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1. 发明授权

US07750767B2 Micro electro mechanical system device 失效
标题翻译：微机电系统装置
公开(公告)号：US07750767B2
公开(公告)日：2010-07-06
申请号：US11711057
申请日：2007-02-27
申请人： Hee-moon Jeong , Seok-jin Kang , Jin-woo Cho , Young-chul Ko , Hyun-ku Jeong
发明人： Hee-moon Jeong , Seok-jin Kang , Jin-woo Cho , Young-chul Ko , Hyun-ku Jeong
IPC分类号： H01H51/22
CPC分类号： G02B26/085 , H01F7/066 , H01F2007/068
摘要： A micro electro mechanical system (MEMS) device is provided. The MEMS device includes: a stage which operates in a vibration mode; an axle which supports the stage and allows rotation of the stage; and a capacitive sensor which detects rotation of the stage. The capacitive sensor includes: a sensing arm which extends from the stage; driving combs which extend from the sensing arm and rotated together with the stage; fixed combs which are fixedly supported for engagement with the driving combs, the fixed combs including surfaces overlapping opposite surfaces of the driving combs in accordance with the rotation of the driving combs; and a capacitance sensing portion which detects a capacitance change of the driving combs and the fixed combs. Therefore, the MEMS device performs precise scanning by structurally preventing deformation of the stage having a light reflecting surface.
摘要翻译：提供了微机电系统（MEMS）装置。 MEMS器件包括：以振动模式操作的级; 支撑舞台并允许舞台旋转的轴; 以及检测台的旋转的电容式传感器。该电容传感器包括：从该台延伸的感测臂; 驱动梳子，其从感测臂延伸并与舞台一起旋转; 固定梳子，其被固定地支撑以与驱动梳状物接合，固定梳根据驱动梳的旋转包括与驱动梳的相对表面重叠的表面; 以及电容感测部，其检测驱动梳和固定梳的电容变化。因此，MEMS器件通过结构防止具有光反射表面的台的变形来执行精确的扫描。

2. 发明申请

US20080007376A1 Micro electro mechanical system device 失效
标题翻译：微机电系统装置
公开(公告)号：US20080007376A1
公开(公告)日：2008-01-10
申请号：US11711057
申请日：2007-02-27
申请人： Hee-moon Jeong , Seok-jin Kang , Jin-woo Cho , Young-chul KO , Hyun-ku Jeong
发明人： Hee-moon Jeong , Seok-jin Kang , Jin-woo Cho , Young-chul KO , Hyun-ku Jeong
IPC分类号： H01F7/08 , G01R27/26
CPC分类号： G02B26/085 , H01F7/066 , H01F2007/068
摘要： A micro electro mechanical system (MEMS) device is provided. The MEMS device includes: a stage which operates in a vibration mode; an axle which supports the stage and allows rotation of the stage; and a capacitive sensor which detects rotation of the stage. The capacitive sensor includes: a sensing arm which extends from the stage; driving combs which extend from the sensing arm and rotated together with the stage; fixed combs which are fixedly supported for engagement with the driving combs, the fixed combs including surfaces overlapping opposite surfaces of the driving combs in accordance with the rotation of the driving combs; and a capacitance sensing portion which detects a capacitance change of the driving combs and the fixed combs. Therefore, the MEMS device performs precise scanning by structurally preventing deformation of the stage having a light reflecting surface.
摘要翻译：提供了微机电系统（MEMS）装置。 MEMS器件包括：以振动模式操作的级; 支撑舞台并允许舞台旋转的轴; 以及检测台的旋转的电容式传感器。该电容传感器包括：从该台延伸的感测臂; 驱动梳子，其从感测臂延伸并与舞台一起旋转; 固定梳子，其被固定地支撑以与驱动梳状物接合，固定梳根据驱动梳的旋转包括与驱动梳的相对表面重叠的表面; 以及电容感测部，其检测驱动梳和固定梳的电容变化。因此，MEMS器件通过结构防止具有光反射表面的台的变形来执行精确的扫描。

