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    • 8. 发明授权
    • Method of manufacturing a semiconductor device
    • 制造半导体器件的方法
    • US4260430A
    • 1981-04-07
    • US50202
    • 1979-06-20
    • Kazuo ItohKatsumi OgiueAkio Hayasaka
    • Kazuo ItohKatsumi OgiueAkio Hayasaka
    • H01L21/8222H01L21/33H01L21/331H01L21/8226H01L27/02H01L27/06H01L27/082H01L29/70H01L29/73H03K19/091H01L21/263H01L7/36
    • H01L21/8226H01L27/0237
    • An I.sup.2 L device is disclosed wherein the P type injector region of a PNP transistor is formed so as to be buried in an N.sup.- type epitaxial layer below the P type collector region of the PNP transistor, whereby the carrier injection efficiency of the transistor is improved and a high switching speed is obtained. The I.sup.2 L device further includes an inversed NPN transistor wherein the abovementioned P type collector region of the PNP transistor works as a base region of the NPN transistor, an N type collector region is formed in the P type base region, and the abovementioned P type injector region extends between the N.sup.- type epitaxial layer and an N.sup.+ type substrate except below the N type collector region so that the effective emitter portion of the NPN transistor is limited to a specific area immediately below the N type collector region, thereby to reduce the power consumption.
    • 公开了一种I2L器件,其中PNP晶体管的P型注入器区域被形成为埋入在PNP晶体管的P型集电极区域之下的N型外延层中,从而提高了晶体管的载流子注入效率 并获得高切换速度。 I2L器件还包括反向NPN晶体管,其中PNP晶体管的上述P型集电极区域用作NPN晶体管的基极区域,在P型基极区域中形成N型集电极区域,并且上述P型注入器 区域在N型外延层和除了N型集电极区域之外的N +型衬底之间延伸,使得NPN晶体管的有效发射极部分被限制在紧邻N型集电极区域的特定区域,从而降低功率 消费。