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    • 1. 发明申请
    • Droplet ejectiing method and droplet ejection apparatus, thin film forming method and device, and electronic device
    • 液滴喷射方法和液滴喷射装置,薄膜​​形成方法和装置以及电子装置
    • US20060238553A1
    • 2006-10-26
    • US11407258
    • 2006-04-20
    • Hidekazu MoriyamaKei Hiruma
    • Hidekazu MoriyamaKei Hiruma
    • B41J29/38
    • B41J2/04588B41J2/04581
    • A drive signal is applied to a pressure-generating element to create pressure that corresponds to the drive signal inside a cavity, and liquid stored in the cavity is ejected as droplets. To enable stable droplet ejection even when a highly viscoelastic material is used, the drive signal contains a first waveform part c for adding a second voltage Vch to a reference potential Vc that is larger than a specific potential by a first voltage Vbc to create negative pressure in the cavity, a second waveform part h for holding the negative pressure in the cavity for a specific amount of time with a hold potential Vh that is larger than the reference potential Vc by the second voltage Vch, and a third waveform part d for reducing the voltage from the hold potential Vh to the specific potential Vb by a third voltage Vbh to increase the pressure in the cavity; and the first voltage Vbc is 10% or less, preferably 4% or less, than the third voltage Vbh.
    • 将驱动信号施加到压力产生元件以产生对应于空腔内的驱动信号的压力,并且存储在空腔中的液体作为液滴喷射。 为了即使使用高粘弹性材料也能够稳定地进行液滴喷射,驱动信号包含第一波形部分c,用于将第二电压Vch加到比第一电压Vbc大的特定电位的参考电位Vc以产生负压 在第二波形部分h中,第二波形部分h用于将具有大于参考电位Vc的保持电位Vh保持在空腔中一段特定时间量的第二电压Vch,以及用于减小第三波形部分d 从保持电位Vh到特定电位Vb的电压为第三电压Vbh以增加空腔中的压力; 第一电压Vbc比第三电压Vbh小10%以下,优选为4%以下。