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1. 发明授权

US07428085B2 Method for producing hologram by pico-second laser 失效
标题翻译：通过微秒级激光产生全息图的方法
公开(公告)号：US07428085B2
公开(公告)日：2008-09-23
申请号：US10504634
申请日：2003-02-13
申请人： Hideo Hosono , Masahiro Hirano , Kenichi Kawamura , Taisuke Miura , Hayato Kamioka
发明人： Hideo Hosono , Masahiro Hirano , Kenichi Kawamura , Taisuke Miura , Hayato Kamioka
IPC分类号： G03H1/02
CPC分类号： G02B5/1857 , G02B17/023 , G03H1/0244 , G03H1/04 , G03H2001/0413 , G03H2001/0415 , G03H2001/0482 , G03H2001/0484 , G03H2001/0491 , G03H2222/33 , G03H2223/26 , G03H2240/24 , G03H2260/62 , G03H2270/13 , G03H2270/52
摘要： Disclosed is a method of producing a hologram through a two-beam laser interfering exposure process, which comprises emitting a coherent laser light with a pulse width (τ) ranging from greater than 900 femtoseconds to 100 picoseconds and a laser power of 10 μJ/pulse or more using a solid-state laser as a light source, dividing the pulses light from the laser into two beams, controlling the two beams temporally and spatially in such a manner that the two beam are converged on a surface of or inside a workpiece for recording a hologram while matching the respective converged spots of the two beams with one another temporally and spatially to create the interference therebetween so as to record a surface-relief hologram on the surface of the workpiece or an embedded hologram inside the workpiece in an irreversible manner. The present invention can solve a problem with a conventional process of recording a hologram in a non-photosensitive material in an irreversible manner using interfering femtosecond laser pulses, specifically, distortion in the waveforms of pulsed laser beams and resulting instability in recording of an embedded hologram due to a non-linear optical interaction between the femtosecond laser pulses and air/the material.
摘要翻译：公开了一种通过双光束激光干涉曝光工艺制造全息图的方法，其包括发射脉冲宽度（τ）范围从大于900飞秒到100皮秒的相干激光，激光功率为10μJ/脉冲或更多，使用固态激光器作为光源，将来自激光器的光脉冲分成两束光束，以这样的方式控制两个光束，使得两个光束会聚在工件的表面上或内部，以便记录全息图，同时在时间上和空间上彼此相互匹配两个光束的各个会聚点，以在它们之间产生干涉，以便以不可逆的方式在工件表面或工件内的嵌入全息图中记录表面浮雕全息图。本发明可以解决使用干涉飞秒激光脉冲以不可逆方式记录全息图的常规方法的问题，特别是脉冲激光束的波形失真以及嵌入式全息图记录中的不稳定性由于飞秒激光脉冲和空气/材料之间的非线性光学相互作用。

