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1. 发明授权

US08136820B2 Electrostatic chuck with heater and manufacturing method thereof 有权
标题翻译：带加热器的静电吸盘及其制造方法
公开(公告)号：US08136820B2
公开(公告)日：2012-03-20
申请号：US11841172
申请日：2007-08-20
申请人： Ikuhisa Morioka , Kazuhiro Nobori , Tetsuya Kawajiri , Akiyoshi Hattori
发明人： Ikuhisa Morioka , Kazuhiro Nobori , Tetsuya Kawajiri , Akiyoshi Hattori
IPC分类号： B23B31/28 , H01L21/683
CPC分类号： H01L21/6831 , Y10T279/23
摘要： An electrostatic chuck with a heater includes: a base formed of a sintered body containing alumina; an ESC electrode provided in an upper portion side in the base; and a resistance heating body embedded in a lower portion side in the base. The base is composed of a dielectric layer from the ESC electrode to an upper surface of the base, and of a support member from the ESC electrode to a lower surface of the base. In the support member, a carbon content differs between an ESC electrode neighborhood in contact with the dielectric layer and a lower region below the ESC electrode neighborhood, a carbon content in the dielectric layer is 100 wt ppm or less, the carbon content in the ESC electrode neighborhood is 0.13 wt % or less, the carbon content in the lower region is 0.03 wt % or more and 0.5 wt % or less, and the carbon content in the ESC electrode neighborhood is smaller than the carbon content in the lower region. The resistance heating body contains niobium or platinum.
摘要翻译：具有加热器的静电卡盘包括：由含有氧化铝的烧结体形成的基体; 设置在所述基座的上部侧的ESC电极; 以及嵌入基座的下部侧的电阻加热体。基体由从ESC电极到基底的上表面的电介质层和从ESC电极到基底的下表面的支撑构件构成。在支撑构件中，与电介质层接触的ESC电极附近和ESC电极附近的下部区域之间的碳含量不同，电介质层中的碳含量为100重量ppm以下，ESC中的碳含量电极附近为0.13重量％以下，下部区域的碳含量为0.03重量％以上且0.5重量％以下，ESC电极附近的碳含量低于下部区域的碳含量。电阻加热体包含铌或铂。

2. 发明申请

US20080049374A1 ELECTROSTATIC CHUCK WITH HEATER AND MANUFACTURING METHOD THEREOF 有权
标题翻译：带加热器的静电卡盘及其制造方法
公开(公告)号：US20080049374A1
公开(公告)日：2008-02-28
申请号：US11841172
申请日：2007-08-20
申请人： Ikuhisa Morioka , Kazuhiro Nobori , Tetsuya Kawajiri , Akiyoshi Hattori
发明人： Ikuhisa Morioka , Kazuhiro Nobori , Tetsuya Kawajiri , Akiyoshi Hattori
IPC分类号： H01L21/683
CPC分类号： H01L21/6831 , Y10T279/23
摘要： An electrostatic chuck with a heater includes: a base formed of a sintered body containing alumina; an ESC electrode provided in an upper portion side in the base; and a resistance heating body embedded in a lower portion side in the base. The base is composed of a dielectric layer from the ESC electrode to an upper surface of the base, and of a support member from the ESC electrode to a lower surface of the base. In the support member, a carbon content differs between an ESC electrode neighborhood in contact with the dielectric layer and a lower region below the ESC electrode neighborhood, a carbon content in the dielectric layer is 100 wt ppm or less, the carbon content in the ESC electrode neighborhood is 0.13 wt % or less, the carbon content in the lower region is 0.03 wt % or more but 0.5 wt % or less, and the carbon content in the ESC electrode neighborhood is smaller than the carbon content in the lower region. The resistance heating body contains niobium or platinum.
摘要翻译：具有加热器的静电卡盘包括：由含有氧化铝的烧结体形成的基体; 设置在所述基座的上部侧的ESC电极; 以及嵌入基座的下部侧的电阻加热体。基体由从ESC电极到基体的上表面的电介质层和从ESC电极到基底的下表面的支撑体构成。在支撑构件中，与电介质层接触的ESC电极附近和ESC电极附近的下部区域之间的碳含量不同，电介质层中的碳含量为100重量ppm以下，ESC中的碳含量电极附近为0.13重量％以下，下部区域的碳含量为0.03重量％以上且0.5重量％以下，ESC电极附近的碳含量低于下部区域的碳含量。电阻加热体包含铌或铂。

