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    • 1. 发明申请
    • Cleaning apparatus and cleaning method
    • 清洁装置和清洁方法
    • US20070227563A1
    • 2007-10-04
    • US11732466
    • 2007-04-02
    • Hirokazu YamamotoAkiko HashiYoshio YamamotoKatsuhiro Ota
    • Hirokazu YamamotoAkiko HashiYoshio YamamotoKatsuhiro Ota
    • B08B3/00B08B3/12
    • B08B3/12
    • Embodiments in accordance with the present invention provide straightening plates at the upstream side of a cleaning tank and a straightening plate at the downstream side of the object to be cleaned. Apertures are arranged in the planes of the respective straightening plates. An aperture ratio of the upstream straightening plates is set larger than the ratio of the downstream straightening plate. For example, the aperture ratio of the upstream straightening plate may be set at a value between 10% and 25%, and the aperture ratio of the downstream straightening plate is set at a value between 2.5% and 10%. With this, the flow of liquid in the cleaning chamber sandwiched between the upstream and downstream straightening plates can be brought to a pseudo-laminar flow. Contaminants separated from the object to be cleaned are moved quickly to the discharge chamber and are removed by a filter.
    • 根据本发明的实施例在清洁罐的上游侧提供矫直板,并且在待清洁物体的下游侧设有矫直板。 孔径布置在各矫直板的平面内。 上游矫直板的开口率设定为比下游矫直板的比例大。 例如,可以将上游整流板的开口率设定为10%〜25%的值,将下游矫直板的开口率设定为2.5%〜10%的值。 由此,夹在上游和下游矫直板之间的清洁室中的液体流可以变成假层流。 与待清洁物体分离的污染物被快速移动到排出室,并通过过滤器去除。