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1. 发明授权

US08836348B2 Electrostatic capacitance type physical quantity sensor and angular velocity sensor 有权
标题翻译：静电电容型物理量传感器和角速度传感器
公开(公告)号：US08836348B2
公开(公告)日：2014-09-16
申请号：US13382395
申请日：2010-07-15
申请人： Hiroshi Iwasawa , Masahiro Matsumoto , Toshiaki Nakamura
发明人： Hiroshi Iwasawa , Masahiro Matsumoto , Toshiaki Nakamura
IPC分类号： G01R27/26 , G01P15/125 , G01P15/08 , G01D5/24 , G01D3/028 , G01C19/5726
CPC分类号： G01P15/125 , G01C19/5726 , G01D3/028 , G01D5/24 , G01P15/0802
摘要： The present invention provides a high-accuracy electrostatic capacitance type physical quantity sensor and angular velocity sensor configured so as to be capable of suppressing noise derived from internal noise while maintaining resistance to externally-incoming noise. A detection element 10 has a movable mass 18 supported displaceably by a physical quantity given from the outside, and a detection electrode Ef. A shield wire 16 is disposed around wirings connected to the input of a capacitance detection circuit 30 and is connected to a dc potential of low impedance. A value Cin of an input capacitance relative to a fixed potential of low impedance at a portion at which the detection element 10 is connected with the capacitance detection circuit 30 is set to fall within a range of 1.5 pF
摘要翻译：本发明提供了一种高精度静电电容型物理量传感器和角速度传感器，其被配置为能够抑制由内部噪声产生的噪声，同时保持对外来噪声的抵抗。检测元件10具有通过从外部给出的物理量可移动地支撑的可移动质量块18和检测电极Ef。屏蔽线16设置在连接到电容检测电路30的输入端的布线周围，并连接到低阻抗的直流电位。将检测元件10与电容检测电路30连接的部分处的输入电容相对于低阻抗的固定电位的值Cin设定为1.5pF

2. 发明授权

US08456179B2 Angular velocity detection device 有权
标题翻译：角速度检测装置
公开(公告)号：US08456179B2
公开(公告)日：2013-06-04
申请号：US13129927
申请日：2009-11-24
申请人： Hiroshi Iwasawa , Toshiaki Nakamura , Masahiro Matsumoto
发明人： Hiroshi Iwasawa , Toshiaki Nakamura , Masahiro Matsumoto
IPC分类号： G01R27/26 , G01P3/44
CPC分类号： G01C19/5776
摘要： The present invention aims to provide an angular velocity detection device which is capable of reducing the effect of coupling between a drive electrode and a first displacement detection electrode by a floating capacity, and is low in cost. In the angular velocity detection device, an oscillating body 21 is displaceable in a first direction and a second direction which orthogonally intersect each other. The oscillating body 21 is oscillated in the first direction by an electrostatic force corresponding to a drive signal generated by a non-interference signal generator 1. A carrier signal generated by the non-interference signal generator 1 is applied to the oscillating body 21. A first displacement detection circuit 3 and a second displacement detection circuit 4 each detect a displacement of the oscillating body 21 as a displacement modulation signal indicative of a change in electrostatic capacity synchronized with the carrier signal to thereby detect an angular velocity. Here, the frequency of the drive signal and the frequency of the carrier signal are set so as to be generated at such a frequency ratio that a higher harmonic of the drive signal multiplied by an odd number does not the displacement modulation signal.
摘要翻译：本发明的目的在于提供一种角速度检测装置，其能够通过浮动能力降低驱动电极与第一位移检测电极之间的耦合效果，成本低。在角速度检测装置中，振动体21可以在彼此正交的第一方向和第二方向上移位。振动体21通过与由无干扰信号发生器1产生的驱动信号相对应的静电力在第一方向上振荡。由非干扰信号发生器1产生的载波信号被施加到振荡体21.A 第一位移检测电路3和第二位移检测电路4各自检测振荡体21的位移，作为指示与载波信号同步的静电电容的变化的位移调制信号，从而检测角速度。这里，驱动信号的频率和载波信号的频率被设定为以使得驱动信号乘以奇数的高次谐波不是位移调制信号的频率比来生成。

