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1. 发明授权

US5879569A Magnetic disk and method of and apparatus for manufacturing magnetic disk 失效
标题翻译：磁盘及磁盘制造方法及装置
公开(公告)号：US5879569A
公开(公告)日：1999-03-09
申请号：US677960
申请日：1996-07-10
申请人： Hiroshi Matsumoto , Hiroshi Yashiki , Yoichi Inomata , Tatsuya Yoneda , Kazuhiko Tsutsumi , Noriyuki Shige , Tokuho Takagaki
发明人： Hiroshi Matsumoto , Hiroshi Yashiki , Yoichi Inomata , Tatsuya Yoneda , Kazuhiko Tsutsumi , Noriyuki Shige , Tokuho Takagaki
IPC分类号： G11B5/82 , G11B5/84 , B44C1/22
CPC分类号： G11B5/8408 , G11B5/82
摘要： To provide a magnetic disk excellent in floating and sliding characteristics in a low floating area. A magnetic disk having a feature that variations in the height of the projections on each surface of protective films in floating ensured areas on both sides of the magnetic disk are .+-.15%, and a magnetic disk device on which the magnetic disk is mounted. A surface processing apparatus for a magnetic disk, including: a first electrode for fixing the magnetic disk, the first electrode having an inside diameter larger than the inside diameter of the non-magnetic substrate; an electrically grounded shield for shielding the first electrode; a second electrode, disposed in parallel to the surface of the magnetic disk, for generating plasma against the surface of the magnetic disk; and a plasma control member, disposed at a position separated from the outer edge of the magnetic disk by a specified distance, for controlling plasma generated against the surface of the magnetic disk; wherein a power is applied between the first and second electrodes for plasma-etching the surface of the magnetic disk.
摘要翻译：提供在低浮动区域中浮动和滑动特性优异的磁盘。具有这样的特征的磁盘，其特征在于，在磁盘两侧的浮动确保区域中的保护膜的每个表面上的突起的高度变化为+/- 15％，以及安装有磁盘的磁盘装置。一种用于磁盘的表面处理装置，包括：用于固定磁盘的第一电极，第一电极的内径大于非磁性基板的内径; 用于屏蔽第一电极的电接地屏蔽; 第二电极，平行于磁盘的表面设置，用于产生等离子体抵靠磁盘的表面; 以及等离子体控制构件，设置在与磁盘的外边缘分开一定距离的位置，用于控制对磁盘表面产生的等离子体; 其中在所述第一和第二电极之间施加电力以等离子体刻蚀所述磁盘的表面。

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