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1. 发明申请

US20080255439A1 Microfabricated Neural Probes and Methods of Making Same 有权
标题翻译：微型神经探针及其制作方法
公开(公告)号：US20080255439A1
公开(公告)日：2008-10-16
申请号：US11628003
申请日：2005-06-01
申请人： Hongxing Tang , Michael L. Roukes , Richard Renaud
发明人： Hongxing Tang , Michael L. Roukes , Richard Renaud
IPC分类号： A61B5/04
CPC分类号： A61B5/04001 , A61B5/685 , A61B2562/028 , A61N1/05 , B82Y15/00
摘要： An embodiment of the invention provides a neural probe (100) containing a plurality of nanoscale recording electrodes. The recording electrodes have a width of 1 micron or less and a distance between adjacent recording electrodes is 10 microns or less. Another embodiment of the invention provides a neural probe comprising a plurality of microfabricated recording electrodes located on a polymer base material, such as a flexible polymer cantilever.
摘要翻译：本发明的实施例提供了一种包含多个纳米级记录电极的神经探针（100）。记录电极具有1微米或更小的宽度，并且相邻记录电极之间的距离为10微米或更小。本发明的另一个实施方案提供了一种神经探针，其包含位于聚合物基材上的多个微细加工的记录电极，例如柔性聚合物悬臂。

2. 发明授权

US08750957B2 Microfabricated neural probes and methods of making same 有权
标题翻译：微型神经探针及其制作方法
公开(公告)号：US08750957B2
公开(公告)日：2014-06-10
申请号：US11628003
申请日：2005-06-01
申请人： Hongxing Tang , Michael L. Roukes , Richard Renaud
发明人： Hongxing Tang , Michael L. Roukes , Richard Renaud
IPC分类号： A61B5/04 , A61N1/00
CPC分类号： A61B5/04001 , A61B5/685 , A61B2562/028 , A61N1/05 , B82Y15/00
摘要： An embodiment of the invention provides a neural probe containing a plurality of nanoscale recording electrodes. The recording electrodes have a width of 1 micron or less and a distance between adjacent recording electrodes is 10 microns or less. Another embodiment of the invention provides a neural probe comprising a plurality of microfabricated recording electrodes located on a polymer base material, such as a flexible polymer cantilever.
摘要翻译：本发明的实施例提供了一种包含多个纳米级记录电极的神经探针。记录电极具有1微米或更小的宽度，并且相邻记录电极之间的距离为10微米或更小。本发明的另一个实施方案提供了一种神经探针，其包含位于聚合物基材上的多个微细加工的记录电极，例如柔性聚合物悬臂。

3. 发明授权

US08827548B2 Polymer NEMs for cell physiology and microfabricated cell positioning system for micro-biocalorimeter 有权
标题翻译：用于微生物量热计的细胞生理学和微生物细胞定位系统的聚合物NEM
公开(公告)号：US08827548B2
公开(公告)日：2014-09-09
申请号：US13110684
申请日：2011-05-18
申请人： Michael L. Roukes , Chung-Wah Fon , Wonhee Lee , Hongxing Tang , Blake Waters Axelrod , John Liang Tan
发明人： Michael L. Roukes , Chung-Wah Fon , Wonhee Lee , Hongxing Tang , Blake Waters Axelrod , John Liang Tan
IPC分类号： G01K17/02 , G01N25/20
CPC分类号： G01N33/54373 , B82Y35/00 , G01L1/044 , G01N33/5026 , G01N33/5029 , G01N33/5032 , Y10S977/724 , Y10S977/956 , Y10S977/958
摘要： A microfluidic embedded nanoelectromechanical system (NEMs) force sensor provides an electrical readout. The force sensor contains a deformable member that is integrated with a strain sensor. The strain sensor converts a deformation of the deformable member into an electrical signal. A microfluidic channel encapsulates the force sensor, controls a fluidic environment around the force sensor, and improves the read out. In addition, a microfluidic embedded vacuum insulated biocalorimeter is provided. A calorimeter chamber contains a parylene membrane. Both sides of the chamber are under vacuum during measurement of a sample. A microfluidic cannel (built from parylene) is used to deliver a sample to the chamber. A thermopile, used as a thermometer is located between two layers of parylene.
摘要翻译：微流体嵌入式纳米机电系统（NEM）力传感器提供电子读数。力传感器包含与应变传感器集成的可变形构件。应变传感器将可变形部件的变形转换为电信号。微流体通道封装力传感器，控制力传感器周围的流体环境，并改善读数。此外，还提供了微流体嵌入式真空绝缘生物量热计。量热器室包含聚对二甲苯膜。在测量样品期间，室的两侧都处于真空状态。使用微流控管（由聚对二甲苯构建）将样品输送到室中。用作温度计的热电堆位于两层聚对二甲苯之间。

