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1. 发明申请

US20100195095A1 FOREIGN MATTER INSPECTION METHOD AND FOREIGN MATTER INSPECTION APPARATUS 有权
标题翻译：外部事件检查方法和外部事件检查装置
公开(公告)号：US20100195095A1
公开(公告)日：2010-08-05
申请号：US12758363
申请日：2010-04-12
申请人： Hiroyuki YAMASHITA , Mamoru Kobayashi , Eiji Imai , Yoshio Morishige , Koichi Nagoya , Hideki Fukushima
发明人： Hiroyuki YAMASHITA , Mamoru Kobayashi , Eiji Imai , Yoshio Morishige , Koichi Nagoya , Hideki Fukushima
IPC分类号： G01N21/00
CPC分类号： G01N21/95607 , G01N21/94 , G01N2021/8825
摘要： In a foreign matter inspection apparatus comprising: irradiating unit for irradiating inspection light to an inspection area of an article to be inspected; intensity detecting unit for detecting intensity of either reflected light or scattered light, which is generated from the inspection area by irradiating thereto the inspection light; position detecting unit for detecting a position of either the reflected light or the scattered light within the inspection area; and deciding unit for deciding whether or not a foreign matter is present within the inspection area; the foreign matter inspection apparatus is comprised of: display unit capable of displaying thereon both a threshold image in which the threshold value is indicated over an entire area of the inspection area, and a detection sensitivity image indicated by being converted from the threshold image.
摘要翻译：一种异物检查装置，其特征在于，包括：将检查光照射到待检查物品的检查区域的照射单元; 强度检测单元，用于通过向检查光照射检测从检查区域产生的反射光或散射光的强度; 位置检测单元，用于检测检查区域内的反射光或散射光的位置; 以及决定单元，用于判定在所述检查区域内是否存在异物; 异物检查装置包括：能够在其上显示其中在检查区域的整个区域上指示了阈值的阈值图像的显示单元和由阈值图像转换的检测灵敏度图像。

2. 发明申请

US20070201019A1 Foreign matter inspection method and foreign matter inspection apparatus 有权
标题翻译：异物检查方法和异物检查仪器
公开(公告)号：US20070201019A1
公开(公告)日：2007-08-30
申请号：US11709858
申请日：2007-02-23
申请人： Hiroyuki Yamashita , Mamoru Kobayashi , Eiji Imai , Yoshio Morishige , Koichi Nagoya , Hideki Fukushima
发明人： Hiroyuki Yamashita , Mamoru Kobayashi , Eiji Imai , Yoshio Morishige , Koichi Nagoya , Hideki Fukushima
IPC分类号： G01N21/88
CPC分类号： G01N21/95607 , G01N21/94 , G01N2021/8825
摘要： In a foreign matter inspection apparatus comprising: irradiating unit for irradiating inspection light to an inspection area of an article to be inspected; intensity detecting unit for detecting intensity of either reflected light or scattered light, which is generated from the inspection area by irradiating thereto the inspection light; position detecting unit for detecting a position of either the reflected light or the scattered light within the inspection area; and deciding unit for deciding whether or not a foreign matter is present within the inspection area; the foreign matter inspection apparatus is comprised of: display unit capable of displaying thereon both a threshold image in which the threshold value is indicated over an entire area of the inspection area, and a detection sensitivity image indicated by being converted from the threshold image.
摘要翻译：一种异物检查装置，其特征在于，包括：将检查光照射到待检查物品的检查区域的照射单元; 强度检测单元，用于通过向检查光照射检测从检查区域产生的反射光或散射光的强度; 位置检测单元，用于检测检查区域内的反射光或散射光的位置; 以及决定单元，用于判定在所述检查区域内是否存在异物; 异物检查装置包括：能够在其上显示其中在检查区域的整个区域上指示了阈值的阈值图像的显示单元和由阈值图像转换的检测灵敏度图像。