2. 发明申请

US20060019171A1 Method for producing hologram by pico-second laser 失效
标题翻译：通过微秒级激光产生全息图的方法
公开(公告)号：US20060019171A1
公开(公告)日：2006-01-26
申请号：US10504634
申请日：2003-02-13
申请人： Hideo Hosono , Masahiro Hirano , Kenichi Kawamura , Taisuke Miura , Hayato Kamioka
发明人： Hideo Hosono , Masahiro Hirano , Kenichi Kawamura , Taisuke Miura , Hayato Kamioka
IPC分类号： G03H1/04
CPC分类号： G02B5/1857 , G02B17/023 , G03H1/0244 , G03H1/04 , G03H2001/0413 , G03H2001/0415 , G03H2001/0482 , G03H2001/0484 , G03H2001/0491 , G03H2222/33 , G03H2223/26 , G03H2240/24 , G03H2260/62 , G03H2270/13 , G03H2270/52
摘要： Disclosed is a method of producing a hologram through a two-beam laser interfering exposure process, which comprises emitting a coherent laser light with a pulse width (τ) ranging from greater than 900 femtoseconds to 100 picoseconds and a laser power of 10 μJ/pulse or more using a solid-state laser as a light source, dividing the pulses light from the laser into two beams, controlling the two beams temporally and spatially in such a manner that the two beam are converged on a surface of or inside a workpiece for recording a hologram while matching the respective converged spots of the two beams with one another temporally and spatially to create the interference therebetween so as to record a surface-relief hologram on the surface of the workpiece or an embedded hologram inside the workpiece in an irreversible manner. The present invention can solve a problem with a conventional process of recording a hologram in a non-photosensitive material in an irreversible manner using interfering femtosecond laser pulses, specifically, distortion in the waveforms of pulsed laser beams and resulting instability in recording of an embedded hologram due to a non-linear optical interaction between the femtosecond laser pulses and air/the material.
摘要翻译：公开了一种通过双光束激光干涉曝光工艺制造全息图的方法，其包括发射脉冲宽度（τ）范围从大于900飞秒至100皮秒的相干激光，激光功率为10μJ/脉冲或更多，使用固态激光器作为光源，将来自激光器的光脉冲分成两束光束，以这样的方式控制两个光束，使得两个光束会聚在工件的表面上或内部，以便记录全息图，同时在时间上和空间上彼此相互匹配两个光束的各个会聚点，以在它们之间产生干涉，以便以不可逆的方式在工件表面或工件内的嵌入全息图中记录表面浮雕全息图。本发明可以解决使用干涉飞秒激光脉冲以不可逆方式记录全息图的常规方法的问题，特别是脉冲激光束的波形失真以及嵌入式全息图记录中的不稳定性由于飞秒激光脉冲和空气/材料之间的非线性光学相互作用。

3. 发明授权

US07649188B2 LPP type extreme ultra violet light source apparatus and driver laser for the same 有权
公开(公告)号：US07649188B2
公开(公告)日：2010-01-19
申请号：US11783387
申请日：2007-04-09
申请人： Akira Endo , Tatsuya Ariga , Takashi Suganuma , Taisuke Miura
发明人： Akira Endo , Tatsuya Ariga , Takashi Suganuma , Taisuke Miura
IPC分类号： H05G2/00
CPC分类号： H01S3/2308 , B82Y10/00 , G03F7/70033 , H01S3/0057 , H01S3/08004 , H01S3/08009 , H01S3/1075 , H01S3/108 , H01S3/1083 , H01S3/1103 , H01S3/2232 , H01S3/23 , H01S3/235
摘要： A driver laser for EUV light source apparatus which driver laser simultaneously achieves short-pulsing and multi-line oscillation. The driver laser includes: a short-pulse multi-line oscillated CO2 laser oscillator having a device that shortens width of pulses included in a laser beam to be output and a device that suppresses amplitude of an oscillation spectrum exhibiting an energy peak value; and at least one amplifier that inputs the laser beam output from the short-pulse multi-line oscillated CO2 laser oscillator and amplifies the input laser beam to output the amplified laser beam.

4. 发明申请

US20070187628A1 LPP type extreme ultra violet light source apparatus and driver laser for the same 有权
标题翻译： LPP型极紫外光源装置和驱动激光器相同
公开(公告)号：US20070187628A1
公开(公告)日：2007-08-16
申请号：US11783387
申请日：2007-04-09
申请人： Akira Endo , Tatsuya Ariga , Takashi Suganuma , Taisuke Miura
发明人： Akira Endo , Tatsuya Ariga , Takashi Suganuma , Taisuke Miura
IPC分类号： G01J3/10
CPC分类号： H01S3/2308 , B82Y10/00 , G03F7/70033 , H01S3/0057 , H01S3/08004 , H01S3/08009 , H01S3/1075 , H01S3/108 , H01S3/1083 , H01S3/1103 , H01S3/2232 , H01S3/23 , H01S3/235
摘要： A driver laser for EUV light source apparatus which driver laser simultaneously achieves short-pulsing and multi-line oscillation. The driver laser includes: a short-pulse multi-line oscillated CO2 laser oscillator having a device that shortens width of pulses included in a laser beam to be output and a device that suppresses amplitude of an oscillation spectrum exhibiting an energy peak value; and at least one amplifier that inputs the laser beam output from the short-pulse multi-line oscillated CO2 laser oscillator and amplifies the input laser beam to output the amplified laser beam.
摘要翻译：用于EUV光源装置的驱动器激光器，其驱动器激光器同时实现短脉冲和多线振荡。驱动器激光器包括：短脉冲多线振荡CO 2激光振荡器，其具有缩短包括在要输出的激光束中的脉冲的宽度的装置和抑制振荡频谱的振幅的装置表现出能量峰值; 以及至少一个放大器，其输入从短脉冲多线振荡的CO 2激光振荡器输出的激光束，并放大输入的激光束以输出放大的激光束。

