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    • 4. 发明申请
    • SEMICONDUCTOR DEVICE
    • 半导体器件
    • US20110101417A1
    • 2011-05-05
    • US13005589
    • 2011-01-13
    • Tsuneo OGURAMasakazu YamaguchiTomoki InoueHideaki NinomiyaKoichi Sugiyama
    • Tsuneo OGURAMasakazu YamaguchiTomoki InoueHideaki NinomiyaKoichi Sugiyama
    • H01L29/739
    • H01L29/1095H01L29/0834H01L29/7397
    • A semiconductor device comprises a first base layer of a first conductivity type; a plurality of second base layers of a second conductivity type, provided on a part of a first surface of the first base layer; trenches formed on each side of the second base layers, and formed to be deeper than the second base layers; an emitter layer formed along the trench on a surface of the second base layers; a collector layer of the second conductivity type, provided on a second surface of the first base layer opposite to the first surface; an insulating film formed on an inner wall of the trench, the insulating film being thicker on a bottom of the trench than on a side surface of the trench; a gate electrode formed within the trench, and isolated from the second base layers and the emitter layer by the insulating film; and a space section provided between the second base layers adjacent to each other, the space section being deeper than the second base layers and being electrically isolated from the emitter layer and the second base layers.
    • 半导体器件包括第一导电类型的第一基极层; 多个第二导电类型的第二基层,设置在所述第一基底层的第一表面的一部分上; 沟槽形成在第二基底层的每一侧上,并且形成为比第二基底层更深; 在所述第二基底层的表面上沿着所述沟槽形成的发射极层; 设置在与第一表面相对的第一基底层的第二表面上的第二导电类型的集电极层; 形成在所述沟槽的内壁上的绝缘膜,所述绝缘膜在所述沟槽的底部比在所述沟槽的侧表面上更厚; 形成在所述沟槽内并与所述第二基极层和所述发射极层通过所述绝缘膜隔离的栅电极; 以及设置在彼此相邻的第二基底层之间的空间部分,空间部分比第二基底层更深,并且与发射极层和第二基底层电隔离。