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1. 发明申请

US20090224717A1 Operating apparatus 有权
标题翻译：操作装置
公开(公告)号：US20090224717A1
公开(公告)日：2009-09-10
申请号：US12379939
申请日：2009-03-04
申请人： Hiroshi Sawaragi , Keisuke Nagiri , Takayoshi Kawai , Nobuyuki Matsui , Makoto Iwasaki
发明人： Hiroshi Sawaragi , Keisuke Nagiri , Takayoshi Kawai , Nobuyuki Matsui , Makoto Iwasaki
IPC分类号： G05B11/42
CPC分类号： G05B5/01
摘要： An operating apparatus including a main body, a movable member, a drive unit having a drive source, and a control unit controlling the drive source to control the position of the movable member relative to the main body. The control unit including a position control system and an acceleration control system. The position control system including a position command portion, a first feedforward compensator outputting a first operation command to the drive source, a second feedforward compensator, a positional-information acquiring device obtaining information related to the position of the movable member, and a first feedback compensator outputting a second operation command to the drive source. The acceleration control system including an acceleration-information acquiring device obtaining information related to an acceleration of the main body, a third feedforward compensator, a second feedback compensator outputting a third operation command to the drive source.
摘要翻译：一种操作装置，包括主体，可动构件，具有驱动源的驱动单元，以及控制驱动源以控制可动构件相对于主体的位置的控制单元。控制单元包括位置控制系统和加速度控制系统。位置控制系统包括位置指令部分，向驱动源输出第一操作命令的第一前馈补偿器，第二前馈补偿器，获取与可移动部件的位置相关的信息的位置信息获取装置和第一反馈补偿器向驱动源输出第二操作命令。该加速控制系统包括获取与主体的加速度有关的信息的加速度信息获取装置，第三前馈补偿器，向驱动源输出第三操作命令的第二反馈补偿器。

2. 发明授权

US08154226B2 Operating apparatus 有权
标题翻译：操作装置
公开(公告)号：US08154226B2
公开(公告)日：2012-04-10
申请号：US12379939
申请日：2009-03-04
申请人： Hiroshi Sawaragi , Keisuke Nagiri , Takayoshi Kawai , Nobuyuki Matsui , Makoto Iwasaki
发明人： Hiroshi Sawaragi , Keisuke Nagiri , Takayoshi Kawai , Nobuyuki Matsui , Makoto Iwasaki
IPC分类号： H02P1/00
CPC分类号： G05B5/01
摘要： An operating apparatus including a main body, a movable member, a drive unit having a drive source, and a control unit controlling the drive source to control the position of the movable member relative to the main body. The control unit including a position control system and an acceleration control system. The position control system including a position command portion, a first feedforward compensator outputting a first operation command to the drive source, a second feedforward compensator, a positional-information acquiring device obtaining information related to the position of the movable member, and a first feedback compensator outputting a second operation command to the drive source. The acceleration control system including an acceleration-information acquiring device obtaining information related to an acceleration of the main body, a third feedforward compensator, a second feedback compensator outputting a third operation command to the drive source.
摘要翻译：一种操作装置，包括主体，可动构件，具有驱动源的驱动单元，以及控制驱动源以控制可动构件相对于主体的位置的控制单元。控制单元包括位置控制系统和加速度控制系统。位置控制系统包括位置指令部分，向驱动源输出第一操作命令的第一前馈补偿器，第二前馈补偿器，获取与可移动部件的位置相关的信息的位置信息获取装置和第一反馈补偿器向驱动源输出第二操作命令。该加速控制系统包括获取与主体的加速度有关的信息的加速度信息获取装置，第三前馈补偿器，向驱动源输出第三操作命令的第二反馈补偿器。

3. 发明授权

US09869979B2 Computation unit, output control method, and program 有权
公开(公告)号：US09869979B2
公开(公告)日：2018-01-16
申请号：US14005288
申请日：2011-03-22
申请人： Junji Shimamura , Hiroshi Sawaragi , Takaaki Yamada
发明人： Junji Shimamura , Hiroshi Sawaragi , Takaaki Yamada
IPC分类号： G05B15/02 , G05B19/05
CPC分类号： G05B15/02 , G05B19/056 , G05B2219/42189
摘要： A CPU unit of PLC executes a motion control and a sequence control. The CPU unit stores a control program for executing the motion control using a CAM table, and a first CAM table and a second CAM table. When a microprocessor receives a predetermined instruction during execution of the control program, the microprocessor switches the CAM table used in the execution of the control program from the first CAM table to the second CAM table. On the basis of the switching of the CAM table, the microprocessor outputs the execution results of the control program using the second CAM table to an apparatus to be controlled.

