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    • 10. 发明授权
    • Plasma generation apparatus
    • 等离子体发生装置
    • US08035056B2
    • 2011-10-11
    • US12111903
    • 2008-04-29
    • Gi-Chung KwonSang-Won LeeSae-Hoon UhmJae-Hyun KimBo-Han HongYong-Kwan Lee
    • Gi-Chung KwonSang-Won LeeSae-Hoon UhmJae-Hyun KimBo-Han HongYong-Kwan Lee
    • B23K10/00
    • H01J37/32935H01J37/321H05H1/46
    • A plasma generation apparatus includes: a chamber having a chamber lid and defining an airtight reaction region; a susceptor in the chamber; a gas supply means supplying a process gas to the chamber; and a toroidal core vertically disposed with respect to the susceptor through the chamber lid, comprising: a toroidal ferromagnetic core combined with the chamber, the toroidal ferromagnetic core having a first portion outside the chamber and a second portion inside the chamber, the second portion having an opening portion; a radio frequency (RF) power supply connected to the chamber; an induction coil electrically connected to the RF power supply, the induction coil rolling the first portion; and a matching circuit matching an impedance between the RF power supply and the induction coil.
    • 等离子体产生装置包括:具有室盖并限定气密反应区域的室; 室内的一个感受器; 向处理室供给处理气体的气体供给装置; 以及相对于所述基座通过所述室盖垂直设置的环形芯,包括:与所述室结合的环形铁磁芯,所述环形铁磁芯具有在所述室外部的第一部分和所述室内的第二部分,所述第二部分具有 开口部; 连接到所述室的射频(RF)电源; 感应线圈,其电连接到所述RF电源,所述感应线圈滚动所述第一部分; 以及与RF电源和感应线圈之间的阻抗匹配的匹配电路。