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    • 4. 发明申请
    • Mask for sequential lateral solidification and method of performing sequential lateral solidification using the same
    • 用于顺序侧向固化的掩模和使用其进行顺序横向固化的方法
    • US20070264806A1
    • 2007-11-15
    • US11544924
    • 2006-10-05
    • Cheol Ho Park
    • Cheol Ho Park
    • H01L21/20H01L29/04C30B1/00
    • C30B13/24B23K26/066C30B29/06H01L21/02532H01L21/0268H01L21/02686H01L21/02691
    • Embodiments of a mask for sequential lateral solidification are disclosed herein. In some embodiments, a mask of the present disclosure comprises a transmission region including a first slit column having a plurality of first slits separated from one another by a predetermined interval, and a second slit column having a plurality of second slits separated from one another by a predetermined interval and disposed adjacent to and offset from the first slit column. An irradiated laser beam is substantially completely transmitted through the transmission region. In some embodiments, the mask includes a semi-transmission region including a first opening pattern disposed at least partially between adjacent first slits and having a plurality of first openings formed into a desired shape, and a second opening pattern disposed at least partially between adjacent second slits and having a plurality of second opening formed into a desired shape. A portion of less than all of the laser beam is transmitted through the semi-transmission region. A method of performing the sequential lateral solidification using the mask is also disclosed herein.
    • 本文公开了用于连续侧向固化的掩模的实施例。 在一些实施例中,本公开的掩模包括传输区域,该传输区域包括具有彼此以预定间隔分开的多个第一狭缝的第一狭缝列和具有多个第二狭缝的第二狭缝列,第二狭缝通过 预定间隔并且设置成与第一狭缝柱相邻并偏移。 照射的激光束基本上完全透射通过透射区域。 在一些实施例中,掩模包括半透射区域,其包括至少部分地设置在相邻的第一狭缝之间并且具有形成为期望形状的多个第一开口的第一开口图案,以及至少部分地设置在相邻的第二狭缝之间的第二开口图案 狭缝并且具有形成为期望形状的多个第二开口。 少于全部的激光束的一部分透过半透射区域。 本文还公开了使用掩模进行顺序横向固化的方法。
    • 5. 发明授权
    • Mask for sequential lateral solidification and method of performing sequential lateral solidification using the same
    • 用于顺序侧向固化的掩模和使用其进行顺序横向固化的方法
    • US07476475B2
    • 2009-01-13
    • US11544924
    • 2006-10-05
    • Cheol Ho Park
    • Cheol Ho Park
    • G03F1/00
    • C30B13/24B23K26/066C30B29/06H01L21/02532H01L21/0268H01L21/02686H01L21/02691
    • Embodiments of a mask for sequential lateral solidification are disclosed herein. In some embodiments, a mask of the present disclosure comprises a transmission region including a first slit column having a plurality of first slits separated from one another by a predetermined interval, and a second slit column having a plurality of second slits separated from one another by a predetermined interval and disposed adjacent to and offset from the first slit column. An irradiated laser beam is substantially completely transmitted through the transmission region. In some embodiments, the mask includes a semi-transmission region including a first opening pattern disposed at least partially between adjacent first slits and having a plurality of first openings formed into a desired shape, and a second opening pattern disposed at least partially between adjacent second slits and having a plurality of second opening formed into a desired shape. A portion of less than all of the laser beam is transmitted through the semi-transmission region. A method of performing the sequential lateral solidification using the mask is also disclosed herein.
    • 本文公开了用于连续横向固化的掩模的实施例。 在一些实施例中,本公开的掩模包括传输区域,该传输区域包括具有彼此以预定间隔分开的多个第一狭缝的第一狭缝列和具有多个第二狭缝的第二狭缝列,第二狭缝通过 预定间隔并且设置成与第一狭缝柱相邻并偏移。 照射的激光束基本上完全透射通过透射区域。 在一些实施例中,掩模包括半透射区域,其包括至少部分地设置在相邻的第一狭缝之间并且具有形成为期望形状的多个第一开口的第一开口图案,以及至少部分地设置在相邻的第二狭缝之间的第二开口图案 狭缝并且具有形成为期望形状的多个第二开口。 少于全部的激光束的一部分透过半透射区域。 本文还公开了使用掩模进行顺序横向固化的方法。