4. 发明授权

US07762719B2 Microscale calorimeter 有权
标题翻译：微尺度量热仪
公开(公告)号：US07762719B2
公开(公告)日：2010-07-27
申请号：US11578675
申请日：2005-04-20
申请人： Chung-Wah Fon , Michael L. Roukes , Wonhee Lee , Hongxing Tang
发明人： Chung-Wah Fon , Michael L. Roukes , Wonhee Lee , Hongxing Tang
IPC分类号： G01K17/00
CPC分类号： G01K17/006 , B01L3/5027
摘要： Microcalorimeters having low addendum heat capacities and attojoule/Kscale resolutions are provided. These microcalorimeters make use of very small calorimeter bodies composed of materials with very low heat capacities. Also provided are polymer-based microcalorimeters with thermally isolated reagent chambers. These microcalorimeters use a multi-layered polymer membrane structure to provide improved thermal isolation of a reagent chamber.
摘要翻译：提供了具有低附加热容量和attojoule / Kscale分辨率的微量热计。这些微量热计使用非常小的由热容量非常低的材料组成的量热仪。还提供了具有热分离的试剂室的基于聚合物的微量热计。这些微量热计使用多层聚合物膜结构来提供试剂室的改进的热隔离。

5. 发明申请

US20110216804A1 POLYMER NEMS FOR CELL PHYSIOLOGY AND MICROFABRICATED CELL POSITIONING SYSTEM FOR MICRO-BIOCALORIMETER 有权
标题翻译：用于细胞生物学的聚合物微球和用于微生物分子的微生物细胞定位系统
公开(公告)号：US20110216804A1
公开(公告)日：2011-09-08
申请号：US13110684
申请日：2011-05-18
申请人： Michael L. Roukes , Chung-Wah Fon , Wonhee Lee , Hongxing Tang , Blake Waters Axelrod , John Liang Tan
发明人： Michael L. Roukes , Chung-Wah Fon , Wonhee Lee , Hongxing Tang , Blake Waters Axelrod , John Liang Tan
IPC分类号： G01K17/00
CPC分类号： G01N33/54373 , B82Y35/00 , G01L1/044 , G01N33/5026 , G01N33/5029 , G01N33/5032 , Y10S977/724 , Y10S977/956 , Y10S977/958
摘要： A microfluidic embedded nanoelectromechanical system (NEMs) force sensor provides an electrical readout. The force sensor contains a deformable member that is integrated with a strain sensor. The strain sensor converts a deformation of the deformable member into an electrical signal. A microfluidic channel encapsulates the force sensor, controls a fluidic environment around the force sensor, and improves the read out. In addition, a microfluidic embedded vacuum insulated biocalorimeter is provided. A calorimeter chamber contains a parylene membrane. Both sides of the chamber are under vacuum during measurement of a sample. A microfluidic cannel (built from parylene) is used to deliver a sample to the chamber. A thermopile, used as a thermometer is located between two layers of parylene.
摘要翻译：微流体嵌入式纳米机电系统（NEM）力传感器提供电子读数。力传感器包含与应变传感器集成的可变形构件。应变传感器将可变形部件的变形转换为电信号。微流体通道封装力传感器，控制力传感器周围的流体环境，并改善读数。此外，还提供了微流体嵌入式真空绝缘生物量热计。量热器室包含聚对二甲苯膜。在测量样品期间，室的两侧都处于真空状态。使用微流控管（由聚对二甲苯构建）将样品输送到室中。用作温度计的热电堆位于两层聚对二甲苯之间。

6. 发明授权

US06910382B2 Sensors based on giant planar hall effect in dilute magnetic semiconductors 失效
公开(公告)号：US06910382B2
公开(公告)日：2005-06-28
申请号：US10602548
申请日：2003-06-23
申请人： Hongxing Tang , Michael L. Roukes
发明人： Hongxing Tang , Michael L. Roukes
IPC分类号： G01L9/00 , G01L9/16 , G01L9/14
CPC分类号： G01L9/0042 , G01L9/16
摘要： Ferromagnetic semiconductor-based sensor devices, including sensors for detecting pressure changes and sensors for detecting magnetic fields, such as switching events in a magnetic recording medium. The pressure sensors of the present invention detect pressure changes using magnetoresistive measurement techniques, and in particular GPHE techniques. Magnetic field detection sensors such as magnetic switching detection sensors include ferromagnetic semiconductor-based materials that provide enhanced sensitivity relative to known materials and techniques. Such magnetic switching detection sensors according to the present invention are particularly useful as a read head sensor for HDD and other magnetic storage technologies.

7. 发明授权

US07434476B2 Metallic thin film piezoresistive transduction in micromechanical and nanomechanical devices and its application in self-sensing SPM probes 有权
标题翻译：微机械和纳米机械装置中的金属薄膜压阻转换及其在自感SPM探针中的应用
公开(公告)号：US07434476B2
公开(公告)日：2008-10-14
申请号：US11010578
申请日：2004-12-14
申请人： Hongxing Tang , Mo Li , Michael L. Roukes
发明人： Hongxing Tang , Mo Li , Michael L. Roukes
IPC分类号： G01B7/16
CPC分类号： G01L1/18 , G01L1/20 , G01N33/54346 , G01N33/54373 , G01Q20/04 , G01Q60/38
摘要： Thin metallic films are used as the piezoresistive self-sensing element in microelectromechanical and nanoelectromechanical systems. The specific application to AFM probes is demonstrated.
摘要翻译：薄金属膜用作微机电和纳米机电系统中的压阻自感元件。演示了AFM探针的具体应用。