3. 发明申请

US20120105080A1 Electrostatic Capacitance Type Physical Quantity Sensor and Angular Velocity Sensor 有权
标题翻译：静电电容式物理量传感器和角速度传感器
公开(公告)号：US20120105080A1
公开(公告)日：2012-05-03
申请号：US13382395
申请日：2010-07-15
申请人： Hiroshi Iwasawa , Masahiro Matsumoto , Toshiaki Nakamura
发明人： Hiroshi Iwasawa , Masahiro Matsumoto , Toshiaki Nakamura
IPC分类号： G01R27/26
CPC分类号： G01P15/125 , G01C19/5726 , G01D3/028 , G01D5/24 , G01P15/0802
摘要： The present invention provides a high-accuracy electrostatic capacitance type physical quantity sensor and angular velocity sensor configured so as to be capable of suppressing noise derived from internal noise while maintaining resistance to externally-incoming noise. A detection element 10 has a movable mass 18 supported displaceably by a physical quantity given from the outside, and a detection electrode Ef. A shield wire 16 is disposed around wirings connected to the input of a capacitance detection circuit 30 and is connected to a dc potential of low impedance. A value Cin of an input capacitance relative to a fixed potential of low impedance at a portion at which the detection element 10 is connected with the capacitance detection circuit 30 is set to fall within a range of 1.5 pF
摘要翻译：本发明提供了一种高精度静电电容型物理量传感器和角速度传感器，其被配置为能够抑制由内部噪声产生的噪声，同时保持对外来噪声的抵抗。检测元件10具有通过从外部给出的物理量可移动地支撑的可移动质量块18和检测电极Ef。屏蔽线16设置在连接到电容检测电路30的输入端的布线周围，并连接到低阻抗的直流电位。将检测元件10与电容检测电路30连接的部分处的输入电容相对于低阻抗的固定电位的值Cin设定为1.5pF

4. 发明申请

US20110056291A1 Angular Velocity Detecting Apparatus 审中-公开
标题翻译：角速度检测装置
公开(公告)号：US20110056291A1
公开(公告)日：2011-03-10
申请号：US12830115
申请日：2010-07-02
申请人： Toshiaki NAKAMURA , Masahiro Matsumoto , Satoshi Asano , Hiroshi Iwasawa
发明人： Toshiaki NAKAMURA , Masahiro Matsumoto , Satoshi Asano , Hiroshi Iwasawa
IPC分类号： G01C19/56
CPC分类号： G01C19/5719
摘要： An angular-velocity detecting apparatus including a synchronous-detection unit for performing the synchronous detection of a displacement signal from a vibrator, a unit for changing a voltage value so that the output of the synchronous-detection unit always becomes equal to its maximum value, the voltage value being applied to a resonant-frequency adjusting electrode, and a unit for feeding back the output of the voltage-value changing unit to the resonant-frequency adjusting electrode in a detection-axis direction.
摘要翻译：一种角速度检测装置，包括用于执行来自振动器的位移信号的同步检测的同步检测单元，用于改变电压值的单元，使得同步检测单元的输出总是等于其最大值，施加到谐振频率调节电极的电压值和用于将检测轴方向上的电压值变更单元的输出反馈到谐振频率调节电极的单元。

5. 发明申请

US20110260740A1 Angular Velocity Detection Device 有权
标题翻译：角速度检测装置
公开(公告)号：US20110260740A1
公开(公告)日：2011-10-27
申请号：US13129927
申请日：2009-11-24
申请人： Hiroshi Iwasawa , Toshiaki Nakamura , Masahiro Matsumoto
发明人： Hiroshi Iwasawa , Toshiaki Nakamura , Masahiro Matsumoto
IPC分类号： G01R27/26
CPC分类号： G01C19/5776
摘要： The present invention aims to provide an angular velocity detection device which is capable of reducing the effect of coupling between a drive electrode and a first displacement detection electrode by a floating capacity, and is low in cost. In the angular velocity detection device, an oscillating body 21 is displaceable in a first direction and a second direction which orthogonally intersect each other. The oscillating body 21 is oscillated in the first direction by an electrostatic force corresponding to a drive signal generated by a non-interference signal generator 1. A carrier signal generated by the non-interference signal generator 1 is applied to the oscillating body 21. A first displacement detection circuit 3 and a second displacement detection circuit 4 each detect a displacement of the oscillating body 21 as a displacement modulation signal indicative of a change in electrostatic capacity synchronized with the carrier signal to thereby detect an angular velocity. Here, the frequency of the drive signal and the frequency of the carrier signal are set so as to be generated at such a frequency ratio that a higher harmonic of the drive signal multiplied by an odd number does not the displacement modulation signal.
摘要翻译：本发明的目的在于提供一种角速度检测装置，其能够通过浮动能力降低驱动电极与第一位移检测电极之间的耦合效果，成本低廉。在角速度检测装置中，振动体21可以在彼此正交的第一方向和第二方向上移位。振动体21通过与由无干扰信号发生器1产生的驱动信号相对应的静电力在第一方向上振荡。由非干扰信号发生器1产生的载波信号被施加到振荡体21.A 第一位移检测电路3和第二位移检测电路4各自检测振荡体21的位移，作为指示与载波信号同步的静电电容的变化的位移调制信号，从而检测角速度。这里，驱动信号的频率和载波信号的频率被设定为以使得驱动信号乘以奇数的高次谐波不是位移调制信号的频率比来生成。

