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    • 1. 发明授权
    • Narrow track stitched GMR head
    • 窄轨缝合GMR头
    • US06416677B1
    • 2002-07-09
    • US09585785
    • 2000-06-05
    • Hsiang-Yi WeiYi-Ting YaoEiki NarumiChyu-Jiuh TorngCherng-Chyi Han
    • Hsiang-Yi WeiYi-Ting YaoEiki NarumiChyu-Jiuh TorngCherng-Chyi Han
    • B44C122
    • G11B5/37
    • As the read capabilities of magnetic disk systems improve due to advanced GMR heads, it becomes necessary to correspondingly reduce the area of recorded data. This requires a narrowing of the stitched sub-pole at the write gap. This has proved difficult for pole widths less than about 0.4 microns because of problems in filling the mold. In the present invention this is overcome by introducing a layer of PMGI (polydimethylglutarimide) between the planarized positive photoresist layer that comprises the mold and the non-magnetic write gap layer on which the mold rests. This greatly facilitates formation of a high aspect ratio hole with a clean flat bottom and essentially vertical sides as well as the subsequent removal of the photoresist after said hole has been filled through electroplating to form a stitched sub-pole.
    • 由于高级GMR磁头的磁盘系统的读取能力得到改善,所以有必要相应地减少记录数据的面积。 这需要在写入间隙处的缝合子极的变窄。 由于填充模具的问题,对于小于约0.4微米的极宽度来说,这已被证明是困难的。 在本发明中,通过在包括模具的平坦化正性光致抗蚀剂层和模具所在的非磁性写入间隙层之间引入一层PMGI(聚二甲基戊二酰亚胺)来克服这一点。 这大大有利于形成具有干净的平坦底部和基本上垂直的侧面的高纵横比孔,以及随后在通过电镀填充所述孔以形成缝合的子极之后去除光致抗蚀剂。
    • 3. 发明授权
    • Method to make laminated yoke for high data rate giant magneto-resistive head
    • 用于高数据速率巨磁阻头的叠片磁轭的方法
    • US06345435B1
    • 2002-02-12
    • US09443448
    • 1999-11-22
    • Cherng-Chyi HanChyu-Jiuh TorngRodney LeeKochan Ju
    • Cherng-Chyi HanChyu-Jiuh TorngRodney LeeKochan Ju
    • G11B542
    • G11B5/59683G11B5/4813G11B5/5521Y10T29/49044Y10T29/49046
    • A method and design for the fabrication of a laminated yoke for a high data rate magnetic read-write transducer head. A full film layer of first ferromagnetic material is formed on a base using either plating or sputtering. The base comprises a read head, a ferromagnetic pole piece, and a ferromagnetic shield which also serves as a pole piece. A patterned layer of first non-magnetic dielectric is then formed on the full film layer of first ferromagnetic material. A patterned layer of photoresist is then formed on the full film layer of first ferromagnetic material and the patterned non-magnetic dielectric and used as a frame for a frame plating deposition of a patterned layer of second ferromagnetic material. The full film layer of first ferromagnetic material and the non-magnetic dielectric are then patterned, using the patterned layer of second ferromagnetic material as a mask and ion beam etching.
    • 一种用于制造用于高数据速率磁读写传感器头的层叠磁轭的方法和设计。 使用电镀或溅射在基底上形成第一铁磁材料的完整膜层。 基座包括读头,铁磁极片和铁磁屏蔽,其也用作极片。 然后在第一铁磁材料的全部薄膜层上形成第一非磁性电介质的图案层。 然后在第一铁磁材料和图案化非磁性电介质的完整膜层上形成图案化的光致抗蚀剂层,并用作用于第二铁磁材料的图案化层的框架电镀沉积的框架。 然后使用第二铁磁材料的图案化层作为掩模和离子束蚀刻来对第一铁磁材料和非磁性介电体的全部膜层进行构图。