8. 发明授权

US07191639B2 On-chip magnetic force actuation of microcantilevers by coplanar coils 有权
标题翻译：通过共面线圈对微悬臂梁进行片上磁力驱动
公开(公告)号：US07191639B2
公开(公告)日：2007-03-20
申请号：US10815517
申请日：2004-04-01
申请人： Hongxing Tang , Michael L. Roukes
发明人： Hongxing Tang , Michael L. Roukes
IPC分类号： G01N29/02
CPC分类号： G01H11/02 , G01N2291/0427
摘要： An on-chip coil is provided in a micromachined device for magnetic actuation of a nanoelectromechanical microcantilever. The novel geometry involves a three dimensional solenoid or planar coil carrying high current that generates a large enough magnetic field in its close proximity to a permalloy thin film patch or columnar magnet disposed on the distal end of the piezoresistive microcantilever to effectively interacts with the magnetic thin film deposited on the microcantilever. The device comprises an effective actuators which can be integrated with biofunctionalized cantilever arrays in hybrid semiconductor-microfluidics devices for the analysis and detection of biological analytes.
摘要翻译：在用于磁性驱动纳米机电微悬臂梁的微加工装置中设置片上线圈。该新颖的几何形状涉及一种承载高电流的三维电磁线圈或平面线圈，其产生足够大的磁场，其紧邻设置在压阻微型连接器的远端上的坡莫合金薄膜贴片或柱状磁体，以有效地与磁性薄膜薄膜沉积在微悬臂梁上。该装置包括有效的致动器，其可与用于分析和检测生物分析物的混合半导体 - 微流体装置中的生物功能化悬臂阵列集成。

9. 发明授权

US07966898B2 Polymer NEMS for cell physiology and microfabricated cell positioning system for micro-biocalorimeter 有权
标题翻译：用于细胞生理学的聚合物NEMS和用于微生物量热计的微细胞定位系统
公开(公告)号：US07966898B2
公开(公告)日：2011-06-28
申请号：US11830612
申请日：2007-07-30
申请人： Michael L. Roukes , Chung-Wah Fon , Wonhee Lee , Hongxing Tang , Blake Waters Axelrod , John Liang Tan
发明人： Michael L. Roukes , Chung-Wah Fon , Wonhee Lee , Hongxing Tang , Blake Waters Axelrod , John Liang Tan
IPC分类号： G01L1/22
CPC分类号： G01N33/54373 , B82Y35/00 , G01L1/044 , G01N33/5026 , G01N33/5029 , G01N33/5032 , Y10S977/724 , Y10S977/956 , Y10S977/958
摘要： A microfluidic embedded nanoelectromechanical system (NEMs) force sensor provides an electrical readout. The force sensor contains a deformable member that is integrated with a strain sensor. The strain sensor converts a deformation of the deformable member into an electrical signal. A microfluidic channel encapsulates the force sensor, controls a fluidic environment around the force sensor, and improves the read out. In addition, a microfluidic embedded vacuum insulated biocalorimeter is provided. A calorimeter chamber contains a parylene membrane. Both sides of the chamber are under vacuum during measurement of a sample. A microfluidic cannel (built from parylene) is used to deliver a sample to the chamber. A thermopile, used as a thermometer is located between two layers of parylene.
摘要翻译：微流体嵌入式纳米机电系统（NEM）力传感器提供电子读数。力传感器包含与应变传感器集成的可变形构件。应变传感器将可变形部件的变形转换为电信号。微流体通道封装力传感器，控制力传感器周围的流体环境，并改善读数。此外，还提供了微流体嵌入式真空绝缘生物量热计。量热器室包含聚对二甲苯膜。在测量样品期间，室的两侧都处于真空状态。使用微流控管（由聚对二甲苯构建）将样品输送到室中。用作温度计的热电堆位于两层聚对二甲苯之间。

10. 发明授权

US07617736B2 Metallic thin film piezoresistive transduction in micromechanical and nanomechanical devices and its application in self-sensing SPM probes 有权
标题翻译：微机械和纳米机械装置中的金属薄膜压阻转换及其在自感SPM探针中的应用
公开(公告)号：US07617736B2
公开(公告)日：2009-11-17
申请号：US12164620
申请日：2008-06-30
申请人： Hongxing Tang , Mo Li , Michael L. Roukes
发明人： Hongxing Tang , Mo Li , Michael L. Roukes
IPC分类号： G01B7/16
CPC分类号： G01L1/18 , G01L1/20 , G01N33/54346 , G01N33/54373 , G01Q20/04 , G01Q60/38
摘要： Thin metallic films are used as the piezoresistive self-sensing element in microelectromechanical and nanoelectromechanical systems. The specific application to AFM probes is demonstrated.
摘要翻译：薄金属膜用作微机电和纳米机电系统中的压阻自感元件。演示了AFM探针的具体应用。

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