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1. 发明授权

US06688532B2 Controller, temperature controller and heat processor using same 失效
标题翻译：控制器，温控器和热处理器使用相同
公开(公告)号：US06688532B2
公开(公告)日：2004-02-10
申请号：US10300150
申请日：2002-11-19
申请人： Ikuo Nanno , Yoshihiro Nagami , Naotaka Uchiyama , Gen Yoneda , Masahito Tanaka
发明人： Ikuo Nanno , Yoshihiro Nagami , Naotaka Uchiyama , Gen Yoneda , Masahito Tanaka
IPC分类号： G08B2100
CPC分类号： G05B17/02 , G05B13/042
摘要： A controller controls a physical variable such as temperature of a controlled system. A variable calculator calculates and output a manipulated variable on the controlled system based on of a target value such as a target temperature and a feedback value such as the measured temperature of the controlled system. A dead-time compensator provides a dead-time compensated output using a model simulating the controlled system having a dead time and an idealized model having no dead time, based on the manipulated variable outputted from the variable calculator to carry out an ordinary control and a dead-time compensated control. A switch functions to select the dead-time compensated control by providing a dead-time compensated output to the variable calculator or an ordinary control providing no dead-time compensated output to the variable calculator. The dead-time compensated control is carried out at least during set point response of the controller.
摘要翻译：控制器控制诸如受控系统的温度的物理变量。可变计算器基于诸如目标温度的目标值和诸如受控系统的测量温度的反馈值来计算并输出受控系统上的操纵变量。死区补偿器基于从可变计算器输出的操纵变量，使用模拟具有死区时间的受控系统的模型和没有死区时间的理想模型来提供死区补偿输出，以执行普通控制和死区补偿控制。开关用于通过向可变计算器提供死区补偿输出或者向变量计算器提供没有死区补偿输出的普通控制来选择死区补偿控制。至少在控制器的设定点响应期间执行死区补偿控制。

2. 发明授权

US06951998B2 Controller, temperature regulator and heat treatment apparatus 有权
标题翻译：控制器，温度调节器和热处理设备
公开(公告)号：US06951998B2
公开(公告)日：2005-10-04
申请号：US10257241
申请日：2001-04-13
申请人： Ikuo Nanno , Kousaku Ando , Masahito Tanaka , Seiya Narimatsu , Naotaka Uchiyama , Motohisa Furukawa , Akira Takaishi , Yuuki Kataoka , Tsunetoshi Ooba , Atsushi Mukai , Takeshi Wakabayashi , Hirokazu Kitamura , Nobumasa Nakamizo , Hideki Kobori
发明人： Ikuo Nanno , Kousaku Ando , Masahito Tanaka , Seiya Narimatsu , Naotaka Uchiyama , Motohisa Furukawa , Akira Takaishi , Yuuki Kataoka , Tsunetoshi Ooba , Atsushi Mukai , Takeshi Wakabayashi , Hirokazu Kitamura , Nobumasa Nakamizo , Hideki Kobori
IPC分类号： G05B11/32 , G05B11/42 , G05B13/02 , G05D23/20 , H05B1/02
CPC分类号： G05B13/024 , G05B11/32 , G05B11/42 , G05D23/1919 , G05D23/1932 , G05D23/20
摘要： A plurality of individually corresponding heaters and temperature sensors are provided along with a plurality of a PID control means. An average temperature/gradient temperature calculating means calculates the average temperatures of the temperatures measured by the temperature sensors and the gradient temperatures based on the measured temperatures. Each of the PID control means outputs an operation signal so that the average temperatures or gradient temperatures may be made equal to the desired values. A distributing means distributes the operation signal from each of the PID control means to each heater so that control by the PID control means may produce no effect on the control of the other PID control means.
摘要翻译：多个单独对应的加热器和温度传感器与多个PID控制装置一起提供。平均温度/梯度温度计算装置根据测量的温度来计算由温度传感器测量的温度和梯度温度的平均温度。 PID控制装置中的每一个输出操作信号，使得平均温度或梯度温度可以等于期望值。分配装置将来自每个PID控制装置的操作信号分配给每个加热器，使得PID控制装置的控制可以不对其他PID控制装置的控制产生影响。

