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1. 发明授权

US07079565B2 Systems and methods utilizing laser discharge electrodes with ceramic spoilers 有权
标题翻译：利用具有陶瓷扰流板的激光放电电极的系统和方法
公开(公告)号：US07079565B2
公开(公告)日：2006-07-18
申请号：US10727718
申请日：2003-12-04
申请人： Igor Bragin , Vadim Berger , Oleg Melnikov , Konstantin Aab , Juergen Baumler
发明人： Igor Bragin , Vadim Berger , Oleg Melnikov , Konstantin Aab , Juergen Baumler
IPC分类号： H01S3/097
CPC分类号： H01S3/038 , H01S3/09713 , H01S3/225
摘要： Arcing can be minimized in a discharge chamber of an excimer or molecular fluorine laser system by utilizing an improved electrode structure. An electrode structure can include at least one ceramic spoiler positioned near the discharge region of the electrode. An insulating ceramic spoiler can reduce the effective area over which arcing can occur, and can reduce the likelihood of arcing by improving the flow of gas between the electrodes, such as by allowing for design flexibility and reducing the necessary height of a nose portion used to control the discharge area of the electrode. An improved blower design, which can utilize improved bearings and a dry film lubricant, can help to circulate the laser gas between the electrode structures, such as at a speed of at least 30 m/s in order to operate the laser at repetition rates of 4 kHz or higher.
摘要翻译：通过利用改进的电极结构，在准分子或分子氟激光系统的放电室中可以使电弧最小化。电极结构可以包括位于电极的放电区附近的至少一个陶瓷扰流板。绝缘陶瓷扰流板可以减少可能发生电弧的有效面积，并且可以通过改善电极之间的气体流动来减少电弧的可能性，例如通过允许设计灵活性并减少用于控制电极的放电面积。可以使用改进的轴承和干膜润滑剂的改进的鼓风机设计可以帮助在电极结构之间循环激光气体，例如以至少30m / s的速度循环，以便以重复的速率操作激光 4 kHz或更高。

2. 发明申请

US20050083984A1 Laser system sealing 审中-公开
标题翻译：激光系统密封
公开(公告)号：US20050083984A1
公开(公告)日：2005-04-21
申请号：US10963284
申请日：2004-10-12
申请人： Igor Bragin , Rainer Paetzel , Juergen Baumler , Heiko Diesing , Helmer Beulshausen , Ulrich Rebhan
发明人： Igor Bragin , Rainer Paetzel , Juergen Baumler , Heiko Diesing , Helmer Beulshausen , Ulrich Rebhan
IPC分类号： H01S3/03 , H01S3/036 , H01S3/22 , H01S3/225
CPC分类号： H01S3/036 , H01S3/03 , H01S3/225
摘要： The lifetime of the laser gas in a laser system such as an excimer laser can be increased by changing the way in which the laser system is sealed. In addition to primary seals used to seal the reservoir chamber and discharge channel, at least one secondary seal can be used between the primary seals and the surrounding environment in order to further prevent permeation of impurities into the discharge chamber, as well as to create an intermediate gas volume. A controlled atmosphere can be generated in the intermediate gas volume, which can be at a slightly higher pressure than the surrounding environment in order to resist the flow of impurities through the secondary seal(s). Further, a flow of purge gas can be introduced into the controlled atmosphere in order to carry away any impurities that leak through the secondary seal(s).
摘要翻译：通过改变激光系统被密封的方式，可以增加诸如准分子激光器之类的激光系统中的激光气体的寿命。除了用于密封储存室和排出通道的主密封件之外，可以在主密封件和周围环境之间使用至少一个二次密封件，以便进一步防止杂质渗透到排放室中，并且产生中间气体体积。可以在中间气体体积中产生受控的气氛，其可以处于比周围环境稍高的压力，以抵抗杂质通过二次密封件的流动。此外，吹扫气体流可以被引入到受控气氛中，以便携带通过二次密封件泄漏的任何杂质。

3. 发明授权

US06768765B1 High power excimer or molecular fluorine laser system 失效
标题翻译：高功率准分子或分子氟激光系统
公开(公告)号：US06768765B1
公开(公告)日：2004-07-27
申请号：US10163098
申请日：2002-06-04
申请人： Thomas Schroeder , Rustem Osmanow , Juergen Baumler
发明人： Thomas Schroeder , Rustem Osmanow , Juergen Baumler
IPC分类号： H01S308
CPC分类号： H01S3/225 , H01S3/034 , H01S3/036 , H01S3/08059 , H01S3/105
摘要： An excimer or molecular fluorine laser system includes a discharge tube filled with a gas mixture, multiple electrodes within the discharge tube and connected to a discharge circuit for energizing the gas mixture, a resonator for generating a laser beam, and at least one window structure including a first window and a second window. The first window initially seals the discharge tube and transmits the beam. The second window is initially unexposed to the gas mixture. The window structure is configured such that the second window is movable into position for sealing the discharge tube and transmitting the beam when the first window becomes contaminated.
摘要翻译：准分子或分子氟激光系统包括填充有气体混合物的放电管，放电管内的多个电极并连接到用于激发气体混合物的放电电路，用于产生激光束的谐振器，以及包括第一个窗口和第二个窗口。第一个窗口最初密封放电管并传输光束。第二个窗口最初未暴露于气体混合物。窗结构被构造成使得第二窗口可移动到适当位置以密封放电管并且当第一窗口被污染时传送光束。

4. 发明授权

US06847671B1 Blower for gas laser 有权
标题翻译：气体激光鼓风机
公开(公告)号：US06847671B1
公开(公告)日：2005-01-25
申请号：US09823298
申请日：2001-03-29
申请人： Juergen Baumler
发明人： Juergen Baumler
IPC分类号： H01S3/03 , H01S3/036 , H01S3/22
CPC分类号： H01S3/036 , H01S3/03
摘要： A tangential blower for use in a gas discharge laser is provided provides improved homogeneity of laser gas flow through the discharge region of the laser. A flange which supports adjacent blower sections has an aerodynamic shape and occupies a minimal portion of the space in the inlet region of the blowers. The ends of the blower's shafts may be formed as a twice-profiled polygon which is has a non-uniform and preferably rounded geometry along its longitudinal axis where it fits into end flanges. The blades of the blower may be formed with varying thickness and radii of curvature. The blower's blades and hubs may be cast as a single piece of steel, titanium alloy, or other suitable material.
摘要翻译：提供用于气体放电激光器的切向鼓风机提供了激光气体流过激光器的放电区域的均匀性。支撑相邻鼓风机部分的凸缘具有空气动力学形状并且占据鼓风机入口区域中的空间的最小部分。鼓风机轴的端部可以形成为两倍廓形的多边形，其多边形沿其纵向轴线具有非均匀且优选为圆形的几何形状，其中它配合到端部凸缘中。鼓风机的叶片可以形成为具有变化的厚度和曲率半径。鼓风机的叶片和轮毂可以铸造成单件钢，钛合金或其他合适的材料。

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