5. 发明申请

US20080069157A1 Driver laser for extreme ultra violet light source device 审中-公开
标题翻译：驱动激光器用于极紫外光源装置
公开(公告)号：US20080069157A1
公开(公告)日：2008-03-20
申请号：US11892792
申请日：2007-08-27
申请人： Tatsuya Ariga , Hideo Hoshino , Taisuke Miura , Akira Endo
发明人： Tatsuya Ariga , Hideo Hoshino , Taisuke Miura , Akira Endo
IPC分类号： H01S3/108
CPC分类号： H01S3/2308 , H01S3/005 , H01S3/2232 , H01S3/2366 , H01S2301/02
摘要： A driver laser for an extreme ultra violet light source device capable of suppressing self-oscillation light, amplifying a laser beam efficiently, and reducing a device size. The driver laser has an oscillator for generating a laser beam to output the generated laser beam, and at least one amplifier for amplifying the laser beam output from the oscillator to output the amplified laser beam. The amplifier includes a discharge unit which amplifies the laser beam by using energy of a laser medium excited by discharge, a feedback mirror which leads the laser beam output from the discharge unit to the discharge unit, a polarizer which leads the laser beam output from the oscillator into the discharge unit and also reflects the laser beam output from the discharge unit to a predetermined direction, and a self-oscillation light filter which attenuates self-oscillation light output from the discharge unit.
摘要翻译：一种能够抑制自振荡的极紫外光源装置的驱动器激光器，有效地放大激光束并减小器件尺寸。驱动激光器具有用于产生激光束以输出所产生的激光束的振荡器，以及用于放大从振荡器输出的激光束以输出放大的激光束的至少一个放大器。放大器包括：放电单元，其通过使用通过放电激发的激光介质的能量放大激光束;反射镜，其将从放电单元输出的激光束导引到放电单元;偏振器，其将激光束从振荡器进入放电单元并且还将从放电单元输出的激光束反射到预定方向，以及自激振荡滤光器，其衰减从放电单元输出的自振荡光。

6. 发明授权

US07123635B2 Helium-cooled laser device 有权
标题翻译：氦冷激光装置
公开(公告)号：US07123635B2
公开(公告)日：2006-10-17
申请号：US10619305
申请日：2003-07-14
申请人： Yusuke Tamaki , Kazuya Takasago , Taisuke Miura , Hitoshi Sekita
发明人： Yusuke Tamaki , Kazuya Takasago , Taisuke Miura , Hitoshi Sekita
IPC分类号： H01S3/04
CPC分类号： H01S3/042 , H01S3/025 , H01S3/027 , H01S3/0404
摘要： The present invention offers a laser oscillator device having sufficient cooling ability to maintain a lasing medium which generates high-density thermal energy at a temperature appropriate for use, while being capable of being made compact. The laser oscillator device comprises an excitation beam source for generating an excitation beam, a laser medium for receiving the excitation beam and performing optical amplification, a laser oscillator device for causing resonance of light emitted by the laser medium for laser oscillation, and a cooling system for cooling said laser medium, wherein the cooling system uses a gas as the heat-carrying medium.
摘要翻译：本发明提供了具有足够的冷却能力的激光振荡器装置，以保持在适于使用的温度下产生高密度热能的激光介质，同时能够制造得紧凑。激光振荡器装置包括用于产生激发光束的激发光束源，用于接收激发光束并执行光放大的激光介质，用于引起由激光介质发射的用于激光振荡的光的共振的激光振荡器装置，以及冷却系统用于冷却所述激光介质，其中所述冷却系统使用气体作为所述载热介质。