3. 发明授权

US08422009B2 Foreign matter inspection method and foreign matter inspection apparatus 失效
标题翻译：异物检查方法和异物检查仪器
公开(公告)号：US08422009B2
公开(公告)日：2013-04-16
申请号：US13181159
申请日：2011-07-12
申请人： Hiroyuki Yamashita , Mamoru Kobayashi , Eiji Imai , Yoshio Morishige , Koichi Nagoya , Hideki Fukushima
发明人： Hiroyuki Yamashita , Mamoru Kobayashi , Eiji Imai , Yoshio Morishige , Koichi Nagoya , Hideki Fukushima
IPC分类号： G01N21/00
CPC分类号： G01N21/95607 , G01N21/94 , G01N2021/8825
摘要： In a foreign matter inspection apparatus comprising: irradiating unit for irradiating inspection light to an inspection area of an article to be inspected; intensity detecting unit for detecting intensity of either reflected light or scattered light, which is generated from the inspection area by irradiating thereto the inspection light; position detecting unit for detecting a position of either the reflected light or the scattered light within the inspection area; and deciding unit for deciding whether or not a foreign matter is present within the inspection area; the foreign matter inspection apparatus is comprised of: display unit capable of displaying thereon both a threshold image in which the threshold value is indicated over an entire area of the inspection area, and a detection sensitivity image indicated by being converted from the threshold image.
摘要翻译：一种异物检查装置，其特征在于，包括：将检查光照射到待检查物品的检查区域的照射单元; 强度检测单元，用于通过向检查光照射检测从检查区域产生的反射光或散射光的强度; 位置检测单元，用于检测检查区域内的反射光或散射光的位置; 以及决定单元，用于判定在所述检查区域内是否存在异物; 异物检查装置包括：能够在其上显示其中在检查区域的整个区域上指示了阈值的阈值图像的显示单元和由阈值图像转换的检测灵敏度图像。

4. 发明授权

US07719671B2 Foreign matter inspection method and foreign matter inspection apparatus 有权
标题翻译：异物检查方法和异物检查仪器
公开(公告)号：US07719671B2
公开(公告)日：2010-05-18
申请号：US11709858
申请日：2007-02-23
申请人： Hiroyuki Yamashita , Mamoru Kobayashi , Eiji Imai , Yoshio Morishige , Koichi Nagoya , Hideki Fukushima
发明人： Hiroyuki Yamashita , Mamoru Kobayashi , Eiji Imai , Yoshio Morishige , Koichi Nagoya , Hideki Fukushima
IPC分类号： G01N21/00
CPC分类号： G01N21/95607 , G01N21/94 , G01N2021/8825
摘要： In a foreign matter inspection apparatus comprising: irradiating unit for irradiating inspection light to an inspection area of an article to be inspected; intensity detecting unit for detecting intensity of either reflected light or scattered light, which is generated from the inspection area by irradiating thereto the inspection light; position detecting unit for detecting a position of either the reflected light or the scattered light within the inspection area; and deciding unit for deciding whether or not a foreign matter is present within the inspection area; the foreign matter inspection apparatus is comprised of: display unit capable of displaying thereon both a threshold image in which the threshold value is indicated over an entire area of the inspection area, and a detection sensitivity image indicated by being converted from the threshold image.
摘要翻译：一种异物检查装置，其特征在于，包括：将检查光照射到待检查物品的检查区域的照射单元; 强度检测单元，用于通过向检查光照射检测从检查区域产生的反射光或散射光的强度; 位置检测单元，用于检测检查区域内的反射光或散射光的位置; 以及决定单元，用于判定在所述检查区域内是否存在异物; 异物检查装置包括：能够在其上显示其中在检查区域的整个区域上指示了阈值的阈值图像的显示单元和由阈值图像转换的检测灵敏度图像。

5. 发明申请

US20110267605A1 FOREIGN MATTER INSPECTION METHOD AND FOREIGN MATTER INSPECTION APPARATUS 失效
标题翻译：外部事件检查方法和外部事件检查装置
公开(公告)号：US20110267605A1
公开(公告)日：2011-11-03
申请号：US13181159
申请日：2011-07-12
申请人： Hiroyuki Yamashita , Mamoru Kobayashi , Eiji Imai , Yoshio Morishige , Koichi Nagoya , Hideki Fukushima
发明人： Hiroyuki Yamashita , Mamoru Kobayashi , Eiji Imai , Yoshio Morishige , Koichi Nagoya , Hideki Fukushima
IPC分类号： G01N21/47 , G01N21/55
CPC分类号： G01N21/95607 , G01N21/94 , G01N2021/8825
摘要： In a foreign matter inspection apparatus comprising: irradiating unit for irradiating inspection light to an inspection area of an article to be inspected; intensity detecting unit for detecting intensity of either reflected light or scattered light, which is generated from the inspection area by irradiating thereto the inspection light; position detecting unit for detecting a position of either the reflected light or the scattered light within the inspection area; and deciding unit for deciding whether or not a foreign matter is present within the inspection area; the foreign matter inspection apparatus is comprised of: display unit capable of displaying thereon both a threshold image in which the threshold value is indicated over an entire area of the inspection area, and a detection sensitivity image indicated by being converted from the threshold image.
摘要翻译：一种异物检查装置，其特征在于，包括：将检查光照射到待检查物品的检查区域的照射单元; 强度检测单元，用于通过向检查光照射检测从检查区域产生的反射光或散射光的强度; 位置检测单元，用于检测检查区域内的反射光或散射光的位置; 以及决定单元，用于判定在所述检查区域内是否存在异物; 异物检查装置包括：能够在其上显示其中在检查区域的整个区域上指示了阈值的阈值图像的显示单元和由阈值图像转换的检测灵敏度图像。

