , H01M10/46 , H01M2250/30 , Y02B90/18
摘要： A fuel cell system for supplying electricity to a load system, the fuel cell system comprising a fuel cell unit generating electricity from air and fuel, a power supply unit supplying the load system with electricity, the power supply unit being charged with the electricity generated from the fuel cell unit in a selective manner, a control unit monitoring a charge condition of the power supply unit and operating the fuel cell unit in order to charge the power supply unit when the power supply unit is discharged to a predetermined level or lower and an output unit supplying the electricity output from the power supply unit to the load system.
摘要翻译：一种用于向负载系统供电的燃料电池系统，所述燃料电池系统包括从空气和燃料产生电力的燃料电池单元，向所述负载系统供电的电源单元，所述电源单元被充电由燃料电池单元，控制单元，其监视电源单元的充电状态并操作燃料电池单元，以便当电源单元放电到预定电平或更低电平时对电源单元充电;以及输出单元将从电源单元输出的电力提供给负载系统。

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