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    • 5. 发明授权
    • Method of manufacturing an ink-jet printhead
    • 制造喷墨打印头的方法
    • US07100254B2
    • 2006-09-05
    • US09994010
    • 2002-01-23
    • Toru TanikawaHiroshi TokunagaShota Nishi
    • Toru TanikawaHiroshi TokunagaShota Nishi
    • H04R17/10H05K3/10
    • B41J2/1643B41J2/14209B41J2/1609B41J2/1623B41J2/1626B41J2/1631B41J2/1632B41J2/164B41J2/1642B41J2/1646B41J2002/14225B41J2002/14258B41J2002/14387Y10T29/42Y10T29/49004Y10T29/49155Y10T29/49401
    • A method of manufacturing a piezoelectric actuator, formed of multiple concave parts which are provided on one surface. First, a first sheet is formed of pliant piezoelectric materials and a second sheet is formed of pliant predetermined materials, forming an upper electrode layer formed of conduction materials on one surface of said first sheet, and forming a lower electrode layer formed of conduction materials on the other surface of said first sheet or one surface of said second sheet, wherein piezoelectric material is used as said material of the second sheet and electrode layer for polarization formed of conduction material is formed on the other surface side of said second sheet. Next, the first and second sheets are piled and densified. The first sheet is polarized in a direction of a thickness of the first sheet. In a fourth step, the upper electrode layer is patterned in order to form multiple electrodes corresponding respectively to each pressure chamber of the pressure chamber forming unit, wherein by placing a voltage between the upper electrode layer and the electrode layer for polarization, the first sheet is polarized in the direction of its thickness.
    • 一种制造压电致动器的方法,该压电致动器由设置在一个表面上的多个凹部构成。 首先,第一片材由柔性压电材料形成,第二片材由普通的预定材料形成,在所述第一片的一个表面上形成由导电材料形成的上电极层,并且形成由导电材料形成的下电极层 所述第一片材的另一表面或所述第二片材的一个表面,其中使用压电材料作为所述第二片材的材料,并且在所述第二片材的另一表面侧上形成由导电材料形成的极化电极层。 接下来,第一和第二片材被堆积和致密化。 第一片在第一片的厚度方向上极化。 在第四步骤中,图案化上电极层以形成分别对应于压力室形成单元的每个压力室的多个电极,其中通过在上电极层和极化电极层之间放置电压,第一片 在其厚度方向上极化。