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1. 发明授权

US08777695B2 Ultrasonic cleaning apparatus, ultrasonic cleaning method, and storage medium storing computer program for executing ultrasonic cleaning method 有权
标题翻译：超声波清洗装置，超声波清洗方法和存储用于执行超声波清洗方法的计算机程序的存储介质
公开(公告)号：US08777695B2
公开(公告)日：2014-07-15
申请号：US12876566
申请日：2010-09-07
申请人： Hideaki Sato , Kazuyoshi Eshima , Hiromi Hara , Hirozumi Hoshino
发明人： Hideaki Sato , Kazuyoshi Eshima , Hiromi Hara , Hirozumi Hoshino
IPC分类号： B24B31/06 , B08B3/12
CPC分类号： B08B3/12 , H01L21/67057
摘要： An ultrasonic cleaning apparatus according to the present invention comprises a plurality of cleaning tanks configured to store a cleaning liquid, an object-to-be-processed holder capable of being inserted into each cleaning tank, the object-to-be-processed holder being configured to hold an object to be processed and to immerse the object to be processed into the cleaning liquid, a vibrator disposed on each cleaning tank, a single ultrasonic oscillator configured to make each vibrator ultrasonically vibrate, an output switch interposed between the ultrasonic oscillator and the vibrator of each respective cleaning tank, the output switch being configured to switch the vibrator that is connected to the ultrasonic oscillator, and a control device configured to control the ultrasonic oscillator and the output switch, wherein the control device controls the ultrasonic oscillator and the output switch such that a timing at which the vibrator of one of the cleaning tanks is made to ultrasonically vibrate, and a timing at which the vibrator of another cleaning tank is made to ultrasonically vibrate are not overlapped with each other.
摘要翻译：根据本发明的超声波清洗装置包括：多个清洗槽，其配置成存储清洁液体，能够插入到每个清洗槽中的待处理物体的保持器，被处理物体为被配置为保持要处理的物体并将待处理物体浸入清洗液中，设置在每个清洗槽上的振动器，构造成使每个振动器超声波振动的单个超声波振荡器，插入超声波振荡器和每个相应清洁槽的振动器，输出开关被配置为切换连接到超声波振荡器的振动器;以及控制装置，被配置为控制超声波振荡器和输出开关，其中控制装置控制超声波振荡器和输出开关，使得清洗槽中的一个的振动器的超声波的定时振动，另一个清洗槽的振动器超声波振动的时间彼此不重叠。

2. 发明申请

US20110056512A1 ULTRASONIC CLEANING APPARATUS, ULTRASONIC CLEANING METHOD, AND STORAGE MEDIUM STORING COMPUTER PROGRAM FOR EXECUTING ULTRASONIC CLEANING METHOD 有权
标题翻译：超声波清洗装置，超声波清洗方法和存储中央存储计算机程序，用于执行超声波清洗方法
公开(公告)号：US20110056512A1
公开(公告)日：2011-03-10
申请号：US12876566
申请日：2010-09-07
申请人： Hideaki SATO , Kazuyoshi Eshima , Hiromi Hara , Hirozumi Hoshino
发明人： Hideaki SATO , Kazuyoshi Eshima , Hiromi Hara , Hirozumi Hoshino
IPC分类号： B08B3/12
CPC分类号： B08B3/12 , H01L21/67057
摘要： An ultrasonic cleaning apparatus according to the present invention comprises: a plurality of cleaning tanks configured to store a cleaning liquid; an object-to-be-processed holder capable of being inserted into each cleaning tank, the object-to-be-processed holder being configured to hold an object to be processed and to immerse the object to be processed into the cleaning liquid; a vibrator disposed on each cleaning tank; a single ultrasonic oscillator configured to make each vibrator ultrasonically vibrate; an output switch interposed between the ultrasonic oscillator and the vibrator of each respective cleaning tank, the output switch being configured to switch the vibrator that is connected to the ultrasonic oscillator; and a control device configured to control the ultrasonic oscillator and the output switch; wherein the control device controls the ultrasonic oscillator and the output switch such that a timing at which the vibrator of one of the cleaning tanks is made to ultrasonically vibrate, and a timing at which the vibrator of another cleaning tank is made to ultrasonically vibrate, are not overlapped with each other.
摘要翻译：根据本发明的超声波清洗装置包括：多个清洗槽，其构造成存储清洗液; 被处理物体能够插入到每个清洗槽中，被处理物体被构造成保持被处理物体并将被处理物体浸入清洗液中; 设置在每个清洗槽上的振动器; 构造成使每个振动器超声振动的单个超声波振荡器; 输出开关，其插入在每个相应的清洁槽的超声波振荡器和振动器之间，输出开关被配置为切换连接到超声波振荡器的振动器; 以及控制装置，被配置为控制所述超声波振荡器和所述输出开关; 其中所述控制装置控制所述超声波振荡器和所述输出开关，使得所述清洗槽中的一个的振动器被超声波振动的时刻以及使另一个清洗槽的振动器超声波振动的时刻为止不重叠。

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