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1. 发明授权

US07477115B2 Piezoelectric resonator, method of manufacturing piezoelectric resonator, and filter, duplexer, and communication device using piezoelectric resonator 失效
标题翻译：压电谐振器，制造压电谐振器的方法以及使用压电谐振器的滤波器，双工器和通信装置
公开(公告)号：US07477115B2
公开(公告)日：2009-01-13
申请号：US11488148
申请日：2006-07-18
申请人： Hiroshi Nakatsuka , Keiji Onishi , Hiroyuki Nakamura , Takehiko Yamakawa , Hiroshi Yamaguchi
发明人： Hiroshi Nakatsuka , Keiji Onishi , Hiroyuki Nakamura , Takehiko Yamakawa , Hiroshi Yamaguchi
IPC分类号： H03H9/72 , H03H9/64 , H03H9/15
CPC分类号： H03H3/04 , H03H9/0211 , H03H9/173 , Y10T29/42
摘要： A piezoeletric resonator includes: a substrate; a lower electrode formed on or above the substrate; a piezoeletric body formed on or above the lower electrode; an upper electrode formed on or above the piezoeletric body; and a cavity under a vibrating portion formed by the lower electrode, the piezoeletric body, and the upper electrode. Where a resonant frequency of vibration with a thickness of the vibrating portion being a half of a wavelength is taken as fr, an average of ultrasonic velocity in a material forming the cavity is taken as Vc, and a value determined based on the resonant frequency fr and the average of ultrasonic velocity Vc is taken as λc (=Vc/fr), a depth of the cavity is set so as to be equal to or larger than n×λc/2−λc/8 and equal to or smaller than n×λc/2+λc/8.
摘要翻译：压电谐振器包括：基板; 形成在基板上或上方的下电极; 形成在下电极上或上的压电体; 形成在压电体上或上的上电极; 以及由下电极，压电体和上电极形成的振动部下的空腔。其中振动部分的厚度为波长的一半的振动的共振频率为fr，将形成空腔的材料中的超声速度的平均值作为Vc，并且基于谐振频率fr确定的值超声波速度Vc的平均值为lambdac（= Vc / fr），空腔的深度设定为等于或大于n×lambdac / 2-lambdac / 8且等于或小于nxlambdac / 2 + lambdac / 8。

2. 发明申请

US20070109073A1 Filter using piezoelectric resonator 失效
标题翻译：使用压电谐振器滤波
公开(公告)号：US20070109073A1
公开(公告)日：2007-05-17
申请号：US11582425
申请日：2006-10-18
申请人： Takehiko Yamakawa , Hiroshi Yamaguchi , Hiroshi Nakatsuka , Hiroyuki Nakamura , Keiji Onishi , Toshio Ishizaki
发明人： Takehiko Yamakawa , Hiroshi Yamaguchi , Hiroshi Nakatsuka , Hiroyuki Nakamura , Keiji Onishi , Toshio Ishizaki
IPC分类号： H03H9/70 , H03H9/58
CPC分类号： H03H9/605 , H03H9/25 , H03H9/542 , H03H9/6483 , H03H9/6493
摘要： A series piezoelectric resonator 11 is connected in series between an input terminal 15a and an output terminal 15b. A first electrode of a parallel piezoelectric resonator 12a is connected to a connection point between the input terminal 15a and the series piezoelectric resonator 11, and a second electrode of the parallel piezoelectric resonator 12a is connected to a first terminal of an inductor 13a. A first electrode of a parallel piezoelectric resonator 12b is connected to a connection point between the series piezoelectric resonator 11 and the output terminal 15b, and a second electrode of the parallel piezoelectric resonator 12b is connected to a first terminal of an inductor 13b. Second terminals of the inductors 13a and 13b are grounded. An additional piezoelectric resonator 14 is connected between the second electrode of the parallel piezoelectric resonator 12a and the second electrode of the parallel piezoelectric resonator 12b.
摘要翻译：串联压电谐振器11串联连接在输入端子15a和输出端子15b之间。平行压电谐振器12a的第一电极连接到输入端子15a和串联压电谐振器11之间的连接点，并联压电谐振器的第二电极连接到电感器13的第一端子一个。平行压电谐振器12b的第一电极连接到串联压电谐振器11和输出端子15b之间的连接点，并联压电谐振器12b的第二电极连接到电感器13的第一端子 b。电感器13a和13b的第二端接地。并联压电谐振器12a的第二电极和并联压电谐振器12b的第二电极之间连接有一个附加的压电谐振器14。

