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1. 发明申请

US20090114819A1 INFRARED SENSOR UNIT AND PROCESS OF FABRICATING THE SAME 失效
标题翻译：红外传感器单元及其制造方法
公开(公告)号：US20090114819A1
公开(公告)日：2009-05-07
申请号：US12063850
申请日：2006-08-16
申请人： Hiroshi Yamanaka , Tsutomu Ichihara , Yoshifumi Watabe , Koji Tsuji , Masao Kirihara , Takaaki Yoshihara , Yoichi Nishijima , Satoshi Hyodo
发明人： Hiroshi Yamanaka , Tsutomu Ichihara , Yoshifumi Watabe , Koji Tsuji , Masao Kirihara , Takaaki Yoshihara , Yoichi Nishijima , Satoshi Hyodo
IPC分类号： H01L27/14 , H01L21/00
CPC分类号： G01J5/10 , G01J5/20 , H01L31/0284 , H01L31/103
摘要： An infrared sensor unit has a thermal infrared sensor and an associated semiconductor device commonly developed on a semiconductor substrate. A dielectric top layer covers the substrate to conceal the semiconductor device formed in the top surface of the substrate. The thermal infrared sensor carried on a sensor mount which is supported above the semiconductor device by means of a thermal insulation support. The sensor mount and the support are made of a porous material which is superimposed on top of the dielectric top layer.
摘要翻译：红外传感器单元具有通常在半导体衬底上显影的热红外传感器和相关的半导体器件。电介质顶层覆盖衬底以隐藏形成在衬底顶表面中的半导体器件。热红外传感器承载在通过绝热支撑件支撑在半导体器件上方的传感器座上。传感器支架和支撑件由多孔材料制成，该多孔材料叠加在电介质顶层的顶部。

2. 发明授权

US07709795B2 Infrared sensor unit and process of fabricating the same 失效
标题翻译：红外传感器单元及其制造工艺
公开(公告)号：US07709795B2
公开(公告)日：2010-05-04
申请号：US12063850
申请日：2006-08-16
申请人： Hiroshi Yamanaka , Tsutomu Ichihara , Yoshifumi Watabe , Koji Tsuji , Masao Kirihara , Takaaki Yoshihara , Yoichi Nishijima , Satoshi Hyodo
发明人： Hiroshi Yamanaka , Tsutomu Ichihara , Yoshifumi Watabe , Koji Tsuji , Masao Kirihara , Takaaki Yoshihara , Yoichi Nishijima , Satoshi Hyodo
IPC分类号： G01J5/20
CPC分类号： G01J5/10 , G01J5/20 , H01L31/0284 , H01L31/103
摘要： An infrared sensor unit has a thermal infrared sensor and an associated semiconductor device commonly developed on a semiconductor substrate. A dielectric top layer covers the substrate to conceal the semiconductor device formed in the top surface of the substrate. The thermal infrared sensor carried on a sensor mount which is supported above the semiconductor device by means of a thermal insulation support. The sensor mount and the support are made of a porous material which is superimposed on top of the dielectric top layer.
摘要翻译：红外传感器单元具有通常在半导体衬底上显影的热红外传感器和相关的半导体器件。电介质顶层覆盖衬底以隐藏形成在衬底顶表面中的半导体器件。热红外传感器承载在通过绝热支撑件支撑在半导体器件上方的传感器座上。传感器支架和支撑件由多孔材料制成，该多孔材料叠加在电介质顶层的顶部。

3. 发明授权

US07484410B2 Gyro sensor and sensor apparatus using same 失效
标题翻译：陀螺传感器和传感器装置使用相同
公开(公告)号：US07484410B2
公开(公告)日：2009-02-03
申请号：US10598333
申请日：2005-03-14
申请人： Koji Tsuji , Kazuo Gouda , Masao Kirihara , Youichi Nishijima , Satoshi Hyodo
发明人： Koji Tsuji , Kazuo Gouda , Masao Kirihara , Youichi Nishijima , Satoshi Hyodo
IPC分类号： G01C19/56 , G01P9/04
CPC分类号： G01C19/5719
摘要： Disclosed is a gyro sensor, which comprises a primary base plate (1) and a support base plate (2) which are superimposed on one another. The primary base plate (1) is provided with a driven mass body (11) to be driven in such a manner as to be vibrated in a direction intersecting with a surface of the support base plate (2), and a detection mass body (12) coupled with the driven mass body (11) through a drive spring (13) and adapted to be displaceable in a plane along the support base plate (2). Two detection springs (15) extending in the arranging direction of the driven mass body (11) and the detection mass body (12) are connected, respectively, to opposite side of the detection mass body (12), and the other ends of the detection springs (15) are connected together through a coupling segment (16). A fixing segment (17) provided at a longitudinally intermediate portion of the coupling segment (16) is fixed to the support base plate (2). A member formed by integrating the driven mass body (11) and the detection mass body (12) through the drive spring (13) is supported relative to the support base plate (2) by the detection springs (15) in a cantilever manner.
摘要翻译：公开了一种陀螺传感器，其包括彼此重叠的主基板（1）和支撑基板（2）。主基板（1）设置有驱动质量体（11），其被驱动以便在与支撑基板（2）的表面相交的方向上振动，并且检测质量体（ 12），其通过驱动弹簧（13）与被驱动质量体（11）联接并且适于沿着支撑基板（2）在平面中移位。沿被驱动质量体（11）和检测质量体（12）的排列方向延伸的两个检测弹簧（15）分别连接到检测质量体（12）的相对侧，另一端检测弹簧（15）通过联接段（16）连接在一起。设置在联接段（16）的纵向中间部分的固定段（17）固定到支撑基板（2）上。通过驱动弹簧（13）将被驱动质量体（11）和检测质量体（12）集成形成的部件通过检测弹簧（15）以悬臂方式相对于支撑基板（2）支撑。

4. 发明申请

US20080053224A1 Gyro Sensor And Sensor Apparatus Using Same 失效
标题翻译：陀螺传感器和传感器使用相同
公开(公告)号：US20080053224A1
公开(公告)日：2008-03-06
申请号：US10598333
申请日：2005-03-14
申请人： Koji Tsuji , Kazuo Gouda , Masao Kirihara , Youichi Nishijima , Satoshi Hyodo
发明人： Koji Tsuji , Kazuo Gouda , Masao Kirihara , Youichi Nishijima , Satoshi Hyodo
IPC分类号： G01C19/56
CPC分类号： G01C19/5719
摘要： Disclosed is a gyro sensor, comprises a primary base plate (1) and a support base plate (2) which are superimposed on one another. The primary base plate (1) is provided with a driven mass body (11) to be driven in such a manner as to be vibrated in a direction intersecting with a surface of the support base plate (2), and a detection mass body (12) coupled with the driven mass body (11) through a drive spring (13) and adapted to be displaceable in a plane along the support base plate (2). Two detection springs (15) extending in the arranging direction of the driven mass body (11) and the detection mass body (12) are connected, respecti
摘要翻译：公开了一种陀螺传感器，包括彼此重叠的主基板（1）和支撑基板（2）。主基板（1）设置有驱动质量体（11），其被驱动以便在与支撑基板（2）的表面相交的方向上振动，并且检测质量体（ 12），其通过驱动弹簧（13）与被驱动质量体（11）联接并且适于沿着支撑基板（2）在平面中移位。在从动质量体（11）和检测质量体（12）的排列方向上延伸的两个检测弹簧（15）

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