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    • 2. 发明授权
    • Method of manufacturing semiconductor device including nonvolatile memory
    • 包括非易失性存储器的半导体器件的制造方法
    • US07115471B2
    • 2006-10-03
    • US10961084
    • 2004-10-12
    • Kazuyoshi ShinadaAkira Kimitsuka
    • Kazuyoshi ShinadaAkira Kimitsuka
    • H01L21/336
    • H01L27/11521H01L27/115H01L27/11524
    • There is provided a method of manufacturing a semiconductor device including a nonvolatile memory including forming an element isolation area surrounding an element area in a semiconductor substrate doped with a first type conductive impurity, forming a gate insulating film on the element area, forming selectively a cap film on the gate insulating film, burying selectively with a mask film surrounding the cap film on the gate insulating film, forming a tunnel window by removing selectively the cap film, forming an impurity diffusion layer in a surface region of the semiconductor substrate underneath the gate insulating film by introducing a second type conductive impurity using the mask film as a mask, removing the gate insulating film in the tunnel window, forming a tunnel insulating film in the tunnel window, forming a floating gate electrode film, an inter-gate electrode film, and a control gate electrode film on the tunnel insulating film, and forming a source-drain in the semiconductor substrate to interpose a surface region of the semiconductor substrate beneath the control gate electrode film by introducing the second type conductive impurity into the surface region using the control gate electrode film as a mask.
    • 提供一种制造包括非易失性存储器的半导体器件的方法,包括在掺杂有第一类型导电杂质的半导体衬底中形成围绕元件区域的元件隔离区域,在元件区域上形成栅极绝缘膜,选择性地形成帽 在栅极绝缘膜上形成膜,在栅极绝缘膜上选择性地掩盖围绕盖膜的掩模膜,通过选择性地去除盖膜形成隧道窗,在栅极下方的半导体衬底的表面区域中形成杂质扩散层 通过使用掩模膜作为掩模引入第二类导电杂质的绝缘膜,去除隧道窗中的栅极绝缘膜,在隧道窗中形成隧道绝缘膜,形成浮栅电极膜,栅极间电极膜 ,以及在隧道绝缘膜上的控制栅电极膜,并在半沟形成源极漏极 通过使用控制栅电极膜作为掩模将第二类导电杂质引入到表面区域中,将半导体衬底的表面区域设置在控制栅电极膜的下方。
    • 3. 发明申请
    • Method of manufacturing semiconductor device including nonvolatile memory
    • 包括非易失性存储器的半导体器件的制造方法
    • US20050136597A1
    • 2005-06-23
    • US10961084
    • 2004-10-12
    • Kazuyoshi ShinadaAkira Kimitsuka
    • Kazuyoshi ShinadaAkira Kimitsuka
    • H01L21/8247H01L21/336H01L27/115H01L29/788H01L29/792
    • H01L27/11521H01L27/115H01L27/11524
    • There is provided a method of manufacturing a semiconductor device including a nonvolatile memory including forming an element isolation area surrounding an element area in a semiconductor substrate doped with a first type conductive impurity, forming a gate insulating film on the element area, forming selectively a cap film on the gate insulating film, burying selectively with a mask film surrounding the cap film on the gate insulating film, forming a tunnel window by removing selectively the cap film, forming an impurity diffusion layer in a surface region of the semiconductor substrate underneath the gate insulating film by introducing a second type conductive impurity using the mask film as a mask, removing the gate insulating film in the tunnel window, forming a tunnel insulating film in the tunnel window, forming a floating gate electrode film, an inter-gate electrode film, and a control gate electrode film on the tunnel insulating film, and forming a source-drain in the semiconductor substrate to interpose a surface region of the semiconductor substrate beneath the control gate electrode film by introducing the second type conductive impurity into the surface region using the control gate electrode film as a mask.
    • 提供一种制造包括非易失性存储器的半导体器件的方法,包括在掺杂有第一类型导电杂质的半导体衬底中形成围绕元件区域的元件隔离区域,在元件区域上形成栅极绝缘膜,选择性地形成帽 在栅极绝缘膜上形成膜,在栅极绝缘膜上选择性地掩盖围绕盖膜的掩模膜,通过选择性地去除盖膜形成隧道窗,在栅极下方的半导体衬底的表面区域中形成杂质扩散层 通过使用掩模膜作为掩模引入第二类导电杂质的绝缘膜,去除隧道窗中的栅极绝缘膜,在隧道窗中形成隧道绝缘膜,形成浮栅电极膜,栅极间电极膜 ,以及在隧道绝缘膜上的控制栅电极膜,并在半沟形成源极漏极 通过使用控制栅电极膜作为掩模将第二类导电杂质引入到表面区域中,将半导体衬底的表面区域设置在控制栅电极膜的下方。