6. 发明申请

US20110238363A1 Apparatus for Detecting Angular Velocity and Acceleration 审中-公开
标题翻译：用于检测角速度和加速度的装置
公开(公告)号：US20110238363A1
公开(公告)日：2011-09-29
申请号：US13030079
申请日：2011-02-17
申请人： Toshiaki NAKAMURA , Masahiro Matsumoto , Satoshi Asano
发明人： Toshiaki NAKAMURA , Masahiro Matsumoto , Satoshi Asano
IPC分类号： G01C19/56
CPC分类号： G01P21/00 , G01C19/56 , G01C19/5776 , G01C25/00 , G01P15/08 , G01P15/18
摘要： An apparatus for detecting angular velocity and acceleration having diagnosing units for diagnosing the function of detecting angular velocity; diagnosing units for diagnosing the function of detecting acceleration; a diagnosing unit for a DSP or a MPU; multiple ROMs storing the same data; a diagnosing unit for the ROMs; a diagnosing unit for a RAM; a unit for outputting the outputs of the angular velocity sensor, the acceleration sensor and the results of diagnoses all together in response to an output command from an external device; and a unit for sending error detection codes along with the sensor outputs and the result of diagnoses when the sensor outputs and the results of diagnoses are outputted together.
摘要翻译：一种用于检测角速度和加速度的装置，具有用于诊断检测角速度的功能的诊断单元; 诊断加速度检测功能诊断单元; 用于DSP或MPU的诊断单元; 存储相同数据的多个ROM; ROM的诊断单元; 用于RAM的诊断单元; 响应于来自外部设备的输出命令，输出角速度传感器，加速度传感器的输出和所有诊断结果的单元; 以及用于发送错误检测码以及传感器输出以及传感器输出时的诊断结果和诊断结果一起输出的单元。

7. 发明授权

US08113051B2 Angular velocity measuring device 有权
标题翻译：角速度测量装置
公开(公告)号：US08113051B2
公开(公告)日：2012-02-14
申请号：US12389056
申请日：2009-02-19
申请人： Masahiro Matsumoto , Yasushi Okada , Toshiaki Nakamura
发明人： Masahiro Matsumoto , Yasushi Okada , Toshiaki Nakamura
IPC分类号： G01P3/44
CPC分类号： G01C19/56 , G01C19/5719 , G01C19/5726
摘要： An oscillator is oscillated at a predetermined oscillation frequency. A detecting unit exerts Coriolis force on the oscillator. A repetitive control system applies an external force to the oscillator so as to cancel out the Coriolis force to achieve an angular velocity measuring operation at a high sensitivity and a high S/N ratio.
摘要翻译：振荡器以预定的振荡频率振荡。检测单元对振荡器施加科里奥利力。重复控制系统向振荡器施加外力，以抵消科里奥利力，以实现高灵敏度和高S / N比的角速度测量操作。