4. 发明授权

US08901870B2 Synchronous control apparatus 有权
标题翻译：同步控制装置
公开(公告)号：US08901870B2
公开(公告)日：2014-12-02
申请号：US13547608
申请日：2012-07-12
申请人： Takaaki Yamada , Hiroshi Sawaragi , Junji Shimamura
发明人： Takaaki Yamada , Hiroshi Sawaragi , Junji Shimamura
IPC分类号： G05B19/10 , G05B19/06
CPC分类号： G05B19/06 , G05B2219/50233 , G05B2219/50234
摘要： A synchronous control apparatus capable of switching cam curves with ease and without delay is provided. A cam curve storing unit stores a representation of a first cam curve and a representation of a second cam curve. Before switch-over of the cam curves, a control unit finds a position command value to a driven-side member, after the switch-over of the cam curves, the control unit finds the position command value, and in a switch-over period of the cam curves, the control unit finds the position command value to the driven-side member based on a value obtained by utilizing first data based on the first cam curve or a position of the driven shaft and second data based on the second cam curve to provide a weighted average at each control timing.
摘要翻译：提供了能够容易且无延迟地切换凸轮曲线的同步控制装置。凸轮曲线存储单元存储第一凸轮曲线的表示和第二凸轮曲线的表示。在凸轮曲线切换之前，控制单元在转动凸轮曲线之后，找到从动侧构件的位置指令值，控制单元找到位置指令值，并且在切换期间所述控制单元基于通过利用基于所述第一凸轮曲线的第一数据或所述从动轴的位置而获得的值，以及基于所述第二凸轮曲线的所述第二数据，找到所述从动侧构件的位置指令值以在每个控制时刻提供加权平均值。

5. 发明授权

US06870161B2 Apparatus for processing and observing a sample 失效
标题翻译：用于处理和观察样品的装置
公开(公告)号：US06870161B2
公开(公告)日：2005-03-22
申请号：US10644696
申请日：2003-08-20
申请人： Tatsuya Adachi , Toshiaki Fujii , Hiroshi Sawaragi , Yasuhiko Sugiyama
发明人： Tatsuya Adachi , Toshiaki Fujii , Hiroshi Sawaragi , Yasuhiko Sugiyama
IPC分类号： G01N1/28 , H01J37/20 , H01J37/305 , G01N1/04 , H01J37/26
CPC分类号： G01N1/286 , G01N2001/2873 , H01J37/20 , H01J37/3056 , H01J2237/2817 , H01J2237/31745
摘要： An apparatus for processing and observing a sample has a sample stage for supporting a sample at a preselected location thereof, a focused ion beam irradiation system for irradiating the sample with a focused ion beam along an optical axis to cut out a portion from the sample, and a side entry stage disposed over the sample stage and extending slantingly with respect to the optical axis of the focused ion beam irradiated by the focused ion beam irradiation system. The side entry stage has a microscope sample holder for picking up the cut-out sample portion directly from the preselected location of the sample and for supporting the sample portion. The microscope sample holder is configured to be removed from the side entry stage while supporting the sample portion and to be connected to an entry stage of a microscope device for observing the sample portion.
摘要翻译：用于处理和观察样品的装置具有用于在预选位置处支撑样品的样品台，用于沿着光轴照射具有聚焦离子束的样品的聚焦离子束照射系统，以从样品中切出一部分，以及设置在样品台上并相对于由聚焦离子束照射系统照射的聚焦离子束的光轴倾斜延伸的侧入口台。侧进入台具有用于从样品的预选位置直接拾取切出的样品部分并用于支撑样品部分的显微镜样品架。显微镜样品架被配置为在支撑样品部分的同时从侧入口台移除并连接到用于观察样品部分的显微镜装置的入口台。

6. 发明授权

US09891610B2 Computation unit, assistance device, output control method, display control method, and program 有权
公开(公告)号：US09891610B2
公开(公告)日：2018-02-13
申请号：US14005298
申请日：2011-03-22
申请人： Junji Shimamura , Hiroshi Sawaragi , Shinichi Hosomi
发明人： Junji Shimamura , Hiroshi Sawaragi , Shinichi Hosomi
IPC分类号： G05B19/00 , G05B19/05
CPC分类号： G05B19/056 , G05B2219/36171 , G05B2219/42189 , G05B2219/43174 , G05B2219/50233
摘要： A CPU unit of a PLC executes a motion control and a sequence control. The CPU unit stores a CAM table and a control program for performing the motion control using the CAM table. When a microprocessor receives a command for altering one of a plurality of phases and/or a displacement associated with the phase, the microprocessor alters the phase and/or the displacement in the CAM table to a value that is on the basis of the command. When the microprocessor performs the alteration, the microprocessor executes a control program using a post-alteration CAM table, and outputs the execution results to an apparatus to be controlled.

