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    • 10. 发明授权
    • Field effect transistor having graphene channel layer
    • 具有石墨烯通道层的场效应晶体管
    • US08247806B2
    • 2012-08-21
    • US12649321
    • 2009-12-29
    • Byung-Gyu ChaeHyun Tak Kim
    • Byung-Gyu ChaeHyun Tak Kim
    • H01L51/30
    • H01L29/1606H01L29/0673H01L29/0895H01L29/778H01L29/78684H01L29/78696H01L51/0541
    • Provided is a field effect transistor including a graphene channel layer, and capable of increasing an on/off ratio of an operating current by using the graphene of the graphene channel layer. The field effect transistor includes: a substrate; the graphene channel layer which is disposed on a portion of the substrate and includes graphene; a first electrode disposed on a first region of the graphene channel layer and a portion of the substrate; an interlayer disposed on a second region of the graphene channel layer, which is apart from the first region, and a portion of the substrate; a second electrode disposed on the interlayer; a gate insulation layer disposed on a portion of the graphene channel layer, the first electrode, and the second electrode; and a gate electrode disposed on a portion of the gate insulation layer.
    • 提供了包括石墨烯通道层的场效应晶体管,并且能够通过使用石墨烯沟道层的石墨烯来提高工作电流的导通/截止比。 场效应晶体管包括:衬底; 所述石墨烯通道层设置在所述基板的一部分上并且包括石墨烯; 设置在所述石墨烯通道层的第一区域上的第一电极和所述基板的一部分; 设置在离开第一区域的石墨烯通道层的第二区域上的中间层和基板的一部分; 设置在所述中间层上的第二电极; 设置在石墨烯通道层,第一电极和第二电极的一部分上的栅极绝缘层; 以及设置在栅极绝缘层的一部分上的栅电极。