8. 发明申请

US20100132462A1 Angular Velocity Detecting Apparatus 审中-公开
标题翻译：角速度检测装置
公开(公告)号：US20100132462A1
公开(公告)日：2010-06-03
申请号：US12625142
申请日：2009-11-24
申请人： Toshiaki Nakamura , Masahiro Matsumoto
发明人： Toshiaki Nakamura , Masahiro Matsumoto
IPC分类号： G01C19/56 , G01P3/00
CPC分类号： G01C19/56
摘要： An angular velocity detecting apparatus including one synchronous detection unit alternately detecting synchronously a displacement signal from a vibrating body with a plurality of synchronous detection signals; one integral calculation unit alternately carrying out integral calculations of a plurality of outputs of the synchronous detection unit; a unit alternately multiplying a plurality of AC signals with two outputs obtained with the synchronous detection unit; a unit adding the two multiplied outputs; and a unit feeding back the output of the addition unit to vibrating body.
摘要翻译：一种角速度检测装置，包括：一个同步检测单元，其利用多个同步检测信号同时交替地检测来自振动体的位移信号; 一个积分计算单元交替执行同步检测单元的多个输出的积分计算; 一个单元交替地将多个AC信号与由同步检测单元获得的两个输出相乘; 一个单位加上两个相乘的输出; 以及将加法单元的输出反馈到振动体的单元。

9. 发明授权

US08813556B2 Intake temperature sensor 有权
标题翻译：进气温度传感器
公开(公告)号：US08813556B2
公开(公告)日：2014-08-26
申请号：US13337398
申请日：2011-12-27
申请人： Masahiro Matsumoto , Hiroshi Nakano , Keiji Hanzawa , Satoshi Asano
发明人： Masahiro Matsumoto , Hiroshi Nakano , Keiji Hanzawa , Satoshi Asano
IPC分类号： G01F1/68
CPC分类号： G01K13/02 , G01F1/6842 , G01F5/00 , G01F15/185 , G01K1/16 , G01K2205/02
摘要： An intake temperature sensor capable of precisely detecting the temperature of intake at high speed even in a low air mass flow zone is provided. In an intake temperature sensor having a temperature detecting element 6 inserted in an opening provided in an intake pipe 3 to be disposed in the intake pipe, a temperature detecting element is mechanically joined with a heat sink 4 directly exposed to the flow of the intake flowing in the intake pipe, and the temperature of the intake is output based on an output obtained from the temperature detecting element. Thus, the thermal resistance of the temperature detecting element with respect to the intake flow can be reduced; therefore, the intake temperature sensor capable of precisely detecting the temperature of the intake at high speed even in the low air mass flow zone can be provided.
摘要翻译：提供了即使在低空气质量流量区域也能够高精度地检测进气温度的进气温度传感器。在具有插入到设置在进气管3内的进气管3中的开口中的温度检测元件6的进气温度传感器中，温度检测元件与直接暴露于进气流动的散热器4机械接合在进气管中，并且基于从温度检测元件获得的输出来输出进气温度。因此，可以降低温度检测元件相对于进气流的热阻; 因此，即使在低空气质量流量区域中也能够高精度地检测进气温度的进气温度传感器。

10. 发明申请

US20140159174A1 FLOWMETER 有权
标题翻译：流量计
公开(公告)号：US20140159174A1
公开(公告)日：2014-06-12
申请号：US14131125
申请日：2011-07-13
申请人： Masahiro Matsumoto , Hiroshi Nakano , Keiji Hanzawa , Satoshi Asano
发明人： Masahiro Matsumoto , Hiroshi Nakano , Keiji Hanzawa , Satoshi Asano
IPC分类号： G01F1/34
CPC分类号： G01F1/34 , G01F1/6845 , G01F1/692 , H01L2224/48247
摘要： A flowmeter that improves a corrosion resistance is provided.The flowmeter includes a silicon substrate having a diaphragm where a heater is formed, an aluminum pad formed on a silicon substrate, an organic protective film laminated on the silicon substrate, and a mold resin that covers the silicon substrate. The diaphragm has an exposed portion exposed from the organic protective film, an adhesion surface high in adhesion property to the mold resin is laminated on the silicon substrate, and an adhesion film of the mold resin to the adhesion film is provided between the exposed portion and the aluminum pad.
摘要翻译：提供了提高耐腐蚀性的流量计。流量计包括具有形成有加热器的隔膜的硅基板，形成在硅基板上的铝焊盘，层叠在硅基板上的有机保护膜，以及覆盖硅基板的模制树脂。隔膜具有从有机保护膜露出的露出部分，将与模制树脂粘附性高的粘合表面层合在硅基板上，并且将模制树脂与粘合膜的粘合膜设置在暴露部分和铝垫。

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