3. 发明申请

US20080266745A1 ELECTROSTATIC CHUCK WITH HEATER 有权
标题翻译：带加热器的静电卡盘
公开(公告)号：US20080266745A1
公开(公告)日：2008-10-30
申请号：US11777318
申请日：2007-07-13
申请人： Kazuhiro Nobori , Tetsuya Kawajiri , Akiyoshi Hattori
发明人： Kazuhiro Nobori , Tetsuya Kawajiri , Akiyoshi Hattori
IPC分类号： H01L21/683
CPC分类号： H01L21/6831 , H01L21/68757
摘要： An electrostatic chuck with a heater including: a base which is composed of a sintered body containing alumina; an electrode disposed in an upper part of the base: and a resistance heating element embedded in a lower part of the base. The base includes a dielectric layer between the electrode and an upper surface of the base and a supporting member between the electrode and a lower surface of the base. The dielectric layer has a carbon content of not more than 100 ppm, and the supporting member has a carbon content of 0.03 to 0.25 wt %. Moreover, the resistance heating element is formed into a coil and mainly composed of niobium.
摘要翻译：一种具有加热器的静电卡盘，包括：由包含氧化铝的烧结体构成的基体; 设置在基座的上部的电极和嵌入基座的下部的电阻加热元件。底座包括电极和基座的上表面之间的电介质层，以及在电极和底座的下表面之间的支撑构件。电介质层的碳含量不大于100ppm，并且支撑构件的碳含量为0.03-0.25重量％。此外，电阻加热元件形成为主要由铌构成的线圈。

4. 发明授权

US07848075B2 Electrostatic chuck with heater 有权
标题翻译：带加热器的静电吸盘
公开(公告)号：US07848075B2
公开(公告)日：2010-12-07
申请号：US11777318
申请日：2007-07-13
申请人： Kazuhiro Nobori , Tetsuya Kawajiri , Akiyoshi Hattori
发明人： Kazuhiro Nobori , Tetsuya Kawajiri , Akiyoshi Hattori
IPC分类号： H01L21/683
CPC分类号： H01L21/6831 , H01L21/68757
摘要： An electrostatic chuck with a heater including: a base which is composed of a sintered body containing alumina, an electrode disposed in an upper part of the base, and a resistance heating element embedded in a lower part of the base. The base includes a dielectric layer between the electrode and an upper surface of the base and a supporting member between the electrode and a lower surface of the base. The dielectric layer has a carbon content of not more than 100 ppm, and the supporting member has a carbon content of 0.03 to 0.25 wt %. Moreover, the resistance heating element is formed into a coil and mainly composed of niobium.
摘要翻译：一种具有加热器的静电卡盘，包括：由包含氧化铝的烧结体构成的基底，设置在基部的上部的电极和嵌入基座的下部的电阻加热元件。底座包括电极和基座的上表面之间的电介质层，以及在电极和底座的下表面之间的支撑构件。电介质层的碳含量不大于100ppm，并且支撑构件的碳含量为0.03-0.25重量％。此外，电阻加热元件形成为主要由铌构成的线圈。

5. 发明授权

US07446993B2 Alumina sintered body 有权
标题翻译：氧化铝烧结体
公开(公告)号：US07446993B2
公开(公告)日：2008-11-04
申请号：US11688332
申请日：2007-03-20
申请人： Akiyoshi Hattori , Yutaka Mori , Kazuhiro Nobori
发明人： Akiyoshi Hattori , Yutaka Mori , Kazuhiro Nobori
IPC分类号： H01T23/00
CPC分类号： C04B35/101
摘要： An alumina sintered body comprises an alumina substrate having a first main surface and a second main surface opposing each other, an embedded film electrode made of a metal and embedded in the alumina substrate at a depth HD of 0.4 mm or less from a first main surface SF1, and an embedded terminal formed of a metal, embedded in the alumina substrate nearer a second main surface SF2 side than the embedded electrode. The embedded terminal is in contact with the embedded electrode and a film thickness HE of the embedded electrode is 25 μm or less.
摘要翻译：氧化铝烧结体包括具有彼此相对的第一主表面和第二主表面的氧化铝基体，由金属制成并嵌入氧化铝基底中的深度H D D为0.4的嵌入膜电极 mm以下的嵌入式端子，以及由金属构成的嵌入式端子，嵌入在氧化铝基板中，比嵌入的第二主表面SF2更靠近第二主表面SF2 电极。嵌入式端子与嵌入式电极接触，嵌入式电极的膜厚H E为25μm以下。

