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1. 发明授权

US5834142A Method of manufacturing X-ray mask and heating apparatus 失效
公开(公告)号：US5834142A
公开(公告)日：1998-11-10
申请号：US738287
申请日：1996-10-25
申请人： Hideki Yabe , Kenji Marumoto , Sunao Aya , Koji Kise , Hiroaki Sumitani , Takashi Hifumi , Hiroshi Watanabe
发明人： Hideki Yabe , Kenji Marumoto , Sunao Aya , Koji Kise , Hiroaki Sumitani , Takashi Hifumi , Hiroshi Watanabe
IPC分类号： G03F1/22 , H01L21/027 , H01L21/324 , G03F9/00
CPC分类号： G03F1/22
摘要： The X-ray mask manufactured according to the present invention can solve a problem that the thin film stress of the X-ray absorber cannot be made to be zero although the mean thin film stress throughout the X-ray absorber can be made to be zero. The thin film stress distribution over the X-ray absorber 4 after the X-ray absorber 4 has been formed on a silicon substrate 1 is measured, and then inputs of electric power to heaters 9a, 9b and 9c of a hot plate 8 are changed so as to heat the X-ray absorber 4 to temperatures according to a specified temperature distribution with which the thin film stress throughout the X-ray absorber can be made to be zero.

2. 发明授权

US5953492A Method of manufacturing X-ray mask and heating apparatus 失效
标题翻译：制造X射线掩模和加热装置的方法
公开(公告)号：US5953492A
公开(公告)日：1999-09-14
申请号：US975112
申请日：1997-11-20
申请人： Hideki Yabe , Kenji Marumoto , Sunao Aya , Koji Kise , Hiroaki Sumitani , Takashi Hifumi , Hiroshi Watanabe
发明人： Hideki Yabe , Kenji Marumoto , Sunao Aya , Koji Kise , Hiroaki Sumitani , Takashi Hifumi , Hiroshi Watanabe
IPC分类号： G03F1/22 , H01L21/027 , H01L21/324 , G03F9/00 , H05B3/20
CPC分类号： G03F1/22
摘要： The X-ray mask manufactured according to the present invention can solve a problem that the thin film stress of the X-ray absorber cannot be made to be zero although the mean thin film stress throughout the X-ray absorber can be made to be zero. The thin film stress distribution over the X-ray absorber 4 after the X-ray absorber 4 has been formed on a silicon substrate 1 is measured, and then inputs of electric power to heaters 9a, 9b and 9c of a hot plate 8 are changed so as to heat the X-ray absorber 4 to temperatures according to a specified temperature distribution with which the thin film stress throughout the X-ray absorber can be made to be zero.
摘要翻译：根据本发明制造的X射线掩模可以解决尽管X射线吸收体中的平均薄膜应力可以为零，但X射线吸收体的薄膜应力不能为零的问题。测量在硅基板1上形成X射线吸收体4之后的X射线吸收体4上的薄膜应力分布，然后改变对热板8的加热器9a，9b，9c的电力输入以便将X射线吸收体4根据可以使整个X射线吸收体中的薄膜应力为零的规定的温度分布加热到温度。