7. 发明申请

US20140088767A1 COMPUTATION UNIT, OUTPUT CONTROL METHOD, AND PROGRAM 有权
标题翻译：计算单元，输出控制方法和程序
公开(公告)号：US20140088767A1
公开(公告)日：2014-03-27
申请号：US14005288
申请日：2011-03-22
申请人： Junji Shimamura , Hiroshi Sawaragi , Takaaki Yamada
发明人： Junji Shimamura , Hiroshi Sawaragi , Takaaki Yamada
IPC分类号： G05B15/02
CPC分类号： G05B15/02 , G05B19/056 , G05B2219/42189
摘要： A CPU unit of PLC executes a motion control and a sequence control. The CPU unit stores a control program for executing the motion control using a CAM table, and a first CAM table and a second CAM table. When a microprocessor receives a predetermined instruction during execution of the control program, the microprocessor switches the CAM table used in the execution of the control program from the first CAM table to the second CAM table. On the basis of the switching of the CAM table, the microprocessor outputs the execution results of the control program using the second CAM table to an apparatus to be controlled.
摘要翻译： PLC的CPU单元执行运动控制和序列控制。 CPU单元存储用于使用CAM表执行运动控制的控制程序，以及第一CAM表和第二CAM表。当微处理器在执行控制程序期间接收到预定指令时，微处理器将控制程序执行中使用的CAM表从第一CAM表切换到第二CAM表。基于CAM表的切换，微处理器将使用第二CAM表的控制程序的执行结果输出到要控制的装置。

8. 发明申请

US20140058565A1 COMPUTATION UNIT, ASSISTANCE DEVICE, OUTPUT CONTROL METHOD, DISPLAY CONTROL METHOD, AND PROGRAM 有权
标题翻译：计算单元，辅助设备，输出控制方法，显示控制方法和程序
公开(公告)号：US20140058565A1
公开(公告)日：2014-02-27
申请号：US14005298
申请日：2011-03-22
申请人： Junji Shimamura , Hiroshi Sawaragi , Shinichi Hosomi
发明人： Junji Shimamura , Hiroshi Sawaragi , Shinichi Hosomi
IPC分类号： G05B19/05
CPC分类号： G05B19/056 , G05B2219/36171 , G05B2219/42189 , G05B2219/43174 , G05B2219/50233
摘要： A CPU unit of a PLC executes a motion control and a sequence control. The CPU unit stores a CAM table and a control program for performing the motion control using the CAM table. When a microprocessor receives a command for altering one of a plurality of phases and/or a displacement associated with the phase, the microprocessor alters the phase and/or the displacement in the CAM table to a value that is on the basis of the command. When the microprocessor performs the alteration, the microprocessor executes a control program using a post-alteration CAM table, and outputs the execution results to an apparatus to be controlled.
摘要翻译： PLC的CPU单元执行运动控制和序列控制。 CPU单元存储用于使用CAM表执行运动控制的CAM表和控制程序。当微处理器接收到用于改变与相位相关联的多个相位和/或位移中的一个的命令时，微处理器将CAM表中的相位和/或位移改变为基于该命令的值。当微处理器执行改变时，微处理器使用后变更CAM表执行控制程序，并将执行结果输出到要控制的设备。

9. 发明授权

US4710639A Ion beam lithography system 失效
标题翻译：离子束光刻系统
公开(公告)号：US4710639A
公开(公告)日：1987-12-01
申请号：US852185
申请日：1986-04-15
申请人： Hiroshi Sawaragi
发明人： Hiroshi Sawaragi
IPC分类号： H01J37/147 , H01J37/30 , H01J37/317 , H01L21/265 , H01J37/302
CPC分类号： H01J37/3007 , H01J37/3171
摘要： When ions are implanted into desired locations on a material surface using a focused ion beam system, it is necessary to incline the direction of the implantation at about 7.degree. to a line normal to the material surface. The system according to the present invention uses a deflector consisting of deflecting elements of two stages to deflect an ion beam, for effecting such an inclination. The beam is deflected in a given direction by the deflecting element of the first stage, and then it is deflected in the opposite direction by the deflecting element of the second stage. Since chromatic aberrations of the beam caused by the deflecting elements of the two stages cancel each other, defocusing of the beam on the material due to energy dispersion is suppressed.
摘要翻译：当使用聚焦离子束系统将离子注入到材料表面上的期望位置时，必须将注入方向在约7°处倾斜到垂直于材料表面的线。根据本发明的系统使用由两级的偏转元件组成的偏转器来偏转离子束，以实现这种倾斜。光束通过第一级的偏转元件在给定方向上偏转，然后由第二级的偏转元件沿相反方向偏转。由于由两级的偏转元件引起的光束的色差相互抵消，所以抑制了由于能量分散导致的材料上的光束的散焦。

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