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    • 1. 发明申请
    • Planar motor
    • 平面电机
    • US20080122397A1
    • 2008-05-29
    • US11605376
    • 2006-11-29
    • Hideaki SatoKennosuke Kondo
    • Hideaki SatoKennosuke Kondo
    • B64C17/06
    • H02K41/03H02K41/0356H02K2201/18Y10S414/135
    • A common electrode plate formed on a common electrode base attached to the lower surface of the movable stage faces a split electrode plate formed on a split electrode base attached to the upper surface of a main base, which are apart from each other at a predetermined interval. A support mechanism formed of ball bearings, ball stoppers at the movable side, steel balls, ball stoppers at the fixed side, and ball bearings allows the movable stage to move in directions of the X-axis, Y-axis and turning. A linear actuator 19 is driven to move the movable stage in the directions of X-axis, Y-axis, and turning.
    • 形成在安装在可动台的下表面上的公共电极基座上的公共电极板面对形成在分隔电极基板上的分离电极板,该分离电极基板安装在主基板的上表面上,该间隔电极基板以预定间隔彼此分开 。 由球轴承,可动侧的球塞,钢球,固定侧的球塞,以及球轴承构成的支承机构,能够使活动台沿X轴,Y轴,车削方向移动。 驱动线性致动器19沿X轴,Y轴和转动方向移动可动台。
    • 2. 发明授权
    • Planar motor
    • 平面电机
    • US07504794B2
    • 2009-03-17
    • US11605376
    • 2006-11-29
    • Hideaki SatoKennosuke Kondo
    • Hideaki SatoKennosuke Kondo
    • H02K41/02B64C17/06
    • H02K41/03H02K41/0356H02K2201/18Y10S414/135
    • A common electrode plate formed on a common electrode base attached to the lower surface of the movable stage faces a split electrode plate formed on a split electrode base attached to the upper surface of a main base, which are apart from each other at a predetermined interval. A support mechanism formed of ball bearings, ball stoppers at the movable side, steel balls, ball stoppers at the fixed side, and ball bearings allows the movable stage to move in directions of the X-axis, Y-axis and turning. A linear actuator 19 is driven to move the movable stage in the directions of X-axis, Y-axis, and turning.
    • 形成在安装在可动台的下表面上的公共电极基座上的公共电极板面对形成在分隔电极基板上的分离电极板,该分离电极基板安装在主基板的上表面上,该间隔电极基板以预定间隔彼此分开 。 由球轴承,可动侧的球塞,钢球,固定侧的球塞,以及球轴承构成的支承机构,能够使活动台沿X轴,Y轴,车削方向移动。 驱动线性致动器19沿X轴,Y轴和转动方向移动可动台。