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    • 8. 发明授权
    • Deformable mirror and device for observing retina of eye
    • 用于观察眼睛视网膜的变形镜和装置
    • US07345808B2
    • 2008-03-18
    • US11175393
    • 2005-07-07
    • Michiko NakanishiAkio KobayashiIsao MinegishiAyako Iijima
    • Michiko NakanishiAkio KobayashiIsao MinegishiAyako Iijima
    • G02B26/00
    • G03B15/14A61B3/14
    • A deformable mirror, in which the distance between an electrode substrate and a membrane can be accurately maintained and which can be produced at a low material cost, is provided. The deformable mirror comprises: an electrode substrate 11 having a plurality of electrodes (16a, 16b, 16c, 16d and 16e) formed on a surface of the electrode substrate; a silicon membrane 13 having a counter electrode opposed to the plurality of electrodes formed on the electrode substrate 11; a reflection section 15 provided on the side of the silicon membrane 13 opposite the counter electrode; and a support plate 19 integrally bonded to the electrode substrate 11 for restraining the displacements of the plurality of electrodes which adversely affect the deformation of the silicon membrane 13, in which a plurality of layers of wiring patterns (11a, 11b, 11c, 11d and 11e) for supplying drive voltages to the plurality of electrodes are formed in the electrode substrate 11.
    • 提供了可以精确地保持电极基板和膜之间的距离并且可以以低材料成本生产的可变形反射镜。 可变形反射镜包括:电极基板11,其具有形成在电极基板的表面上的多个电极(16a,16b,16c,16d和16e) 具有与形成在电极基板11上的多个电极相对的对置电极的硅膜13; 设置在与对置电极相对的硅膜13一侧的反射部15; 以及与电极基板11一体地结合的支撑板19,用于抑制对硅膜13的变形产生不利影响的多个电极的位移,其中多层布线图案(11a,11b,11c ,11d和11e)用于在多个电极中提供驱动电压。
    • 9. 发明申请
    • Deformable mirror and device for observing retina of eye
    • 用于观察眼睛视网膜的变形镜和装置
    • US20060159490A1
    • 2006-07-20
    • US11175393
    • 2005-07-07
    • Michiko NakanishiAkio KobayashiIsao MinegishiAyako Iijima
    • Michiko NakanishiAkio KobayashiIsao MinegishiAyako Iijima
    • G03G15/041
    • G03B15/14A61B3/14
    • A deformable mirror, in which the distance between an electrode substrate and a membrane can be accurately maintained and which can be produced at a low material cost, is provided. The deformable mirror comprises: an electrode substrate 11 having a plurality of electrodes (16a, 16b, 16c, 16d and 16e) formed on a surface of the electrode substrate; a silicon membrane 13 having a counter electrode opposed to the plurality of electrodes formed on the electrode substrate 11; a reflection section 15 provided on the side of the silicon membrane 13 opposite the counter electrode; and a support plate 19 integrally bonded to the electrode substrate 11 for restraining the displacements of the plurality of electrodes which adversely affect the deformation of the silicon membrane 13, in which a plurality of layers of wiring patterns (11a, 11b, 11c, 11d and 11e) for supplying drive voltages to the plurality of electrodes are formed in the electrode substrate 11.
    • 提供了可以精确地保持电极基板和膜之间的距离并且可以以低材料成本生产的可变形反射镜。 可变形反射镜包括:电极基板11,其具有形成在电极基板的表面上的多个电极(16a,16b,16c,16d和16e) 具有与形成在电极基板11上的多个电极相对的对置电极的硅膜13; 设置在与对置电极相对的硅膜13一侧的反射部15; 以及与电极基板11一体地结合的支撑板19,用于抑制对硅膜13的变形产生不利影响的多个电极的位移,其中多层布线图案(11a,11b,11c ,11d和11e)用于在多个电极中提供驱动电压。