3. 发明申请

US20100163546A1 WIRING STRUCTURE, HEATER DRIVING DEVICE, MEASURING DEVICE, AND CONTROL SYSTEM 审中-公开
标题翻译：接线结构，加热器驱动装置，测量装置和控制系统
公开(公告)号：US20100163546A1
公开(公告)日：2010-07-01
申请号：US12642518
申请日：2009-12-18
申请人： Ikuo NANNO , Masahito Tanaka , Mamoru Egi
发明人： Ikuo NANNO , Masahito Tanaka , Mamoru Egi
IPC分类号： H05B1/02 , H02G3/00
CPC分类号： H05B3/74 , H05B2213/03 , H05B2213/07
摘要： The number of wirings and the number of switching elements are decreased in a heater, a sensor, and the like. First to ninth heaters that heat a hot plate are connected into a matrix form between first power lines in a row direction and second power lines in a column direction. The first power lines are connected to one end of a power supply through three switching elements, respectively. The second power lines are connected to the other end of the power supply through three switching elements, respectively. On-off control is performed to the switching elements to select the heater to be driven. Therefore, the number of power lines and the number of switching elements are decreased compared with a conventional technique in which the heaters are separately wired.
摘要翻译：在加热器，传感器等中布线的数量和开关元件的数量减少。将热板加热的第一至第九加热器在列方向上的第一电力线之间和列方向上的第二电力线连接成矩阵形式。第一电源线分别通过三个开关元件连接到电源的一端。第二电源线分别通过三个开关元件连接到电源的另一端。对开关元件进行开关控制，以选择要驱动的加热器。因此，与分别布线加热器的传统技术相比，电力线的数量和开关元件的数量减少。

4. 发明授权

US07536230B2 Control method, temperature control method, adjustment method, temperature controller, program, recording medium and heat treatment device 失效
标题翻译：控制方法，温度控制方法，调节方法，温度控制器，程序，记录介质和热处理装置
公开(公告)号：US07536230B2
公开(公告)日：2009-05-19
申请号：US11476198
申请日：2006-06-28
申请人： Ikuo Nanno , Takaaki Yamada , Masahito Tanaka , Yosuke Iwai , Takeshi Wakabayashi
发明人： Ikuo Nanno , Takaaki Yamada , Masahito Tanaka , Yosuke Iwai , Takeshi Wakabayashi
IPC分类号： G05B13/02
CPC分类号： G05D23/1917
摘要： When a work is set on a hot plate and a heat treatment is started and the like, an addition waveform of a target temperature is formed based on a previously formed data of an adjustment value, and a temperature is controlled by adding the addition waveform to the target temperature SP, and with the data of the adjustment value, the variation in temperature of the work is prevented using an interference matrix showing a relation between the target temperature SP and the temperature of the work.
摘要翻译：当在热板上设置工件并开始热处理等时，基于预先形成的调整值的数据形成目标温度的相加波形，并且通过将加法波形相加来控制温度目标温度SP，并且利用调整值的数据，使用表示目标温度SP与工件温度之间的关系的干涉矩阵来防止工件的温度变化。

5. 发明申请

US20070010403A1 Control method, temperature control method, adjustment method, temperature controller, program, recording medium and heat treatment device 失效
标题翻译：控制方法，温度控制方法，调节方法，温度控制器，程序，记录介质和热处理装置
公开(公告)号：US20070010403A1
公开(公告)日：2007-01-11
申请号：US11476198
申请日：2006-06-28
申请人： Ikuo Nanno , Takaaki Yamada , Masahito Tanaka , Yosuke Iwai , Takeshi Wakabayashi
发明人： Ikuo Nanno , Takaaki Yamada , Masahito Tanaka , Yosuke Iwai , Takeshi Wakabayashi
IPC分类号： H01L39/24
CPC分类号： G05D23/1917
摘要： When a work is set on a hot plate and a heat treatment is started and the like, an addition waveform of a target temperature is formed based on a previously formed data of an adjustment value, and a temperature is controlled by adding the addition waveform to the target temperature SP, and with the data of the adjustment value, the variation in temperature of the work is prevented using an interference matrix showing a relation between the target temperature SP and the temperature of the work.
摘要翻译：当在热板上设置工件并开始热处理等时，基于预先形成的调整值的数据形成目标温度的相加波形，并且通过将加法波形相加来控制温度目标温度SP，并且利用调整值的数据，使用表示目标温度SP与工件温度之间的关系的干涉矩阵来防止工件的温度变化。