3. 发明申请

US20070001781A1 Piezoelectric resonator, method of manufacturing piezoelectric resonator, and filter, duplexer, and communication device using piezoelectric resonator 失效
标题翻译：压电谐振器，制造压电谐振器的方法以及使用压电谐振器的滤波器，双工器和通信装置
公开(公告)号：US20070001781A1
公开(公告)日：2007-01-04
申请号：US11488148
申请日：2006-07-18
申请人： Hiroshi Nakatsuka , Keiji Onishi , Hiroyuki Nakamura , Takehiko Yamakawa , Hiroshi Yamaguchi
发明人： Hiroshi Nakatsuka , Keiji Onishi , Hiroyuki Nakamura , Takehiko Yamakawa , Hiroshi Yamaguchi
IPC分类号： H03H9/70 , H03H9/54
CPC分类号： H03H3/04 , H03H9/0211 , H03H9/173 , Y10T29/42
摘要： A piezoeletric resonator includes: a substrate; a lower electrode formed on or above the substrate; a piezoeletric body formed on or above the lower electrode; an upper electrode formed on or above the piezoeletric body; and a cavity under a vibrating portion formed by the lower electrode, the piezoeletric body, and the upper electrode. Where a resonant frequency of vibration with a thickness of the vibrating portion being a half of a wavelength is taken as fr, an average of ultrasonic velocity in a material forming the cavity is taken as Vc, and a value determined based on the resonant frequency fr and the average of ultrasonic velocity Vc is taken as λc (=Vc/fr), a depth of the cavity is set so as to be equal to or larger than n×λc/2−λc/8 and equal to or smaller than n×λc/2+λc/8.
摘要翻译：压电谐振器包括：基板; 形成在基板上或上方的下电极; 形成在下电极上或上的压电体; 形成在压电体上或上的上电极; 以及由下电极，压电体和上电极形成的振动部下的空腔。其中振动部分的厚度为波长的一半的振动的共振频率为fr，将形成空腔的材料中的超声速度的平均值作为Vc，并且基于谐振频率fr确定的值超声波速度Vc的平均值为lambdac（= Vc / fr），空腔的深度设定为等于或大于n×lambdac / 2-lambdac / 8且等于或小于nxlambdac / 2 + lambdac / 8。

4. 发明授权

US07479847B2 Filter using piezoelectric resonator 失效
标题翻译：使用压电谐振器滤波
公开(公告)号：US07479847B2
公开(公告)日：2009-01-20
申请号：US11582425
申请日：2006-10-18
申请人： Takehiko Yamakawa , Hiroshi Yamaguchi , Hiroshi Nakatsuka , Hiroyuki Nakamura , Keiji Onishi , Toshio Ishizaki
发明人： Takehiko Yamakawa , Hiroshi Yamaguchi , Hiroshi Nakatsuka , Hiroyuki Nakamura , Keiji Onishi , Toshio Ishizaki
IPC分类号： H03H9/00 , H03H9/54
CPC分类号： H03H9/605 , H03H9/25 , H03H9/542 , H03H9/6483 , H03H9/6493
摘要： A series piezoelectric resonator 11 is connected in series between an input terminal 15a and an output terminal 15b. A first electrode of a parallel piezoelectric resonator 12a is connected to a connection point between the input terminal 15a and the series piezoelectric resonator 11, and a second electrode of the parallel piezoelectric resonator 12a is connected to a first terminal of an inductor 13a. A first electrode of a parallel piezoelectric resonator 12b is connected to a connection point between the series piezoelectric resonator 11 and the output terminal 15b, and a second electrode of the parallel piezoelectric resonator 12b is connected to a first terminal of an inductor 13b. Second terminals of the inductors 13a and 13b are grounded. An additional piezoelectric resonator 14 is connected between the second electrode of the parallel piezoelectric resonator 12a and the second electrode of the parallel piezoelectric resonator 12b.
摘要翻译：串联压电谐振器11串联连接在输入端子15a和输出端子15b之间。平行压电谐振器12a的第一电极连接到输入端子15a和串联压电谐振器11之间的连接点，并联压电谐振器12a的第二电极连接到电感器13a的第一端子。平行压电谐振器12b的第一电极连接到串联压电谐振器11和输出端子15b之间的连接点，并联压电谐振器12b的第二电极连接到电感器13b的第一端子。电感器13a和13b的第二端接地。另外的压电谐振器14连接在并联压电谐振器12a的第二电极和并联压电谐振器12b的第二电极之间。

