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1. 发明授权

US5159951A Mass flow controller 失效
标题翻译：质量流量控制器
公开(公告)号：US5159951A
公开(公告)日：1992-11-03
申请号：US776026
申请日：1991-10-15
申请人： Hirofumi Ono , Tatsuhiko Furukado
发明人： Hirofumi Ono , Tatsuhiko Furukado
IPC分类号： G01F1/684 , G01F5/00 , G05D7/06
CPC分类号： G01F1/6847 , G01F1/6842 , G01F5/00 , G05D7/0635 , Y10T137/7759 , Y10T137/7761 , Y10T137/87338
摘要： A mass flow controller having a bypass portion provided in a body through which a large amount of gas is passed and a sensor portion, laid between a primary chamber which is an inlet of the bypass portion and a secondary chamber which is an outlet of the bypass portion, through which gas flows at a small flow rate proportional to the flow rate of the gas passed through the bypass portion and capable of measuring the total flow rate of gas by measuring the flow rate in the sensor portion. The body is partitioned by a bulkhead into a primary chamber and a secondary chamber. The primary chamber is provided with an inlet for gas inflow and the secondary chamber is provided with an outlet for gas outflow. The bulkhead is provided with a plurality of through holes for connecting the primary chamber to the secondary chamber, and bypass elements selected depending on the flow rate in the bypass portion are fitted in the through holes in the bulkhead. Expansion plugs are fitted in the through holes in which no bypass elements are fitted not to cause gas to flow.
摘要翻译：一种质量流量控制器，其具有设置在主体中的旁路部分，通过该主体通过大量气体，传感器部分布置在作为旁路部分的入口的主室和作为旁路出口的次室之间气体以与流过旁路部分的气体的流量成比例的小流量流动，并且能够通过测量传感器部分中的流量来测量气体的总流量。主体通过隔板分隔成主室和次室。主室设置有用于气体流入的入口，并且第二室设置有用于气体流出的出口。隔板设置有用于将主室连接到副室的多个通孔，并且根据旁路部分中的流量选择的旁路元件装配在隔板中的通孔中。膨胀塞安装在通孔中，其中不安装旁路元件，不会导致气体流动。

2. 发明授权

US5080131A Mass flow controller 失效
公开(公告)号：US5080131A
公开(公告)日：1992-01-14
申请号：US579521
申请日：1990-09-10
申请人： Hirofumi Ono , Tatsuhiko Furukado
发明人： Hirofumi Ono , Tatsuhiko Furukado
IPC分类号： G01F1/684 , G01F5/00 , G05D7/06
CPC分类号： G01F1/6847 , G01F1/6842 , G01F5/00 , G05D7/0635 , Y10T137/7759 , Y10T137/7761 , Y10T137/87338
摘要： A mass flow controller having a bypass portion provided in a body through which a large amount of gas is passed and a sensor portion, laid between a primary chamber which is an inlet of the bypass portion and a secondary chamber which is an outlet of the bypass portion, through which gas flows at a small flow rate proportional to the flow rate of the gas passed through the bypass portion and capable of measuring the total flow rate of gas by measuring the flow rate in the sensor portion. The body is partitioned by a bulkhead into a primary chamber and a secondary chamber. The primary chamber is provided with an inlet for gas inflow and the secondary chamber is provided with an outlet for gas outflow. The bulkhead is provided with a plurality of through holes for connecting the primary chamber to the secondary chamber, and bypass elements selected depending on the flow rate in the bypass portion are fitted in the through holes in the bulkhead. Expansion plugs are fitted in the through holes in which no bypass elements are fitted not to cause gas to flow.

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