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    • 1. 发明授权
    • Film forming unit
    • 成膜单元
    • US06797068B1
    • 2004-09-28
    • US10049283
    • 2002-02-11
    • Hideaki YamasakiTakashi MochizukiSusumu ArimaYumiko Kawano
    • Hideaki YamasakiTakashi MochizukiSusumu ArimaYumiko Kawano
    • C23C1600
    • C23C16/45521C23C16/45589C23C16/4585H01L21/68721H01L21/68735
    • A film-forming unit of the invention includes a processing container in which a vacuum can be created, a stage arranged in the processing container, on which an object to be processed is placed, a process-gas supplying means for supplying a process gas into the processing container, and a heating means for heating the object to be processed placed on the stage. A division wall surrounds a lateral side and a lower side of the stage. An inert gas is introduced into a stage-side region surrounded by the division wall, by an inert-gas supplying means. A gap-forming member is arranged in such a manner that its inner peripheral portion is arranged above a peripheral portion of the object to be processed placed on the stage via a gap and its outer peripheral portion is arranged above the division wall via a gap.
    • 本发明的成膜单元包括其中可以产生真空的处理容器,设置在处理容器中的待处理物体的阶段,用于将处理气体供应到处理气体供应装置 处理容器和用于加热被放置在台架上的待处理物体的加热装置。 分隔壁围绕台的侧面和下侧。 通过惰性气体供给装置将惰性气体引入由分隔壁包围的载物台侧区域。 间隙形成构件被布置成使得其内周部分经由间隙布置在待处理物体的周边部分上,并且其外周部分经由间隙布置在分隔壁的上方。
    • 2. 发明授权
    • CVD apparatus and CVD method
    • CVD装置和CVD法
    • US06436203B1
    • 2002-08-20
    • US09551393
    • 2000-04-18
    • Takeshi KaizukaTakashi HoriuchiMasami MizukamiTakashi MochizukiYumiko KawanoHideaki Yamasaki
    • Takeshi KaizukaTakashi HoriuchiMasami MizukamiTakashi MochizukiYumiko KawanoHideaki Yamasaki
    • B05D136
    • C23C16/4481C23C16/18C23C16/20C23C16/45565C23C16/45572C23C16/45574
    • The present invention provides a CVD apparatus and a CVD method for use in forming an Al/Cu multilayered film. The Al/Cu multilayered film is formed in the CVD apparatus comprising a chamber for placing a semiconductor wafer W, a susceptor for mounting the semiconductor wafer W thereon, an Al raw material supply system for introducing a gasified Al raw material into the chamber and a Cu raw material supply system for introducing a gasified Cu raw material into the chamber. The Al/Cu multilayered film is formed by repeating a series of steps consisting of introducing the Al raw material gas into the chamber, depositing the Al film on the semiconductor wafer W by a CVD method, followed by generating a plasma in the chamber in which the Cu raw material gas has been introduced and depositing the Cu film on the semiconductor wafer W by a CVD method. The Al/Cu multilayered film thus obtained is subjected to a heating treatment (annealing), thereby forming a desired Al/Cu multilayered film.
    • 本发明提供了用于形成Al / Cu多层膜的CVD装置和CVD方法。 在包括用于放置半导体晶片W的室,用于安装半导体晶片W的基座的CVD装置中形成Al / Cu多层膜,用于将气化的Al原料引入到室中的Al原料供给系统 Cu原料供给系统,用于将气化的Cu原料引入室中。 Al / Cu多层膜通过重复一系列步骤而形成,该步骤包括将Al原料气体引入室中,通过CVD法将Al膜沉积在半导体晶片W上,随后在室中产生等离子体,其中 引入Cu原料气体并通过CVD法将Cu膜沉积在半导体晶片W上。 对这样得到的Al / Cu多层膜进行加热处理(退火),形成所需的Al / Cu多层膜。
    • 6. 发明授权
    • Subcarrier allocation method and apparatus thereof
    • 子载波分配方法及其装置
    • US08483154B2
    • 2013-07-09
    • US12735632
    • 2008-12-16
    • Takashi Mochizuki
    • Takashi Mochizuki
    • H04W4/00
    • H04L5/0007H04L5/0023H04L5/003H04W72/06
    • A subcarrier allocation apparatus of the present invention includes: memory (12) that stores allocation patterns of links for allocation of subcarriers to the links; selector (11) that selects the subcarriers one by one in order; allocation evaluation value calculators (13) that are arranged in conjunction with cells of base stations and that calculate, for each allocation pattern, allocation evaluation values indicating desirability of allocation in the corresponding cells at the time of the allocation of the subcarrier currently selected by selector (11) to the links in accordance with the allocation pattern; adder (14) that adds, for each allocation pattern, the allocation evaluation values calculated by allocation evaluation value calculators (13); and maximum value detector (15) that detects a maximum value from the addition result of the allocation evaluation values added by adder (14) and that determines the allocation pattern, in which the addition result indicates the maximum value, as an optimal allocation pattern of the subcarrier currently selected by selector (11).
    • 本发明的子载波分配装置包括:存储器(12),其存储用于分配子载波到链路的链路的分配模式; 选择器(11),依次选择子载波; 分配评估值计算器(13),其与基站的小区一起被布置,并且针对每个分配模式,计算分配评估值,所述分配评估值指示在由选择器当前选择的子载波的分配时的相应小区中的分配的可取性 (11)按照分配格局链接; 加法器(14),其针对每个分配模式添加由分配评估值计算器(13)计算的分配评估值; 以及最大值检测器(15),其从加法器(14)所添加的分配评估值的相加结果中检测最大值,并且将加法结果指示最大值的分配模式确定为最佳值分配模式 当前由选择器(11)选择的子载波。
    • 9. 发明申请
    • Adaptive transmission timing control method, wireless communication system and wireless communication device
    • 自适应传输定时控制方法,无线通信系统和无线通信设备
    • US20070025326A1
    • 2007-02-01
    • US11493445
    • 2006-07-26
    • Shingo KikuchiTakashi Mochizuki
    • Shingo KikuchiTakashi Mochizuki
    • H04J3/06
    • H04W56/0045H04W24/00
    • In a method for adaptive transmission timing control, the overlooking of a base path at the side of the base station that occurs when the transmission timing offset amount changes to the extent of falling outside the current delay-profile calculation range, and the side of the mobile station fails to demodulate the control information that contains the transmission timing offset amount, is prevented. A limit is put on the transmission timing offset amount applied in a single transmission timing control iteration. Together with setting the transmission timing offset value such that the main component of the delay profile calculated from the pilot signal transmitted with offset transmission timing falls within the time range of when the current delay profile was calculated, the time range for calculating the next delay profile is shifted such that a delay profile calculated from the pilot signal transmitted with offset transmission timing falls within the shifted range, starting at the earliest component.
    • 在自适应发送定时控制的方法中,当发送定时偏移量变化到超出当前延迟轮廓计算范围的程度时,忽视基站侧的基本路径, 移动台无法解调包含发送定时偏移量的控制信息。 对在单个传输定时控制迭代中应用的传输定时偏移量进行限制。 与设定发送定时偏移值一起设置由偏移发送定时发送的导频信号计算出的延迟分布的主要成分落在当前延迟分布图的时间范围内,计算下一个延迟分布的时间范围 被移位,使得从偏移发送定时发送的导频信号计算出的延迟分布落在从最早分量开始的移位范围内。