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    • 7. 发明授权
    • Method for manufacturing semiconductor device
    • 制造半导体器件的方法
    • US08207014B2
    • 2012-06-26
    • US12826021
    • 2010-06-29
    • Toshinari SasakiJunichiro SakataHiroki OharaShunpei Yamazaki
    • Toshinari SasakiJunichiro SakataHiroki OharaShunpei Yamazaki
    • H01L21/00
    • H01L21/477H01L21/02565H01L21/02664H01L21/383H01L21/46H01L27/1225H01L29/66969H01L29/7869H01L29/78693
    • An object is to manufacture a highly reliable semiconductor device including a thin film transistor with stable electric characteristics. In a method for manufacturing a semiconductor device including a thin film transistor in which an oxide semiconductor film is used for a semiconductor layer including a channel formation region, heat treatment (for dehydration or dehydrogenation) is performed to improve the purity of the oxide semiconductor film and reduce impurities including moisture or the like. After that, slow cooling is performed under an oxygen atmosphere. Besides impurities including moisture or the like exiting in the oxide semiconductor film, heat treatment causes reduction of impurities including moisture or the like exiting in a gate insulating layer and those in interfaces between the oxide semiconductor film and films which are provided over and below the oxide semiconductor and in contact therewith.
    • 本发明的目的是制造具有稳定电特性的薄膜晶体管的高度可靠的半导体器件。 在包括使用氧化物半导体膜用于包括沟道形成区域的半导体层的薄膜晶体管的半导体器件的制造方法中,进行热处理(脱水或脱氢)以提高氧化物半导体膜的纯度 并减少杂质,包括水分等。 之后,在氧气氛下进行缓慢冷却。 除了在氧化物半导体膜中排出的含有水分等的杂质以外,热处理会导致在栅极绝缘层中退出的杂质,包括氧化物半导体膜和膜之间的界面中的杂质,氧化物半导体膜和氧化物之间和之下的界面 半导体并与其接触。