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    • 1. 发明授权
    • Regeneration apparatus and regeneration method for electroless plating
    • 化学镀再生设备和再生方法
    • US07968149B2
    • 2011-06-28
    • US12981943
    • 2010-12-30
    • Hidenori TakagamiHiroshi KawakamiKazuhiko Kato
    • Hidenori TakagamiHiroshi KawakamiKazuhiko Kato
    • B01J49/00
    • G05D21/02C23C18/1617
    • A regeneration apparatus for an electroless plating solution, which includes a sensor for measuring the formation rate of phosphorous acid formed in a plating tank in response to a plating treatment, a split device for taking out a plating solution in the plating tank to transfer the plating solution to a first processing tank, a sensor for measuring the concentration of the phosphorous acid contained in the plating solution taken out, an addition device for supplying calcium carbonate or calcium hydroxide, an amount of which is required for producing a calcium phosphite from the phosphorous acid contained in the plating solution, to the first processing tank, a separation device for separating and removing the calcium phosphite produced in the first processing tank from the plating solution, and a return pump for transferring the plating solution from which the calcium phosphite has been separated and removed to the plating tank.
    • 一种用于化学镀溶液的再生装置,其包括用于测量在镀槽中形成的亚磷酸的形成速率的传感器,用于电镀处理,用于在镀槽中取出镀液以转移镀层 对第一处理槽的溶液,用于测量所取出的电镀液中所含的亚磷酸的浓度的传感器,用于从磷中生产亚磷酸钙所需的量的碳酸钙或氢氧化钙的添加装置 电解液中所含的酸,第一处理槽,从电镀液中分离除去第一处理槽中产生的亚磷酸钙的分离装置,以及用于转移已经从其中得到的亚磷酸钙的电镀液的返回泵 分离并移出镀槽。
    • 2. 发明授权
    • Regeneration apparatus and regeneration method for electroless plating
    • 化学镀再生设备和再生方法
    • US07892603B2
    • 2011-02-22
    • US11483357
    • 2006-07-07
    • Hidenori TakagamiHiroshi KawakamiKazuhiko Kato
    • Hidenori TakagamiHiroshi KawakamiKazuhiko Kato
    • B01J49/00
    • G05D21/02C23C18/1617
    • A regeneration apparatus for an electroless plating solution includes a sensor for measuring the formation rate of phosphorous acid formed in a plating tank in response to a plating treatment, a split device for taking out a plating solution in the plating tank to transfer the plating solution to a first processing tank, a sensor for measuring the concentration of the phosphorous acid contained in the plating solution taken out, an addition device for supplying calcium carbonate or calcium hydroxide, an amount of which is required for producing a calcium phosphite from the phosphorous acid contained in the plating solution, to the first processing tank, a separation device for separating and removing the calcium phosphite produced in the first processing tank from the plating solution, and a return pump for transferring the plating solution from which the calcium phosphite has been separated and removed to the plating tank.
    • 无电镀液的再生装置包括:用于测定电镀槽中形成的亚磷酸的形成速度的传感器,其用于电镀处理;电镀槽取出电镀液以将电镀液转移到 第一处理槽,用于测量取出的电镀液中所含的亚磷酸的浓度的传感器,用于从含有的磷酸生成亚磷酸钙所需的量的碳酸钙或氢氧化钙的添加装置 在电镀液中,在第一处理槽中,从电镀液中分离除去第一处理槽中生成的亚磷酸钙的分离装置,以及用于转移分离有亚磷酸钙的电镀液的回流泵, 移至电镀槽。
    • 3. 发明申请
    • Regeneration apparatus and regeneration method for electroless plating
    • 化学镀再生设备和再生方法
    • US20070023284A1
    • 2007-02-01
    • US11483357
    • 2006-07-07
    • Hidenori TakagamiHiroshi KawakamiKazuhiko Kato
    • Hidenori TakagamiHiroshi KawakamiKazuhiko Kato
    • B01J49/00
    • G05D21/02C23C18/1617
    • A regeneration apparatus for an electroless plating solution includes a sensor for measuring the formation rate of phosphorous acid formed in a plating tank in response to a plating treatment, a split device for taking out a plating solution in the plating tank to transfer the plating solution to a first processing tank, a sensor for measuring the concentration of the phosphorous acid contained in the plating solution taken out, an addition device for supplying calcium carbonate or calcium hydroxide, an amount of which is required for producing a calcium phosphite from the phosphorous acid contained in the plating solution, to the first processing tank, a separation device for separating and removing the calcium phosphite produced in the first processing tank from the plating solution, and a return pump for transferring the plating solution from which the calcium phosphite has been separated and removed to the plating tank.
    • 无电镀液的再生装置包括:用于测定电镀槽中形成的亚磷酸的形成速度的传感器,其用于电镀处理;电镀槽取出电镀液以将电镀液转移到 第一处理槽,用于测量取出的电镀液中所含的亚磷酸的浓度的传感器,用于从含有的磷酸生成亚磷酸钙所需的量的碳酸钙或氢氧化钙的添加装置 在电镀液中,在第一处理槽中,从电镀液中分离除去第一处理槽中生成的亚磷酸钙的分离装置,以及用于转移分离有亚磷酸钙的电镀液的回流泵, 移至电镀槽。