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1. 发明申请

US20100265519A1 DISPLACEMENT SENSOR 有权
标题翻译：位移传感器
公开(公告)号：US20100265519A1
公开(公告)日：2010-10-21
申请号：US12712012
申请日：2010-02-24
申请人： Hiroaki TAKIMASA , Takahiro Suga , Yoshihiro Yamashita
发明人： Hiroaki TAKIMASA , Takahiro Suga , Yoshihiro Yamashita
IPC分类号： G01B11/14
CPC分类号： G01B11/0608 , G02B27/0911 , G02B27/0955
摘要： A displacement is accurately measured at high speed to a measurement object having various surface states. In a displacement sensor including a confocal optical system in which an objective lens is moved along an optical axis, light emitted from a laser diode is formed into a slit beam by a cylindrical lens, a Y-axis side orthogonal to the optical axis is narrowed such that the light is collected on a surface of a measurement object, and an X-axis orthogonal to the optical axis is elongated in order to average a component of the light reflected from the surface. A photodiode receives the light reflected from the surface of the measurement object through an opening disposed in a position of conjugation with the laser diode. The opening is formed into a slit shape that is short in the Y-axis while being long in the X-axis. The displacement of the surface is measured from a position of the objective lens when a light receiving signal becomes the maximum.
摘要翻译：高精度地测量到具有各种表面状态的测量对象。在包括物镜沿着光轴移动的共焦光学系统的位移传感器中，从激光二极管发出的光通过柱面透镜形成为狭缝光束，与光轴正交的Y轴侧变窄使得光被收集在测量对象的表面上，并且与光轴正交的X轴被拉长以便平均从表面反射的光的分量。光电二极管通过设置在与激光二极管共轭的位置的开口接收从测量对象表面反射的光。该开口形成为在X轴上长而在Y轴上短的狭缝形状。当光接收信号变为最大值时，从物镜的位置测量表面的位移。

2. 发明申请

US20100232650A1 MEASUREMENT APPARATUS 有权
标题翻译：测量装置
公开(公告)号：US20100232650A1
公开(公告)日：2010-09-16
申请号：US12712530
申请日：2010-02-25
申请人： Yoshihiro KANETANI , Takahiro SUGA , Hiroaki TAKIMASA , Naoya NAKASHITA , Yusuke IIDA
发明人： Yoshihiro KANETANI , Takahiro SUGA , Hiroaki TAKIMASA , Naoya NAKASHITA , Yusuke IIDA
IPC分类号： G06K9/62
CPC分类号： G01B11/0608 , G01B11/14 , G02B7/38
摘要： In a measurement apparatus, higher-quality measurement is realized in measurement of measurement object displacement or imaging of a two-dimensional image. In a controller, a light receiving signal of a photodiode is supplied to a displacement measuring unit of a sensor head in order to measure a height of a measurement object, and the height of a surface of the measurement object is measured based on the light receiving signal. Then, in the controller, image obtaining timing is determined based on the height of the measurement object. Specifically, a focus adjustment value corresponding to the computed height of the measurement object is obtained from the table, and an image obtaining signal is transmitted to an imaging device at the timing the focus adjustment value is realized. Therefore, a length between two points on the measurement object is computed from the thus obtained image based on the height of the measurement object.
摘要翻译：在测量装置中，在测量对象位移或二维图像的成像的测量中实现更高质量的测量。在控制器中，将光电二极管的光接收信号提供给传感器头的位移测量单元，以便测量测量对象的高度，并且基于光接收来测量测量对象的表面的高度信号。然后，在控制器中，基于测量对象的高度来确定图像获取定时。具体地，从表中获得与测量对象的计算高度对应的焦点调整值，并且在实现焦点调整值的定时将图像获取信号发送到成像装置。因此，基于测量对象的高度，从由此获得的图像计算测量对象上两点之间的长度。

3. 发明申请

US20120303317A1 DISPLACEMENT SENSOR 有权
标题翻译：位移传感器
公开(公告)号：US20120303317A1
公开(公告)日：2012-11-29
申请号：US13495478
申请日：2012-06-13
申请人： Hiroaki TAKIMASA , Yusuke IIDA , Hideyoshi NAKAMURA , Hoshibumi ICHIYANAGI
发明人： Hiroaki TAKIMASA , Yusuke IIDA , Hideyoshi NAKAMURA , Hoshibumi ICHIYANAGI
IPC分类号： G06F15/00
CPC分类号： G01B11/026 , G01B21/045 , G01C3/06 , G01C25/00 , G01S17/48 , G06F11/0736 , G06F11/076
摘要： Teaching processing using a model of a workpiece is performed by accepting at least one input of a target value for a response time and a tolerance value for a detection error as a parameter representing a condition for a displacement sensor to operate. A CPU during teaching processing determines a maximum exposure time while it causes repeated detection processing by a light projecting unit and a light receiving unit, calculates variation in measurement data of an amount of displacement, and derives the number of pieces of data of moving average calculation suitable for a value for the input parameter as a result of operation processing using the maximum exposure time and variation in measurement data. This number of pieces of data is registered in a memory and used for moving average calculation in a normal operation mode.
摘要翻译：通过接受用于响应时间的目标值的至少一个输入和用于检测误差的容差值作为表示位移传感器操作的条件的参数来执行使用工件模型的教学处理。教学处理期间的CPU在通过光投射单元和光接收单元进行重复检测处理的同时确定最大曝光时间，计算位移量的测量数据的变化，并导出移动平均计算数据的数量适合作为使用最大曝光时间和测量数据的变化的操作处理的结果的输入参数的值。该数量的数据被登记在存储器中，并用于在正常操作模式下的移动平均计算。

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