7. 发明授权

US07680158B2 LPP type extreme ultra violet light source apparatus and driver laser for the same 有权
标题翻译： LPP型极紫外光源装置和驱动激光器相同
公开(公告)号：US07680158B2
公开(公告)日：2010-03-16
申请号：US11242016
申请日：2005-10-04
申请人： Akira Endo , Tatsuya Ariga , Takashi Suganuma , Taisuke Miura
发明人： Akira Endo , Tatsuya Ariga , Takashi Suganuma , Taisuke Miura
IPC分类号： H01S3/10
CPC分类号： H01S3/2308 , B82Y10/00 , G03F7/70033 , H01S3/0057 , H01S3/08004 , H01S3/08009 , H01S3/1075 , H01S3/108 , H01S3/1083 , H01S3/1103 , H01S3/2232 , H01S3/23 , H01S3/235
摘要： A driver laser for EUV light source apparatus which driver laser simultaneously achieves short-pulsing and multi-line oscillation. The driver laser includes: a short-pulse multi-line oscillated CO2 laser oscillator having a device that shortens width of pulses included in a laser beam to be output and a device that suppresses amplitude of an oscillation spectrum exhibiting an energy peak value; and at least one amplifier that inputs the laser beam output from the short-pulse multi-line oscillated CO2 laser oscillator and amplifies the input laser beam to output the amplified laser beam.
摘要翻译：用于EUV光源装置的驱动器激光器，其驱动器激光器同时实现短脉冲和多线振荡。驱动器激光器包括：短脉冲多线振荡CO 2激光振荡器，其具有缩短包括在要输出的激光束中的脉冲的宽度的装置，以及抑制表现出能量峰值的振荡频谱的幅度的装置; 以及至少一个放大器，其输入从短脉冲多线振荡的CO 2激光振荡器输出的激光束，并放大输入的激光束以输出放大的激光束。

8. 发明申请

US20060078017A1 LPP type extreme ultra violet light source apparatus and driver laser for the same 有权
标题翻译： LPP型极紫外光源装置和驱动激光器相同
公开(公告)号：US20060078017A1
公开(公告)日：2006-04-13
申请号：US11242016
申请日：2005-10-04
申请人： Akira Endo , Tatsuya Ariga , Takashi Suganuma , Taisuke Miura
发明人： Akira Endo , Tatsuya Ariga , Takashi Suganuma , Taisuke Miura
IPC分类号： H01S3/00
CPC分类号： H01S3/2308 , B82Y10/00 , G03F7/70033 , H01S3/0057 , H01S3/08004 , H01S3/08009 , H01S3/1075 , H01S3/108 , H01S3/1083 , H01S3/1103 , H01S3/2232 , H01S3/23 , H01S3/235
摘要： A driver laser for EUV light source apparatus which driver laser simultaneously achieves short-pulsing and multi-line oscillation. The driver laser includes: a short-pulse multi-line oscillated CO2 laser oscillator having a device that shortens width of pulses included in a laser beam to be output and a device that suppresses amplitude of an oscillation spectrum exhibiting an energy peak value; and at least one amplifier that inputs the laser beam output from the short-pulse multi-line oscillated CO2 laser oscillator and amplifies the input laser beam to output the amplified laser beam.
摘要翻译：用于EUV光源装置的驱动器激光器，其驱动器激光器同时实现短脉冲和多线振荡。驱动器激光器包括：短脉冲多线振荡CO 2激光振荡器，其具有缩短包括在要输出的激光束中的脉冲的宽度的装置和抑制振荡频谱的振幅的装置表现出能量峰值; 以及至少一个放大器，其输入从短脉冲多线振荡的CO 2激光振荡器输出的激光束，并放大输入的激光束以输出放大的激光束。