6. 发明授权

US07701693B2 Electrostatic chuck with heater and manufacturing method thereof 有权
标题翻译：带加热器的静电吸盘及其制造方法
公开(公告)号：US07701693B2
公开(公告)日：2010-04-20
申请号：US11854071
申请日：2007-09-12
申请人： Akiyoshi Hattori , Kazuhiro Nobori
发明人： Akiyoshi Hattori , Kazuhiro Nobori
IPC分类号： H01L21/683
CPC分类号： B29C67/04 , B29C43/006 , B32B18/00 , C04B35/111 , C04B35/505 , C04B35/5626 , C04B35/62695 , C04B35/645 , C04B37/001 , C04B2235/3217 , C04B2235/6562 , C04B2235/6584 , C04B2235/721 , C04B2235/77 , C04B2235/96 , C04B2235/9607 , C04B2237/34 , C04B2237/343 , H01L21/6831
摘要： An electrostatic chuck includes a base. The base has a support portion made of alumina ceramics, and a surface portion made of yttria ceramics. The surface portion forms at least a substrate mounting surface and side surface of the base on a surface of the support portion. Carbon contents in alumina ceramics of the support portion and yttria ceramics of the surface portion are 0.05 wt % or less.
摘要翻译：静电卡盘包括底座。基体具有由氧化铝陶瓷制成的支撑部分和由氧化钇陶瓷制成的表面部分。所述表面部分至少在所述支撑部分的表面上形成所述基底的基板安装表面和侧表面。表面部分的支撑部分的氧化铝陶瓷和氧化钇陶瓷中的碳含量为0.05重量％以下。

7. 发明申请

US20080174930A1 ELECTROSTATIC CHUCK WITH HEATER AND MANUFACTURING METHOD THEREOF 有权
标题翻译：带加热器的静电卡盘及其制造方法
公开(公告)号：US20080174930A1
公开(公告)日：2008-07-24
申请号：US11854071
申请日：2007-09-12
申请人： Akiyoshi Hattori , Kazuhiro Nobori
发明人： Akiyoshi Hattori , Kazuhiro Nobori
IPC分类号： H01L21/683 , C04B35/10 , C04B35/505 , B29C67/04
CPC分类号： B29C67/04 , B29C43/006 , B32B18/00 , C04B35/111 , C04B35/505 , C04B35/5626 , C04B35/62695 , C04B35/645 , C04B37/001 , C04B2235/3217 , C04B2235/6562 , C04B2235/6584 , C04B2235/721 , C04B2235/77 , C04B2235/96 , C04B2235/9607 , C04B2237/34 , C04B2237/343 , H01L21/6831
摘要： An electrostatic chuck includes a base. The base has a support portion made of alumina ceramics, and a surface portion made of yttria ceramics. The surface portion forms at least a substrate mounting surface and side surface of the base on a surface of the support portion. Carbon contents in alumina ceramics of the support portion and yttria ceramics of the surface portion are 0.05 wt % or less.
摘要翻译：静电卡盘包括底座。基体具有由氧化铝陶瓷制成的支撑部分和由氧化钇陶瓷制成的表面部分。所述表面部分至少在所述支撑部分的表面上形成所述基底的基板安装表面和侧表面。表面部分的支撑部分的氧化铝陶瓷和氧化钇陶瓷中的碳含量为0.05重量％以下。

