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    • 3. 发明授权
    • Liquid crystal display thin film transistor array with redundant film
formed over a contact hole and method of fabricating the same
    • 具有在接触孔上形成的冗余膜的液晶显示薄膜晶体管阵列及其制造方法
    • US5929947A
    • 1999-07-27
    • US168085
    • 1998-10-08
    • Masatoshi Tani
    • Masatoshi Tani
    • G02F1/136G02F1/1362G02F1/1368H01L29/786
    • G02F1/1362
    • A liquid crystal display thin film transistor array includes gate bus lines, drain bus lines electrically isolated from the gate bus lines by a first insulating film, a thin film transistor arranged near the intersection of the gate bus line and the drain bus line, and a pixel electrode made of a transparent conductive film. The thin film transistor includes a gate electrode, a drain electrode, and a source electrode. The pixel electrode is electrically isolated from the drain electrode and the drain bus line by a second insulating film. A contact hole for electrically connecting to the drain bus line is formed in the second insulating film stacked on the drain bus line in a region including the intersection of the gate bus line and the drain bus line. An interconnection redundant film made of the same transparent conductive film as the pixel electrode is formed on the second insulating film so as to cover the contact hole. A method of fabricating this array is also disclosed.
    • 液晶显示薄膜晶体管阵列包括栅极总线,通过第一绝缘膜与栅极总线线路隔离的漏极总线,设置在栅极总线和漏极总线附近的薄膜晶体管,以及 像素电极由透明导电膜制成。 薄膜晶体管包括栅电极,漏电极和源电极。 像素电极通过第二绝缘膜与漏电极和漏极母线电隔离。 用于电连接到漏极总线的接触孔形成在包括栅极总线和漏极总线的交叉点的区域中的堆叠在漏极总线上的第二绝缘膜中。 在第二绝缘膜上形成由与像素电极相同的透明导电膜制成的互连冗余膜以覆盖接触孔。 还公开了一种制造该阵列的方法。