6. 发明授权

US07548796B2 Method, apparatus, and program for controlling temperature within a heating system 失效
标题翻译：用于控制加热系统内的温度的方法，装置和程序
公开(公告)号：US07548796B2
公开(公告)日：2009-06-16
申请号：US11331345
申请日：2006-01-13
申请人： Masahito Tanaka , Ikuo Nanno , Akira Takaishi
发明人： Masahito Tanaka , Ikuo Nanno , Akira Takaishi
IPC分类号： G06F19/00 , C03B9/41 , G05B21/00 , G05D23/00
CPC分类号： G05D23/1935 , C03B29/08 , F27B9/40 , F27D19/00 , F27D21/0014
摘要： A temperature variation of a glass substrate 2 at a plurality of measuring points in a continuous furnace 3 when preset temperatures of respective furnaces 31-33 are changed is estimated in the form of a matrix based on a model, an inverse matrix of the matrix is used so as to calculate correction values in such manner that a temperature of the glass substrate 2 corresponds to a temperature of a desired temperature profile, and the preset temperatures are corrected based on the correction values.
摘要翻译：在各炉31〜33的预设温度变化的连续炉3的多个测量点处的玻璃基板2的温度变化以基于模型的矩阵的形式被估计，矩阵的逆矩阵为使用以便以使得玻璃基板2的温度对应于所需温度分布的温度的方式计算校正值，并且基于校正值校正预设温度。

7. 发明授权

US07324877B2 Temperature control method and apparatus 失效
标题翻译：温度控制方法及装置
公开(公告)号：US07324877B2
公开(公告)日：2008-01-29
申请号：US11245727
申请日：2005-10-06
申请人： Masahito Tanaka , Yosuke Iwai , Ikuo Nanno , Takaaki Yamada , Toshiro Miyachi
发明人： Masahito Tanaka , Yosuke Iwai , Ikuo Nanno , Takaaki Yamada , Toshiro Miyachi
IPC分类号： G01K15/00
CPC分类号： H01L21/67248 , G05D23/1935 , H01L21/67103
摘要： In a method of controlling the temperature of a target object by measuring to obtain detected temperatures at a plurality of measurement positions and controlling a processing device such as a heater such that each detected temperature will match the corresponding one of target temperatures set for the processing device, a preliminary step is taken to determine the degrees of interference at the measurement positions by varying the target temperatures and the degrees of interference thus determined are used to correct the set target temperatures or the detected temperatures.
摘要翻译：在通过测量来控制目标物体的温度以获得多个测量位置的检测温度并控制诸如加热器的处理装置的方法中，使得每个检测到的温度将与为处理装置设定的对应温度相匹配采取预先步骤，通过改变目标温度来确定测量位置处的干扰程度，并且使用这样确定的干涉度来校正设定的目标温度或检测到的温度。