3. 发明授权

US07982416B2 Circular accelerator 有权
标题翻译：圆形加速器
公开(公告)号：US07982416B2
公开(公告)日：2011-07-19
申请号：US12277861
申请日：2008-11-25
申请人： Hirofumi Tanaka , Takashi Hifumi , Katsuhisa Yoshida , Kazuo Yamamoto , Yoichi Kuroda
发明人： Hirofumi Tanaka , Takashi Hifumi , Katsuhisa Yoshida , Kazuo Yamamoto , Yoichi Kuroda
IPC分类号： H05H11/00
CPC分类号： H05H7/04
摘要： In a circular accelerator, a magnetic pole edge portion of a bending electromagnet into and from which a charged particle beam enters and exits is provided with endpacks. A first protrusion is provided at that part of each end pack which is radially outside the equilibrium orbit of a center energy beam, while a second protrusion is provided at that part of each end pack which is radially inside the equilibrium orbit of the center energy beam. The shapes of the first and second protrusions are set so that the betatron oscillation numbers of beams of different acceleration energies may be held constant or become linear to the energies. In case of emitting the charged particle beam out of the circular accelerator, the change of a tune attributed to the change of the beam orbit can be statically corrected, the tune is linearly changed, and an adjustment of the emission of the beam becomes easy.
摘要翻译：在圆形加速器中，带电粒子束进出的弯曲电磁体的磁极边缘部分设置有端口。在中心能量束的平衡轨道的径向外侧的每个端部组件的该部分处设置有第一突出部，而在每个端部组件的位于中心能量束的平衡轨道的径向内侧的部分设置有第二突出部。第一和第二突起的形状被设定为使得不同加速度能量的光束的激光振荡数可以保持恒定，或者与能量保持一致。在从圆形加速器发射带电粒子束的情况下，可以静态校正归因于光束轨道变化的曲调的变化，曲线线性地变化，并且光束的发射调节变得容易。

4. 发明申请

US20090256501A1 CIRCULAR ACCELERATOR 有权
标题翻译：圆形加速器
公开(公告)号：US20090256501A1
公开(公告)日：2009-10-15
申请号：US12277861
申请日：2008-11-25
申请人： Hirofumi TANAKA , Takashi Hifumi , Katsuhisa Yoshida , Kazuo Yamamoto , Yoichi Kuroda
发明人： Hirofumi TANAKA , Takashi Hifumi , Katsuhisa Yoshida , Kazuo Yamamoto , Yoichi Kuroda
IPC分类号： H05H7/00
CPC分类号： H05H7/04
摘要： In a circular accelerator, a magnetic pole edge portion of a bending electromagnet into and from which a charged particle beam enters and exits is provided with endpacks. A first protrusion is provided at that part of each end pack which is radially outside the equilibrium orbit of a center energy beam, while a second protrusion is provided at that part of each end pack which is radially inside the equilibrium orbit of the center energy beam. The shapes of the first and second protrusions are set so that the betatron oscillation numbers of beams of different acceleration energies may be held constant or become linear to the energies. In case of emitting the charged particle beam out of the circular accelerator, the change of a tune attributed to the change of the beam orbit can be statically corrected, the tune is linearly changed, and an adjustment of the emission of the beam becomes easy.
摘要翻译：在圆形加速器中，带电粒子束进出的弯曲电磁体的磁极边缘部分设置有端口。在中心能量束的平衡轨道的径向外侧的每个端部组件的该部分处设置有第一突出部，而在每个端部组件的位于中心能量束的平衡轨道的径向内侧的部分设置有第二突出部。第一和第二突起的形状被设定为使得不同加速度能量的光束的激光振荡数可以保持恒定，或者与能量保持一致。在从圆形加速器发射带电粒子束的情况下，可以静态校正归因于光束轨道变化的曲调的变化，曲线线性地变化，并且光束的发射调节变得容易。

5. 发明授权

US5057766A Apparatus for detecting position of charged particle 失效
标题翻译：用于检测充电颗粒的位置的装置
公开(公告)号：US5057766A
公开(公告)日：1991-10-15
申请号：US533451
申请日：1990-06-05
申请人： Shuhei Nakata , Takafumi Nakagawa , Takashi Hifumi
发明人： Shuhei Nakata , Takafumi Nakagawa , Takashi Hifumi
IPC分类号： H05H7/00
CPC分类号： H05H7/00
摘要： An apparatus for detecting the position of a charged particle in a duct pipe has a plurality of electrodes arranged in the duct pipe. Detection signals obtained in the electrodes are phase-delayed by predetermined amounts and then added to form an integral detection signal. The integral detection signal is input to a circuit which determines waveforms representative of the passage of the charged particle: namely, the D.C. component of the detection signal, fundamental wave component and a phase-shifted fundamental wave component. The position of the charged particle are determined from these components. A part of each electrode is formed of a dielectric member. Each electrode and an associated connector are covered by a double-shield structure with inner and outer shields, the electrode, the connector and the inner shield being electrically insulated from the duct pipe.

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