6. 发明授权

US07986405B2 Foreign matter inspection method and foreign matter inspection apparatus 有权
标题翻译：异物检查方法和异物检查仪器
公开(公告)号：US07986405B2
公开(公告)日：2011-07-26
申请号：US12758363
申请日：2010-04-12
申请人： Hiroyuki Yamashita , Mamoru Kobayashi , Eiji Imai , Yoshio Morishige , Koichi Nagoya , Hideki Fukushima
发明人： Hiroyuki Yamashita , Mamoru Kobayashi , Eiji Imai , Yoshio Morishige , Koichi Nagoya , Hideki Fukushima
IPC分类号： G01N21/00
CPC分类号： G01N21/95607 , G01N21/94 , G01N2021/8825
摘要： In a foreign matter inspection apparatus comprising: irradiating unit for irradiating inspection light to an inspection area of an article to be inspected; intensity detecting unit for detecting intensity of either reflected light or scattered light, which is generated from the inspection area by irradiating thereto the inspection light; position detecting unit for detecting a position of either the reflected light or the scattered light within the inspection area; and deciding unit for deciding whether or not a foreign matter is present within the inspection area; the foreign matter inspection apparatus is comprised of: display unit capable of displaying thereon both a threshold image in which the threshold value is indicated over an entire area of the inspection area, and a detection sensitivity image indicated by being converted from the threshold image.
摘要翻译：一种异物检查装置，其特征在于，包括：将检查光照射到待检查物品的检查区域的照射单元; 强度检测单元，用于通过向检查光照射检测从检查区域产生的反射光或散射光的强度; 位置检测单元，用于检测检查区域内的反射光或散射光的位置; 以及决定单元，用于判定在所述检查区域内是否存在异物; 异物检查装置包括：能够在其上显示其中在检查区域的整个区域上指示了阈值的阈值图像的显示单元和由阈值图像转换的检测灵敏度图像。

7. 发明授权

US07557913B2 Optical apparatus for defect inspection 有权
标题翻译：用于缺陷检查的光学设备
公开(公告)号：US07557913B2
公开(公告)日：2009-07-07
申请号：US11822003
申请日：2007-06-29
申请人： Seiji Otani , Koichi Nagoya
发明人： Seiji Otani , Koichi Nagoya
IPC分类号： G01N21/88
CPC分类号： G01N21/95607 , G01N21/94
摘要： An optical apparatus for defect inspection having an illuminating optical system for irradiating illumination light beams on the surface of a specimen to form a beam spot and a detection optical system for detecting a reflection light ray originating from the beam spot comprises a storage unit in which the position and size of a standard particle of known size on a specimen for correction are stored in advance, a correction processing section which, when the correction specimen is used as an inspection target, correlates a detected scattering light quantity from the standard particle with the known size of standard particle stored at a corresponding position in the storage unit to prepare a correlation between the scattering light quantity and a true value, and a signal processing section which, when an inspection wafer is used as an inspection target, converts a detected scattering light quantity into a defect dimension.
摘要翻译：一种用于缺陷检查的光学装置，具有用于在样本表面上照射照明光束以形成光束点的照明光学系统和用于检测源自束斑的反射光的检测光学系统，包括：存储单元，其中预先存储用于校正的样本上的已知尺寸的标准粒子的位置和尺寸，校正处理部，当将校正样本用作检查对象时，将来自标准粒子的检测到的散射光量与已知的存储在存储单元中的对应位置处的标准粒子的尺寸，以准备散射光量与真实值之间的相关性;以及信号处理部，其将检查用晶片用作检查对象时，将检测出的散射光数量变成缺陷维度。