5. 发明授权

US07230367B2 Piezoelectric resonator, production method thereof, filter, duplexer, and communication device 失效
公开(公告)号：US07230367B2
公开(公告)日：2007-06-12
申请号：US10979277
申请日：2004-11-03
申请人： Hiroshi Yamaguchi , Hiroshi Nakatsuka , Keiji Onishi , Takehiko Yamakawa , Hiroyuki Nakamura
发明人： Hiroshi Yamaguchi , Hiroshi Nakatsuka , Keiji Onishi , Takehiko Yamakawa , Hiroyuki Nakamura
IPC分类号： H01L41/04 , H03H9/70
CPC分类号： H03H9/173 , H03H3/04 , H03H2003/021
摘要： A piezoelectric resonator includes a substrate, a lower electrode provided on or above the substrate, a piezoelectric member provided on or above the lower electrode, an upper electrode provided on or above the piezoelectric member, and a cavity provided below a vibration member including the lower electrode, the piezoelectric member, and the upper electrode. In a case where a resonance frequency of vibration with a thickness of the vibration member being a half of a wavelength is taken as fr1, an average of ultrasonic velocity in a material forming the cavity is taken as Vc2, and a value determined based on the resonance frequency fr1 and the average of ultrasonic velocity Vc2 is λc (=Vc2/fr1), a depth t2 of the cavity is set as, ( 2 ⁢ n - 1 ) × λ ⁢ ⁢ c 4 - λc 8 ≦ t2 ≦ ( 2 ⁢ n - 1 ) × λ ⁢ ⁢ c 4 + λ ⁢ ⁢ c 8 , where n is an arbitrary natural number.

6. 发明授权

US07113055B2 Piezoelectric resonator, method of manufacturing piezoelectric resonator, and filter, duplexer, and communication device using piezoelectric resonator 有权
公开(公告)号：US07113055B2
公开(公告)日：2006-09-26
申请号：US10979420
申请日：2004-11-03
申请人： Hiroshi Nakatsuka , Keiji Onishi , Hiroyuki Nakamura , Takehiko Yamakawa , Hiroshi Yamaguchi
发明人： Hiroshi Nakatsuka , Keiji Onishi , Hiroyuki Nakamura , Takehiko Yamakawa , Hiroshi Yamaguchi
IPC分类号： H03H9/70 , H03H9/54 , H03H9/15 , H03H3/02
CPC分类号： H03H3/04 , H03H9/0211 , H03H9/173 , Y10T29/42
摘要： A piezoeletric resonator includes: a substrate; a lower electrode formed on or above the substrate; a piezoeletric body formed on or above the lower electrode; an upper electrode formed on or above the piezoeletric body; and a cavity under a vibrating portion formed by the lower electrode, the piezoeletric body, and the upper electrode. Where a resonant frequency of vibration with a thickness of the vibrating portion being a half of a wavelength is taken as fr, an average of ultrasonic velocity in a material forming the cavity is taken as Vc, and a value determined based on the resonant frequency fr and the average of ultrasonic velocity Vc is taken as λc (=Vc/fr), a depth of the cavity is set so as to be equal to or larger than n×λc/2−λc/8 and equal to or smaller than n×λc/2+λc/8.

