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    • 8. 发明授权
    • Trench poly ESD formation for trench MOS and SGT
    • 沟槽MOS和SGT的沟槽聚合物ESD形成
    • US08772828B2
    • 2014-07-08
    • US13911871
    • 2013-06-06
    • Hong ChangJohn Chen
    • Hong ChangJohn Chen
    • H01L29/78
    • H01L29/7393H01L27/0259H01L29/7827
    • A semiconductor device includes a semiconductor material disposed in a trench with polysilicon lining at least the bottom of the trench. The semiconductor material includes differently doped regions configured as a PNP or NPN structure formed in the trench with differently doped regions located side by side across a width of the trench. It is emphasized that this abstract is provided to comply with rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.
    • 半导体器件包括设置在具有至少沟槽底部的多晶硅衬底的沟槽中的半导体材料。 半导体材料包括不同的掺杂区域,其被配置为在沟槽中形成的PNP或NPN结构,其中不同的掺杂区域跨越沟槽的宽度并排设置。 要强调的是,提供这个摘要是为了符合要求摘要的规则,允许搜索者或其他读者快速确定技术公开内容的主题。 提交它的理解是,它不会用于解释或限制权利要求的范围或含义。