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    • 6. 发明申请
    • METHOD OF FORMING INTERLAYER DIELECTRIC FOR SEMICONDUCTOR DEVICE
    • 形成用于半导体器件的中间层介质的方法
    • US20090140352A1
    • 2009-06-04
    • US12325170
    • 2008-11-29
    • Jin-Kyu Lee
    • Jin-Kyu Lee
    • H01L21/768H01L29/78
    • H01L21/76801
    • A method of forming an interlayer dielectric for a semiconductor device minimizing voids. During a process for forming a PMD oxide film being used as an interlayer dielectric, since TEOS impurities are added under a low-pressure controlled atmosphere, and gap filling characteristics are improved. Therefore, voids are minimized in the PMD oxide film. As a result, contact holes are prevented from shorting with each other through a void, and thus current leakage is suppressed. Further, it is not necessary to perform a rapid thermal anneal to improve the density of the PMD oxide film, nor to deposit a second PMD oxide film after planarization. As a result, the manufacturing process can be simplified.
    • 一种形成用于使空隙最小化的半导体器件的层间电介质的方法。 在形成用作层间电介质的PMD氧化膜的工艺中,由于在低压控制气氛下添加TEOS杂质,因此提高了间隙填充特性。 因此,PMD氧化膜中的空隙被最小化。 结果,防止接触孔通过空隙而彼此短路,从而抑制电流泄漏。 此外,不需要进行快速热退火以提高PMD氧化膜的密度,也不需要在平坦化之后沉积第二PMD氧化物膜。 结果,可以简化制造过程。
    • 10. 发明授权
    • Magnetic nanoparticle complex
    • 磁性纳米颗粒复合物
    • US08366916B2
    • 2013-02-05
    • US13404517
    • 2012-02-24
    • Jin-Kyu Lee
    • Jin-Kyu Lee
    • C10G32/02C07F15/02B82Y40/00B82Y25/00
    • C10G32/02C10G29/00C10G29/04C10G2300/203
    • A magnetic nanoparticle complex includes a magnetic nanoparticle; and a ligand associated with the magnetic nanoparticle, the ligand including a functional group capable of combining with an acid component or a conjugate base of the acid component, in an oil. A method for preparing a magnetic nanoparticle complex, includes preparing a pre-ligand having at least one amino group and at least one carbamate group or dithiocarbamate group; associating the pre-ligand with a magnetic nanoparticle to form a magnetic nanoparticle-ligand complex; and modifying the ligand to form a modified ligand having a functional group capable of combining with an acid component in an oil or a conjugate base of the acid component.
    • 磁性纳米颗粒复合物包括磁性纳米颗粒; 和与磁性纳米颗粒相关的配体,所述配体包括能够与油组分中的酸组分或共轭碱结合的官能团。 一种制备磁性纳米颗粒络合物的方法,包括制备具有至少一个氨基和至少一个氨基甲酸酯基或二硫代氨基甲酸酯基的前配体; 将前配体与磁性纳米颗粒缔合以形成磁性纳米颗粒 - 配体络合物; 并修饰配体以形成具有能够与酸组分的油或共轭碱中的酸组分结合的官能团的修饰配体。