会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 3. 发明授权
    • Electrostatic chuck
    • 静电吸盘
    • US08411408B2
    • 2013-04-02
    • US13062427
    • 2009-09-14
    • Yoshiaki TatsumiHiroshi Fujisawa
    • Yoshiaki TatsumiHiroshi Fujisawa
    • H01L21/687
    • H01L21/6833
    • Provided is an electrostatic chuck (8) of self power supply type, which is capable of supplying power while generating power to be used by an attraction electrode (3) during processing of a substrate. The electrostatic chuck (8) attracts and holds a substrate in a substrate processing apparatus (11) that processes the substrate while generating optical energy. The electrostatic chuck (8) includes: an electrode sheet (5) including an attraction electrode (3); a metal base (1) having the electrode sheet (5) laminated on an upper surface side thereof; an internal power supply for obtaining power to be supplied to the attraction electrode (3); and a voltage boost circuit (7) for boosting voltage of the power obtained by the internal power supply. The internal power supply includes a solar cell (6), and converts the optical energy into the power during the processing of the substrate, to thereby cause the electrode sheet (5) to attract and hold the substrate.
    • 提供一种自供电型静电卡盘(8),其能够在基板的加工过程中产生吸引电极(3)使用的电力的同时供电。 静电吸盘(8)吸引并保持基板处理装置(11),该基板处理装置(11)在产生光能的同时处理基板。 静电吸盘(8)包括:包括吸引电极(3)的电极片(5); 具有层叠在其上表面侧的电极片(5)的金属基体(1) 用于获得供给到所述吸引电极(3)的电力的内部电源; 以及用于升压由内部电源获得的电力的电压的升压电路(7)。 内部电源包括太阳能电池(6),并且在基板的处理期间将光能转换成电力,从而使电极片(5)吸引并保持基板。
    • 4. 发明授权
    • Bipolar electrostatic chuck
    • 双极静电吸盘
    • US08238072B2
    • 2012-08-07
    • US12691613
    • 2010-01-21
    • Hiroshi FujisawaKinya Miyashita
    • Hiroshi FujisawaKinya Miyashita
    • H01L21/683
    • H01L21/6833H02N13/00
    • A bipolar electrostatic chuck which has excellent dielectric breakdown strength and provides excellent attracting performance. The bipolar electrostatic chuck eliminates difficulty in dismounting a sample from a sample attracting plane as much as possible after application of a voltage to electrodes is finished. The bipolar electrostatic chuck is provided with a first electrode and a second electrode in an insulator and permits a surface of the insulator to be the sample attracting plane. The insulator has the first electrode, an interelectrode insulating layer and the second electrode in this order from the sample attracting plane in the depth direction. The second electrode has a region not overlapping with the first electrode in a normal line direction of the sample attracting plane.
    • 一种双极性静电卡盘,具有优良的介电击穿强度,并具有优良的吸引性能。 双极静电卡盘消除了在对电极施加电压完成之后尽可能多地从样品吸附面上拆下样品的困难。 双极静电卡盘在绝缘体中设置有第一电极和第二电极,并且允许绝缘体的表面成为样品吸引平面。 绝缘体在深度方向上从样品吸引面起依次具有第一电极,电极间绝缘层和第二电极。 第二电极在样品吸引面的法线方向上具有与第一电极不重叠的区域。
    • 5. 发明申请
    • BIPOLAR ELECTROSTATIC CHUCK
    • 双极静电卡
    • US20110102965A1
    • 2011-05-05
    • US12997826
    • 2009-06-30
    • Hiroshi FujisawaYoshiaki Tatsumi
    • Hiroshi FujisawaYoshiaki Tatsumi
    • H01L21/683
    • H02N13/00H01L21/6833
    • Provided is a bipolar electrostatic chuck, which has excellent substrate attracting/holding performance when a voltage is applied, and excellent residual charges reducing performance when voltage application is stopped. The bipolar electrostatic chuck includes at least an electrode layer including a first electrode and a second electrode, and an upper insulating layer which forms a substrate attracting surface for attracting a substrate. In a case where a surface of the electrode layer is regarded to be divided into a plurality of virtual cells having a predetermined width (L) in an x direction and a y direction, first electrode sections forming the first electrode and second electrode sections forming the second electrode are alternately arranged in the plurality of virtual cells in the x direction, and are alternately arranged in the plurality of virtual cells in the y direction.
    • 提供一种双极性静电卡盘,其在施加电压时具有优异的基板吸附/保持性能,并且在施加电压时停止优异的残留电荷降低性能。 双极性静电卡盘至少包括具有第一电极和第二电极的电极层,以及形成用于吸引基板的基板吸附面的上部绝缘层。 在电极层的表面被认为在x方向和ay方向上被划分为具有预定宽度(L)的多个虚拟单元的情况下,形成第一电极的第一电极部分和形成第二电极部分的第二电极部分 电极在x方向上交替排列在多个虚拟单元中,并且在y方向上交替配置在多个虚拟单元中。