7. 发明申请

US20050099093A1 Piezoelectric resonator, production method thereof, filter, duplexer, and communication device 失效
公开(公告)号：US20050099093A1
公开(公告)日：2005-05-12
申请号：US10979277
申请日：2004-11-03
申请人： Hiroshi Yamaguchi , Hiroshi Nakatsuka , Keiji Onishi , Takehiko Yamakawa , Hiroyuki Nakamura
发明人： Hiroshi Yamaguchi , Hiroshi Nakatsuka , Keiji Onishi , Takehiko Yamakawa , Hiroyuki Nakamura
IPC分类号： H03H9/15 , H03H3/04 , H03H9/13 , H03H9/17 , H01L41/08
CPC分类号： H03H9/173 , H03H3/04 , H03H2003/021
摘要： The present invention relates to a piezoelectric resonator including: a substrate; a lower electrode provided on or above the substrate; a piezoelectric member 101 provided on or above the lower electrode; an upper electrode 102 provided on or above the piezoelectric member; and a cavity 104 provided below a vibration member consisting of the lower electrode, the piezoelectric member, and the upper electrode. In the case where a resonance frequency of vibration with a thickness of the vibration member being a half of a wavelength is taken as fr1, an average of ultrasonic velocity in a material forming the cavity is taken as Vc2, and a value determined based on the resonance frequency fr1 and the average of ultrasonic velocity Vc2 is λc (=Vc2/fr1), a depth t2 of the cavity is set as shown below, ( 2 ⁢ n - 1 ) × λ ⁢ ⁢ c 4 - λc 8 ≦ t2 ≦ ( 2 ⁢ n - 1 ) × λ ⁢ ⁢ c 4 + λ ⁢ ⁢ c 8 , where n is an arbitrary natural number.

8. 发明授权

US07138888B2 Filter using piezoelectric resonator 失效
标题翻译：使用压电谐振器滤波
公开(公告)号：US07138888B2
公开(公告)日：2006-11-21
申请号：US10984839
申请日：2004-11-10
申请人： Takehiko Yamakawa , Hiroshi Yamaguchi , Hiroshi Nakatsuka , Hiroyuki Nakamura , Keiji Onishi , Toshio Ishizaki
发明人： Takehiko Yamakawa , Hiroshi Yamaguchi , Hiroshi Nakatsuka , Hiroyuki Nakamura , Keiji Onishi , Toshio Ishizaki
IPC分类号： H03H9/00
CPC分类号： H03H9/605 , H03H9/6433
摘要： A series piezoelectric resonator is connected in series between an input terminal and an output terminal. A first electrode of a first parallel piezoelectric resonator is connected to a connection point between the input terminal and the series piezoelectric resonator, and a second electrode of the first parallel piezoelectric resonator is connected to a first terminal of a first inductor. A first electrode of a second parallel piezoelectric resonator is connected to a connection point between the series piezoelectric resonator and the output terminal, and a second electrode of the second parallel piezoelectric resonator is connected to a first terminal of a second inductor. Second terminals of the first and second inductors are grounded. An additional piezoelectric resonator is connected between the second electrode of the first parallel piezoelectric resonator and the second electrode of the second parallel piezoelectric resonator.
摘要翻译：串联压电谐振器串联连接在输入端和输出端之间。第一并联压电谐振器的第一电极连接到输入端子和串联压电谐振器之间的连接点，并且第一并联压电谐振器的第二电极连接到第一电感器的第一端子。第二并联压电谐振器的第一电极连接到串联压电谐振器和输出端之间的连接点，第二并联压电谐振器的第二电极连接到第二电感器的第一端。第一和第二电感器的第二端子接地。附加的压电谐振器连接在第一并联压电谐振器的第二电极和第二并联压电谐振器的第二电极之间。

