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    • 8. 发明授权
    • Dummy wafer
    • 虚拟晶圆
    • US6150023A
    • 2000-11-21
    • US637496
    • 1996-04-25
    • Tatsuhiro YasakaTakashi NishizawaKazuo MuramatsuTsutomu Watanabe
    • Tatsuhiro YasakaTakashi NishizawaKazuo MuramatsuTsutomu Watanabe
    • C04B35/52C01B31/02H01L21/02H01L21/66H01L23/544B32B9/00
    • H01L22/34Y10T428/24942Y10T428/30
    • The present invention provides a test dummy wafer used in the process for manufacturing a semiconductor device, which has more excellent etching resistance than a silicon wafer, and excellent mirror surface properties and evenness required for a substrate, and which causes no contamination source in the manufacturing process. The dummy wafer is composed of glassy carbon, and at least one side thereof is preferably polished to a mirror surface having a surface roughness Ra of not more than 0.005 .mu.m. The dummy wafer of the present invention has excellent characteristics as a dummy wafer for monitoring the thickness of a CVD film. The dummy wafer having specific electric resistance of not more than 0.1 .OMEGA..multidot.cm exhibits excellent characteristics as a dummy wafer for monitoring the thickness of a film formed by sputtering and confirming cleanliness.
    • 本发明提供了一种用于制造半导体器件的方法的测试虚拟晶片,其具有比硅晶片更好的耐蚀刻性,以及基板所需的优异的镜面性质和均匀性,并且在制造中不产生污染源 处理。 伪晶片由玻璃碳组成,其至少一侧优选抛光至表面粗糙度Ra不大于0.005μm的镜面。 本发明的虚设晶片作为用于监测CVD膜的厚度的虚设晶片具有优异的特性。 具有不大于0.1欧姆·厘米的比电阻的伪晶片作为用于监测由溅射形成的膜的厚度并确认清洁度的虚拟晶片表现出优异的特性。
    • 9. 发明授权
    • Transaxle
    • 传动桥
    • US08939861B2
    • 2015-01-27
    • US13648909
    • 2012-10-10
    • Fumitoshi IshinoEtsuo MiyakeTakashi Nishizawa
    • Fumitoshi IshinoEtsuo MiyakeTakashi Nishizawa
    • F16H15/10B60K17/16B60K17/04
    • B60K17/16B60K17/046
    • A transaxle comprises a transmission differential unit including a frictional transmission mechanism and a differential mechanism. The frictional transmission mechanism includes an input shaft, a drive disc provided on the input shaft, and a driven disc whose outer peripheral edge frictionally contacts a disc surface of the drive disc. The differential mechanism includes a pair of coaxial output shafts, and a differential casing differentially connecting the output shafts to each other. The driven disc is ring-shaped and is fitted at an inner peripheral portion thereof on an outer peripheral portion of the differential casing so as to be unrotatable relative to the differential casing and so as to be slidable on the outer peripheral portion of the differential casing in the axial direction of the output shafts.
    • 变速驱动桥包括包括摩擦传动机构和差动机构的传动差动单元。 摩擦传动机构包括输入轴,设置在输入轴上的驱动盘和外周缘摩擦地接触驱动盘的盘表面的从动盘。 差速机构包括一对同轴输出轴和差动外壳,该差速器壳体将输出轴彼此差分地连接。 被驱动盘是环形的,并且在其内周部分配合在差速器壳体的外周部分上,以便相对于差速器壳体不能旋转,并且能够在差速器壳体的外周部分上滑动 在输出轴的轴向上。