8. 发明授权

US07218999B2 Target value processing unit, temperature controller, control process implementing system, process controlling method, target value processing program, and recording medium 失效
标题翻译：目标值处理单元，温度控制器，控制处理实施系统，过程控制方法，目标值处理程序和记录介质
公开(公告)号：US07218999B2
公开(公告)日：2007-05-15
申请号：US11062756
申请日：2005-02-23
申请人： Nobutomo Matsunaga , Shigeyasu Kawaji , Ikuo Nanno , Masahito Tanaka , Takaaki Yamada , Yosuke Iwai , Takeshi Wakabayashi , Kazuo Tsuboi
发明人： Nobutomo Matsunaga , Shigeyasu Kawaji , Ikuo Nanno , Masahito Tanaka , Takaaki Yamada , Yosuke Iwai , Takeshi Wakabayashi , Kazuo Tsuboi
IPC分类号： G05D23/00 , G05B13/02
CPC分类号： G05B11/32 , G05B5/01 , G05B11/42
摘要： A target value processing unit, includes: an input section to which a target value signal showing a target value of a control process is inputted; a target value shaping unit shaping the target value signal inputted to the input section, into a signal form which is proper for a control treatment of a regulator implementing the control process; and an output section outputting to the regulator a shaped target value signal which is shaped by the target value shaping unit. The target value processing unit realizes the high-level control process without improving the regulator.
摘要翻译：目标值处理单元包括：输入表示控制处理的目标值的目标值信号的输入部; 将输入到所述输入部的目标值信号整形为适用于进行所述控制处理的调节器的控制处理的信号形式的目标值整形部; 以及输出部，向所述调节器输出由所述目标值整形单元成形的成形目标值信号。目标值处理单元实现高级控制过程而不改进调节器。

9. 发明申请

US20060173646A1 Method, apparatus, and program for controlling temperature within a heating system 失效
标题翻译：用于控制加热系统内的温度的方法，装置和程序
公开(公告)号：US20060173646A1
公开(公告)日：2006-08-03
申请号：US11331345
申请日：2006-01-13
申请人： Masahito Tanaka , Ikuo Nanno , Akira Takaishi
发明人： Masahito Tanaka , Ikuo Nanno , Akira Takaishi
IPC分类号： G06F15/00
CPC分类号： G05D23/1935 , C03B29/08 , F27B9/40 , F27D19/00 , F27D21/0014
摘要： A temperature variation of a glass substrate 2 at a plurality of measuring points in a continuous furnace 3 when preset temperatures of respective furnaces 31-33 are changed is estimated in the form of a matrix based on a model, an inverse matrix of the matrix is used so as to calculate correction values in such manner that a temperature of the glass substrate 2 corresponds to a temperature of a desired temperature profile, and the preset temperatures are corrected based on the correction values.
摘要翻译：在相应炉3 3 -3 3的预设温度改变时，在连续炉3中的多个测量点处的玻璃基板2的温度变化估计在基于模型的矩阵的形式，使用矩阵的逆矩阵，以便以使得玻璃基板2的温度对应于所需温度分布的温度的方式计算校正值，并且校正预设温度基于校正值。

10. 发明申请

US20060161365A1 Temperature control method and apparatus 失效
标题翻译：温度控制方法及装置
公开(公告)号：US20060161365A1
公开(公告)日：2006-07-20
申请号：US11245727
申请日：2005-10-06
申请人： Masahito Tanaka , Yosuke Iwai , Ikuo Nanno , Takaaki Yamada , Toshiro Miyachi
发明人： Masahito Tanaka , Yosuke Iwai , Ikuo Nanno , Takaaki Yamada , Toshiro Miyachi
IPC分类号： G01K15/00
CPC分类号： H01L21/67248 , G05D23/1935 , H01L21/67103
摘要： In a method of controlling the temperature of a target object by measuring to obtain detected temperatures at a plurality of measurement positions and controlling a processing device such as a heater such that each detected temperature will match the corresponding one of target temperatures set for the processing device, a preliminary step is taken to determine the degrees of interference at the measurement positions by varying the target temperatures and the degrees of interference thus determined are used to correct the set target temperatures or the detected temperatures.
摘要翻译：在通过测量来控制目标物体的温度以获得多个测量位置的检测温度并控制诸如加热器的处理装置的方法中，使得每个检测到的温度将与为处理装置设定的对应温度相匹配采取预先步骤，通过改变目标温度来确定测量位置处的干扰程度，并且使用这样确定的干涉度来校正设定的目标温度或检测到的温度。

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