9. 发明申请

US20050110596A1 Filter using piezoelectric resonator 失效
标题翻译：使用压电谐振器滤波
公开(公告)号：US20050110596A1
公开(公告)日：2005-05-26
申请号：US10984839
申请日：2004-11-10
申请人： Takehiko Yamakawa , Hiroshi Yamaguchi , Hiroshi Nakatsuka , Hiroyuki Nakamura , Keiji Onishi , Toshio Ishizaki
发明人： Takehiko Yamakawa , Hiroshi Yamaguchi , Hiroshi Nakatsuka , Hiroyuki Nakamura , Keiji Onishi , Toshio Ishizaki
IPC分类号： H03H9/54 , H03H9/58 , H03H9/60 , H03H9/64
CPC分类号： H03H9/605 , H03H9/6433
摘要： A series piezoelectric resonator 11 is connected in series between an input terminal 15a and an output terminal 15b. A first electrode of a parallel piezoelectric resonator 12a is connected to a connection point between the input terminal 15a and the series piezoelectric resonator 11, and a second electrode of the parallel piezoelectric resonator 12a is connected to a first terminal of an inductor 13a. A first electrode of a parallel piezoelectric resonator 12b is connected to a connection point between the series piezoelectric resonator 11 and the output terminal 15b, and a second electrode of the parallel piezoelectric resonator 12b is connected to a first terminal of an inductor 13b. Second terminals of the inductors 13a, 13b are grounded. An additional piezoelectric resonator 14 is connected between the second electrode of the parallel piezoelectric resonator 12a and the second electrode of the parallel piezoelectric resonator 12b.
摘要翻译：串联压电谐振器11串联连接在输入端子15a和输出端子15b之间。平行压电谐振器12a的第一电极连接到输入端子15a和串联压电谐振器11之间的连接点，并联压电谐振器的第二电极连接到电感器13的第一端子一个。平行压电谐振器12b的第一电极连接到串联压电谐振器11和输出端子15b之间的连接点，并联压电谐振器12b的第二电极连接到电感器13的第一端子 b。电感器13a，13b的第二端接地。并联压电谐振器12a的第二电极和并联压电谐振器12b的第二电极之间连接有一个附加的压电谐振器14。

10. 发明申请

US20050099245A1 Piezoelectric resonator, method of manufacturing piezoelectric resonator, and filter, duplexer, and communication device using piezoelectric resonator 有权
标题翻译：压电谐振器，制造压电谐振器的方法以及使用压电谐振器的滤波器，双工器和通信装置
公开(公告)号：US20050099245A1
公开(公告)日：2005-05-12
申请号：US10979420
申请日：2004-11-03
申请人： Hiroshi Nakatsuka , Keiji Onishi , Hiroyuki Nakamura , Takehiko Yamakawa , Hiroshi Yamaguchi
发明人： Hiroshi Nakatsuka , Keiji Onishi , Hiroyuki Nakamura , Takehiko Yamakawa , Hiroshi Yamaguchi
IPC分类号： H03H9/15 , H03H3/04 , H03H9/02 , H03H9/17 , H03H9/56 , H03H9/70
CPC分类号： H03H3/04 , H03H9/0211 , H03H9/173 , Y10T29/42
摘要： A piezoeletric resonator includes: a substrate; a lower electrode formed on or above the substrate; a piezoeletric body formed on or above the lower electrode; an upper electrode formed on or above the piezoeletric body; and a cavity under a vibrating portion formed by the lower electrode, the piezoeletric body, and the upper electrode. Where a resonant frequency of vibration with a thickness of the vibrating portion being a half of a wavelength is taken as fr, an average of ultrasonic velocity in a material forming the cavity is taken as Vc, and a value determined based on the resonant frequency fr and the average of ultrasonic velocity Vc is taken as λc (=Vc/fr), a depth of the cavity is set so as to be equal to or larger than n×λc/2−λc/8 and equal to or smaller than n×λc/2+λc/8.
摘要翻译：压电谐振器包括：基板; 形成在基板上或上方的下电极; 形成在下电极上或上的压电体; 形成在压电体上或上的上电极; 以及由下电极，压电体和上电极形成的振动部下的空腔。其中振动部分的厚度为波长的一半的振动的共振频率为fr，将形成空腔的材料中的超声速度的平均值作为Vc，并且基于谐振频率fr确定的值超声波速度Vc的平均值为lambdac（= Vc / fr），空腔的深度设定为等于或大于n×lambdac / 2-lambdac / 8且等于或小于nxlambdac / 2 + lambdac / 8。

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