8. 发明申请

US20070223167A1 ALUMINA SINTERED BODY 有权
标题翻译：铝氧化物烧结体
公开(公告)号：US20070223167A1
公开(公告)日：2007-09-27
申请号：US11688332
申请日：2007-03-20
申请人： Akiyoshi Hattori , Yutaka Mori , Kazuhiro Nobori
发明人： Akiyoshi Hattori , Yutaka Mori , Kazuhiro Nobori
IPC分类号： H02H9/06
CPC分类号： C04B35/101
摘要： An alumina sintered body comprises an alumina substrate having a first main surface and a second main surface opposing each other, an embedded film electrode made of a metal and embedded in the alumina substrate at a depth HD of 0.4 mm or less from a first main surface SF1, and an embedded terminal formed of a metal, embedded in the alumina substrate nearer a second main surface SF2 side than the embedded electrode. The embedded terminal is in contact with the embedded electrode and a film thickness HE of the embedded electrode is 25 μm or less.
摘要翻译：氧化铝烧结体包括具有彼此相对的第一主表面和第二主表面的氧化铝基体，由金属制成并嵌入氧化铝基底中的深度H D D为0.4的嵌入膜电极 mm以下的嵌入式端子，以及由金属构成的嵌入式端子，嵌入在氧化铝基板中，比嵌入的第二主表面SF2更靠近第二主表面SF2 电极。嵌入式端子与嵌入式电极接触，嵌入式电极的膜厚H E为25μm以下。

9. 发明授权

US08008602B2 Electrostatic chuck heater 有权
标题翻译：静电卡盘加热器
公开(公告)号：US08008602B2
公开(公告)日：2011-08-30
申请号：US11879740
申请日：2007-07-18
申请人： Yutaka Mori , Akiyoshi Hattori , Takeru Torigoe
发明人： Yutaka Mori , Akiyoshi Hattori , Takeru Torigoe
IPC分类号： H05B3/68 , H05B3/18 , C23C16/00
CPC分类号： H01L21/6831 , C04B35/111 , C04B35/645 , C04B2235/662 , C04B2235/72 , C04B2235/721 , C04B2235/77 , H01L21/67103
摘要： An electrostatic chuck heater is provided including a base which is formed by applying conductive paste containing a binder to upper and lower surfaces of an alumina sintered body to print an electrostatic electrode and heater electrode, calcining the alumina sintered body, arranging alumina powder above the electrostatic electrode and alumina powder below the heater electrode, and pressing the alumina powder and alumina sintered body in the above state for pressure sintering. The diffusion area ratio of the conductive material near the electrostatic electrode in the dielectric layer is set to not more than 0.25%.
摘要翻译：提供一种静电卡盘加热器，其包括通过将含有粘合剂的导电膏施加到氧化铝烧结体的上表面和下表面而形成的基底，以印刷静电电极和加热器电极，煅烧氧化铝烧结体，将氧化铝粉末排列在静电电极和氧化铝粉末，并在上述状态下压制氧化铝粉末和氧化铝烧结体进行加压烧结。电介质层中的静电电极附近的导电材料的扩散面积比设定为不大于0.25％。

10. 发明授权

US07633738B2 Electrostatic chuck and manufacturing method thereof 有权
标题翻译：静电吸盘及其制造方法
公开(公告)号：US07633738B2
公开(公告)日：2009-12-15
申请号：US11980007
申请日：2007-10-30
申请人： Akiyoshi Hattori
发明人： Akiyoshi Hattori
IPC分类号： H02N13/00 , H01T23/00
CPC分类号： H01L21/6831
摘要： An electrostatic chuck includes a base, and includes an electrode embedded in the base in parallel to a substrate mounting surface of the base. A terminal loaded into a terminal hole drilled into a back surface of the base toward the electrode is bonded to the electrode having a protruded portion with a substantially conical trapezoidal shape, which is formed on a flat surface on the terminal side of the electrode toward the terminal hole. In the protruded portion, an angle made by the flat surface on the terminal side of the electrode and an inclined surface of the protruded portion is 40° or less, and a distance from the flat surface of the electrode to a terminal-bonding surface of the protruded portion is 0.01 to 0.8 mm.
摘要翻译：静电卡盘包括基座，并且包括平行于基座的基板安装表面嵌入基座中的电极。将装载到基座朝向电极的后表面的端子孔的端子接合到具有大致圆锥形的突出部的电极，该突起形状形成在电极的端子侧的平坦表面上端子孔。在突出部中，由电极的端子侧的平坦面和突出部的倾斜面形成的角度为40°以下，从电极的平面到端子接合面的距离突出部分为0.01〜0.8mm。

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