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    • 5. 发明授权
    • Liquid discharge head, producing method therefor and liquid discharge apparatus
    • 排液头,其制造方法和排液装置
    • US06378993B1
    • 2002-04-30
    • US09452184
    • 1999-12-02
    • Teruo OzakiIchiro SaitoToshio KashinoYoshiyuki ImanakaMasahiko KubotaMuga MochizukiYoshiaki KuriharaMasashi MiyagawaShuji Koyama
    • Teruo OzakiIchiro SaitoToshio KashinoYoshiyuki ImanakaMasahiko KubotaMuga MochizukiYoshiaki KuriharaMasashi MiyagawaShuji Koyama
    • B41J205
    • B41J2/14048B41J2/055
    • There is provided a liquid discharge head provided with an element substrate and a ceiling plate fixed in a mutually opposed state, plural liquid path lateral walls provided between the ceiling plate and the element substrate and defining plural light flow paths, plural discharge energy generating elements arranged in parallel on the surface of the element substrate so as to be respectively positioned in the plural liquid paths, plural movable members in the form of a beam supported at an end, provided on the element substrate so as to be respectively opposed to the plural discharge energy generating elements and provided with fixed ends at the upstream side in the liquid flowing direction in the liquid paths and free ends at the downstream ends, and plural projections provided on the ceiling plate for respectively limiting the amount of displacement of the plural movable members, the element substrate and the ceiling plate being composed of similar materials, wherein the liquid path lateral walls are formed on the element substrate, and, on the ceiling plate, there is provided an engaging layer having recesses for fitting with the upper end faces of the liquid path lateral walls.
    • 设置有设置有相互相对的状态的元件基板和顶板的液体排出头,设置在顶板与元件基板之间并限定多个光流路的多个液体流路侧壁,多个排出能量产生元件 在元件基板的表面上平行地分别设置在多个液体通道中的多个可移动部件,其形式为支撑在一端的梁,设置在元件基板上,以分别与多个放电 能量产生元件,并且在液体流道的上游侧和下游端的自由端处设置有固定端,并且在顶板上设置有分别限制多个可动构件的位移量的多个突起, 元件基板和顶板由类似的材料组成,其中液体路径1 在该元件基板上形成有一个隔壁,并且在顶板上设有一个接合层,该接合层具有用于与液体通道侧壁的上端面相配合的凹槽。
    • 6. 发明授权
    • Method for producing liquid discharging head
    • 喷液头的制造方法
    • US06468437B1
    • 2002-10-22
    • US09452182
    • 1999-12-02
    • Toshio KashinoIchiro SaitoYoshiyuki ImanakaTeruo OzakiMasahiko KubotaMuga Mochizuki
    • Toshio KashinoIchiro SaitoYoshiyuki ImanakaTeruo OzakiMasahiko KubotaMuga Mochizuki
    • B41J204
    • B41J2/14048B41J2/14056B41J2/1604B41J2/1623B41J2/1628B41J2/1629B41J2/1631B41J2/1635B41J2/1642B41J2/1645B41J2/1646
    • A method for producing a liquid discharge head provided with an element substrate and a ceiling plate which are fixed in a mutually opposed state, plural liquid path walls provided between said ceiling plate and said element substrate and defining plural liquid paths, plural discharge energy generating elements provided in parallel manner on the surface of said element substrate so as to be respectively positioned in said plural liquid paths, and plural movable members provided on said element substrate so as to respectively oppose said plural discharge energy generating elements and formed like a cantilever, fixed at the upstream ends in the flowing direction of the liquid in said liquid paths and having free ends at the downstream ends, the method comprising the steps of forming a gap forming member in a position, forming a first material layer, patterning an anti-etching protective film, forming a second material layer, removing a portion of said second material layer, cutting said element substrate, and removing said gap forming member.
    • 一种液体排出头的制造方法,其具有固定在相互相对的状态的元件基板和顶板,设置在所述顶板与所述元件基板之间并限定多个液体通路的多个液体通道壁,多个排出能量产生元件 在所述元件基板的表面上平行设置以分别位于所述多个液体通道中,以及多个可移动部件,设置在所述元件基板上,以分别与所述多个排出能量产生元件相对并形成为类似悬臂,固定 在所述液体通道中的液体的流动方向的上游端处,并且在下游端具有自由端,所述方法包括以下步骤:在形成第一材料层的位置形成间隙形成构件,将抗蚀刻 保护膜,形成第二材料层,去除所述第二材料层的一部分,切割所述第二材料层 元件基板,并且移除所述间隙形成部件。