9. 发明授权

US07012940B2 Laser resonator and adjustment method 失效
标题翻译：激光谐振器和调节方法
公开(公告)号：US07012940B2
公开(公告)日：2006-03-14
申请号：US10619303
申请日：2003-07-14
申请人： Yusuke Tamaki , Hitoshi Sekita , Kazuya Takasago , Taisuke Miura
发明人： Yusuke Tamaki , Hitoshi Sekita , Kazuya Takasago , Taisuke Miura
IPC分类号： H01S3/00
CPC分类号： H01S3/235 , H01S3/08 , H01S3/08072 , H01S3/106
摘要： The present invention has the object of offering a laser resonator capable of maintaining high amplification efficiency even if the thermal lensing effect occurring in the laser medium varies during operation or over repeated operation and suspension of the laser device. The laser resonator comprises at least a pair of reflection portions (planar reflective mirrors 3) provided such as to allow a laser beam to oscillate therebetween; a laser medium provided on the optical path of the laser between the pair of reflection portions; an excitation portion (excitation laser device 5) for exciting the laser medium; an optical system (convex lens 1) provided on the optical path of the laser beam between the laser medium and the pair of reflection portions for changing the state of the laser in the laser medium; and a movement portion for moving the optical system along the optical axis of the laser.
摘要翻译：本发明的目的是提供一种激光谐振器，即使在激光介质中发生的热透镜效应在操作期间或者在激光装置的重复操作和暂停时都会发生变化时，其能够保持高的放大效率。激光谐振器包括至少一对反射部分（平面反射镜3），其被设置为允许激光束在它们之间振荡; 设置在所述一对反射部之间的所述激光的光路上的激光介质; 用于激发激光介质的激励部分（激发激光装置5）在激光介质和一对反射部分之间设置在激光束的光路上的光学系统（凸透镜1），用于改变激光介质中激光的状态; 以及用于沿着激光的光轴移动光学系统的移动部分。

10. 发明授权

US06882469B2 Regenerative optical amplifier 失效
标题翻译：再生光放大器
公开(公告)号：US06882469B2
公开(公告)日：2005-04-19
申请号：US10619310
申请日：2003-07-14
申请人： Yusuke Tamaki , Kazuya Takasago , Taisuke Miura , Hitoshi Sekita
发明人： Yusuke Tamaki , Kazuya Takasago , Taisuke Miura , Hitoshi Sekita
IPC分类号： G02F1/03 , H01S3/107 , H01S3/23 , H01S3/00
CPC分类号： H01S3/235 , H01S3/1075
摘要： The invention offers a regenerative optical amplifier enabling voltage to be easily applied to polarizing elements such as Pockels cells, without the need for complicated drive circuitry. An input beam of S-polarized light is reflected by a polarizer 1 and advances to a Pockels cell 2. In the time it takes for the input beam, having once passed through the Pockels cell 2, to be reflected by a reflective mirror 3 and return to the Pockels cell 2, a voltage VP1 causing a 90-degree rotation in the polarization of transmitted light is applied to the Pockels cell 2, and this applied voltage VP1 is maintained. The input beam is converted by the Pockels cell 2 into a P-polarized light pulse which is transmitted by the polarizer. Subsequently, the light pulse is converted from P-polarized light to S-polarized light and back to P-polarized light with each roundtrip of the Pockels cell 2, while passing each time between the reflective mirror 3, laser crystal 4 and reflective mirror 7, so as to be amplified in the resonator formed thereby. The amplified light pulse is extracted by applying a voltage VP2 causing a 90-degree rotation of the polarization of the transmitted light to the Pockels cell 6 to convert the light pulse to S-polarized light which is then reflected out of the resonator by the polarizer 5.
摘要翻译：本发明提供一种再生式光放大器，其使电压容易地应用于诸如Pockels电池的偏振元件，而不需要复杂的驱动电路。 S偏振光的输入光束被偏振器1反射并前进到Pockels单元2。在输入光束一旦经过普克尔斯单元2而被反射镜3反射并返回到普克尔斯单元2的时候，将产生90度的电压V P1，透射光的偏振度的旋转角度被施加到普克尔斯单元2，并且保持该施加电压V P1。输入光束由Pockels单元2转换成由偏振器透射的P偏振光脉冲。随后，光脉冲从P偏振光转换成S偏振光，并且随着普克尔斯单元2的每个往返光而被转换成P偏振光，同时每次在反射镜3，激光晶体4和反射镜7之间通过以便在由此形成的谐振器中被放大。通过施加将透射光的偏振90度旋转到Pockels单元6的电压V P2 P2来提取放大的光脉冲，以将光脉冲转换成S偏振光由偏振器5反射出谐振器。

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