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1. 发明授权

US5408750A X-Y table apparatus 失效
标题翻译： X-Y台装置
公开(公告)号：US5408750A
公开(公告)日：1995-04-25
申请号：US146160
申请日：1993-11-29
申请人： Hongchun Teng , Wataru Ishibashi
发明人： Hongchun Teng , Wataru Ishibashi
IPC分类号： G01D5/347 , G12B5/00 , B23Q16/00 , G01B5/00
CPC分类号： G01D5/34715 , G12B5/00 , Y10S248/913 , Y10S33/03
摘要： An X-Y table apparatus comprises a base (12), an X-directional moving member (14) movable in the X direction with respect to the base, a mounting member (18) movable in the Y-direction with respect to the X-directional moving member and being capable of loading articles and displacement detecting member (20) for detecting displacements of the mounting member with respect to the base. The displacement detecting member includes a main scale (24) cooperatively provided on the center of the rear face of the mounting member and having a first matrix-shaped land lattice, and an index scale (26) provided in parallel with the base so as to be movable in directions in a two-dimensional area with respect to the main scale and having a first orthogonally cross lattice (80) and a second orthogonally cross lattice (82), such that the displacement detecting member has a simple structure and effects accurate X-directional displacement and Y-directional displacement detection. A block (100) integrally fixed to the mounting member (18) is formed with a mounting hole (101). The distal end portion (102) of the detecting shaft (22) is inserted in the mounting hole and is supported by three lines formed by three parallel pins (103a to 103c). Under the mounting member, the detecting shaft is provided to be rotated by an adjusting lever (105) so as to finely adjust the relative rotational angular position between the table and the X-Y encoder.
摘要翻译： PCT No.PCT / JP93 / 00420 Sec。 371日期：1993年11月29日 102（e）日期1993年11月29日PCT 1993年4月1日PCT公布。公开号WO93 / 21639 日期：1993年10月28日。XY台式装置包括基座（12），相对于基座沿X方向移动的X方向移动构件（14），可沿Y方向移动的安装构件相对于X方向移动构件，并且能够装载物品和位移检测构件（20），用于检测安装构件相对于基座的位移。所述位移检测构件包括协调地设置在所述安装构件的后表面的中心并且具有第一矩阵状的格栅的主刻度（24）和与所述基底平行设置的指标（26），以便可相对于主刻度在二维区域中的方向上移动，并且具有第一正交交叉网格（80）和第二正交交叉网格（82），使得位移检测构件具有简单的结构并且实现精确的X 双向位移和Y方向位移检测。一体地固定在安装部件（18）上的块（100）形成有安装孔（101）。检测轴（22）的前端部分（102）插入到安装孔中，由三根平行的销（103a〜103c）构成的三条线支撑。在安装构件下方，检测轴设置成通过调节杆（105）旋转，以便精细地调节工作台与X-Y编码器之间的相对旋转角度位置。

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