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    • 3. 发明授权
    • Apparatus for processing substrate
    • 基板处理装置
    • US07918940B2
    • 2011-04-05
    • US11342610
    • 2006-01-31
    • Ki-Choul AnYoung-Chul JoungTae-Young HaJung-Won ChangIl-Ho NohSeung-Bae Lee
    • Ki-Choul AnYoung-Chul JoungTae-Young HaJung-Won ChangIl-Ho NohSeung-Bae Lee
    • C23C16/00
    • H01L21/67236H01L21/67173H01L21/67748
    • In a substrate processing apparatus for forming thin layers on a substrate used for an organic light emitting diode, the apparatus includes a mask attaching chamber, a deposition chamber and a mask detaching chamber. The mask attaching chamber, the deposition chamber and the mask detaching chamber are provided with a transferring guide installed thereinside, and a substrate supporter for supporting the substrate moves along the transferring guide in or between the chambers. Thus, a time for processing the substrate and an area for the apparatus may be reduced. Also, the chambers are grouped in one or more, and a gate valve is installed between the grouped chambers for opening and closing a path between the grouped chambers. Accordingly, the chambers may be continuously maintained in a vacuum state when any one of the chambers is repaired.
    • 在用于有机发光二极管的基板上形成薄层的基板处理装置中,该装置包括掩模附着室,沉积室和掩模分离室。 掩模附着室,沉积室和掩模拆卸室设置有安装在其上的传送导向器,用于支撑基板的基板支撑件沿着传送导向件在室内或室之间移动。 因此,可以减少处理基板和设备的区域的时间。 而且,这些室分组成一个或多个,并且闸门安装在分组室之间,用于打开和关闭分组室之间的路径。 因此,当任何一个腔室被修复时,腔室可以被连续地保持在真空状态。