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    • 3. 发明申请
    • FABRICATION OF TRENCH DMOS DEVICE HAVING THICK BOTTOM SHIELDING OXIDE
    • 具有厚度底层氧化物的TRENCH DMOS器件的制造
    • US20120292693A1
    • 2012-11-22
    • US13560247
    • 2012-07-27
    • Yeeheng LEESung-Shan TAIHong CHANGJohn CHEN
    • Yeeheng LEESung-Shan TAIHong CHANGJohn CHEN
    • H01L29/78
    • H01L29/7813H01L29/407H01L29/4236H01L29/42368H01L29/42376H01L29/513H01L29/66719H01L29/66734
    • Semiconductor device fabrication method and devices are disclosed. A device may be fabricated by forming in a semiconductor layer; filling the trench with an insulating material; removing selected portions of the insulating material leaving a portion of the insulating material in a bottom portion of the trench; forming one or more spacers on one or more sidewalls of a remaining portion of the trench; anisotropically etching the insulating material in the bottom portion of the trench using the spacers as a mask to form a trench in the insulator; removing the spacers; and filling the trench in the insulator with a conductive material. Alternatively, an oxide-nitride-oxide (ONO) structure may be formed on a sidewall and at a bottom of the trench and one or more conductive structures may be formed in a portion of the trench not occupied by the ONO structure.
    • 公开了半导体器件制造方法和器件。 可以通过在半导体层中形成来制造器件; 用绝缘材料填充沟槽; 去除所述绝缘材料的选定部分,使所述绝缘材料的一部分留在所述沟槽的底部; 在所述沟槽的剩余部分的一个或多个侧壁上形成一个或多个间隔物; 使用间隔物作为掩模对沟槽的底部中的绝缘材料进行各向异性蚀刻,以在绝缘体中形成沟槽; 去除垫片; 并用导电材料填充绝缘体中的沟槽。 或者,可以在沟槽的侧壁和底部形成氧化物 - 氧化物(ONO)结构,并且可以在未被ONO结构占据的沟槽的一部分中形成一个或多个导电结构。