8. 发明申请

US20110158227A1 GATEWAY HAVING DISTRIBUTED PROCESSING FUNCTION, AND COMMUNICATION TERMINAL 有权
标题翻译：具有分布式处理功能的网关和通信终端
公开(公告)号：US20110158227A1
公开(公告)日：2011-06-30
申请号：US13061874
申请日：2009-12-18
申请人： Koichi Nagoya , Masaaki Kimura
发明人： Koichi Nagoya , Masaaki Kimura
IPC分类号： H04L12/66
CPC分类号： H04L29/12367 , H04L12/66 , H04L61/2514 , H04L61/2564 , H04L65/102 , H04L65/1023 , H04L65/1069
摘要： Conventionally, in a system where devices for handling multiple media data such as audio and video are present, there is a problem that the number of audio channels that can be processed at the gateway is limited. In light of this problem, this invention offers a gateway having distributed processing function for a telephone or a data processing system featuring the capability to request address conversion to another terminal within the system to replace the address of stream-type packet data such as audio and video meant for itself, and if the aforementioned terminal to which the request was sent responds that it can handle the requested processing, to notify the address of the terminal processing the address conversion to the terminal transmitting the stream-type packet data.
摘要翻译：通常，在存在用于处理音频和视频等多媒体数据的设备的系统中，存在可以在网关处理的音频频道数量受到限制的问题。鉴于这个问题，本发明提供了一种具有用于电话或数据处理系统的分布式处理功能的网关，其特征在于能够请求地址转换到系统内的另一个终端以替换流式分组数据的地址，例如音频和视频本身，并且如果发送请求的上述终端响应于它可以处理所请求的处理，则将处理地址转换的终端的地址通知给发送流型分组数据的终端。

9. 发明申请

US20090251690A1 OPTICAL APPARATUS FOR DEFECT INSPECTION 有权
标题翻译：用于缺陷检查的光学装置
公开(公告)号：US20090251690A1
公开(公告)日：2009-10-08
申请号：US12480102
申请日：2009-06-08
申请人： Seiji Otani , Koichi Nagoya
发明人： Seiji Otani , Koichi Nagoya
IPC分类号： G01N21/88
CPC分类号： G01N21/95607 , G01N21/94
摘要： An optical apparatus for defect inspection having an illuminating optical system for irradiating illumination light beams on the surface of a specimen to form a beam spot and a detection optical system for detecting a reflection light ray originating from the beam spot comprises a storage unit in which the position and size of a standard particle of known size on a specimen for correction are stored in advance, a correction processing section which, when the correction specimen is used as an inspection target, correlates a detected scattering light quantity from the standard particle with the known size of standard particle stored at a corresponding position in the storage unit to prepare a correlation between the scattering light quantity and a true value, and a signal processing section which, when an inspection wafer is used as an inspection target, converts a detected scattering light quantity into a defect dimension.
摘要翻译：一种用于缺陷检查的光学装置，具有用于在样本表面上照射照明光束以形成光束点的照明光学系统和用于检测源自束斑的反射光的检测光学系统，包括：存储单元，其中预先存储用于校正的样本上的已知尺寸的标准粒子的位置和尺寸，校正处理部，当将校正样本用作检查对象时，将来自标准粒子的检测到的散射光量与已知的存储在存储单元中的对应位置处的标准粒子的尺寸，以准备散射光量与真实值之间的相关性;以及信号处理部，其将检查用晶片用作检查对象时，将检测出的散射光数量变成缺陷维度。

10. 发明申请

US20080002195A1 Optical apparatus for defect inspection 有权
标题翻译：用于缺陷检查的光学设备
公开(公告)号：US20080002195A1
公开(公告)日：2008-01-03
申请号：US11822003
申请日：2007-06-29
申请人： Seiji Otani , Koichi Nagoya
发明人： Seiji Otani , Koichi Nagoya
IPC分类号： G01N21/88
CPC分类号： G01N21/95607 , G01N21/94
摘要： An optical apparatus for defect inspection having an illuminating optical system for irradiating illumination light beams on the surface of a specimen to form a beam spot and a detection optical system for detecting a reflection light ray originating from the beam spot comprises a storage unit in which the position and size of a standard particle of known size on a specimen for correction are stored in advance, a correction processing section which, when the correction specimen is used as an inspection target, correlates a detected scattering light quantity from the standard particle with the known size of standard particle stored at a corresponding position in the storage unit to prepare a correlation between the scattering light quantity and a true value, and a signal processing section which, when an inspection wafer is used as an inspection target, converts a detected scattering light quantity into a defect dimension.
摘要翻译：一种用于缺陷检查的光学装置，具有用于在样本表面上照射照明光束以形成光束点的照明光学系统和用于检测源自束斑的反射光的检测光学系统，包括：存储单元，其中预先存储用于校正的样本上的已知尺寸的标准粒子的位置和尺寸，校正处理部，当将校正样本用作检查对象时，将来自标准粒子的检测到的散射光量与已知的存储在存储单元中的对应位置处的标准粒子的尺寸，以准备散射光量与真实值之间的相关性;以及信号处理部，其将检查用晶片用作检查对象时，将检测出的散射光数量变成缺陷维度。

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