3. 发明申请

US20070268099A1 Actuator and two-dimensional scanner 审中-公开
标题翻译：执行器和二维扫描仪
公开(公告)号：US20070268099A1
公开(公告)日：2007-11-22
申请号：US11654582
申请日：2007-01-18
申请人： Hee-moon Jeong , Seong-ho Shin , Jin-ho Lee , Jin-woo Cho , Young-chul Ko
发明人： Hee-moon Jeong , Seong-ho Shin , Jin-ho Lee , Jin-woo Cho , Young-chul Ko
IPC分类号： H01H51/22
CPC分类号： H02K33/18 , G02B26/085 , G02B26/101
摘要： An actuator and a two dimensional scanner. The actuator and the two dimensional scanner include a base plate, a movable plate pivoted around at least one of a first imaginary axis or a second imaginary axis which are perpendicular to each other, a magnetic field-producing portion forming a magnetic force which acts in a direction parallel to the second axis and has a minimum size at a position of the first axis, a support member disposed coaxially with at least one of the first axis and the second axis, connecting the base plate and the movable plate, and forming a pivoting axis of the movable plate, and a driving coil portion to which a driving power of the movable plate is applied and disposed on the movable plate so as to have a point symmetry shape with respect to an intersecting point of the first axis and the second axis.
摘要翻译：执行器和二维扫描仪。致动器和二维扫描仪包括基板，围绕彼此垂直的第一假想轴或第二假想轴中的至少一个枢转的可动板，形成磁力的磁场产生部分，其作用在与第二轴平行的方向，在第一轴的位置具有最小尺寸，与第一轴和第二轴的至少一个同轴设置的支撑构件，连接基板和可动板，并形成可移动板的枢转轴线和驱动线圈部分，可动板的驱动力被施加到可动板上，以便相对于第一轴线和第二轴线的交叉点具有点对称形状轴。

4. 发明授权

US07616365B2 Electromagnetic micro actuator and method of manufacturing the same 失效
标题翻译：电磁微型致动器及其制造方法
公开(公告)号：US07616365B2
公开(公告)日：2009-11-10
申请号：US11710432
申请日：2007-02-26
申请人： Young-chul Ko , Jin-woo Cho , Hee-moon Jeong
发明人： Young-chul Ko , Jin-woo Cho , Hee-moon Jeong
IPC分类号： G02B26/10 , B81B3/00 , B81B1/00
CPC分类号： G02B26/085 , G02B26/101
摘要： A micro actuator and a method of manufacturing the micro actuator. A micro actuator includes a base frame, a first movable part, a second movable part, at least one pair of permanent magnets, a coil part, and a deformation suppression portion. The first movable part is rotatably connected to the base frame. The second movable part is rotatably connected to the first movable part and includes a mirror which changes an optical path. The coil part includes a plurality of coil sections protruded from top surfaces of the first and second movable parts. The deformation suppression portion includes a plurality of grooves formed in the first and second movable parts between the coil sections. The deformation suppression portion suppresses a thermal deformation, which occurs when a current is applied to the coil part, so as to reduce deformations of the first and second movable parts.
摘要翻译：微型致动器和微型致动器的制造方法。微型致动器包括基架，第一可移动部件，第二可动部件，至少一对永磁体，线圈部件和变形抑制部分。第一可移动部分可旋转地连接到基架。第二可移动部分可旋转地连接到第一可移动部分并且包括改变光路的反射镜。线圈部分包括从第一和第二可移动部分的顶表面突出的多个线圈部分。变形抑制部包括形成在线圈部之间的第一和第二可动部中的多个槽。变形抑制部抑制向线圈部施加电流时发生的热变形，以减少第一和第二可动部的变形。

5. 发明申请

US20080054732A1 Electromagnetic micro actuator and method of manufacturing the same 失效
标题翻译：电磁微型致动器及其制造方法
公开(公告)号：US20080054732A1
公开(公告)日：2008-03-06
申请号：US11710432
申请日：2007-02-26
申请人： Young-chul Ko , Jin-woo Cho , Hee-moon Jeong
发明人： Young-chul Ko , Jin-woo Cho , Hee-moon Jeong
IPC分类号： H02K33/00 , G02B26/08
CPC分类号： G02B26/085 , G02B26/101
摘要： A micro actuator and a method of manufacturing the micro actuator. A micro actuator includes a base frame, a first movable part, a second movable part, at least one pair of permanent magnets, a coil part, and a deformation suppression portion. The first movable part is rotatably connected to the base frame. The second movable part is rotatably connected to the first movable part and includes a mirror which changes an optical path. The coil part includes a plurality of coil sections protruded from top surfaces of the first and second movable parts. The deformation suppression portion includes a plurality of grooves formed in the first and second movable parts between the coil sections. The deformation suppression portion suppresses a thermal deformation, which occurs when a current is applied to the coil part, so as to reduce deformations of the first and second movable parts.
摘要翻译：微型致动器和微型致动器的制造方法。微型致动器包括基架，第一可移动部件，第二可动部件，至少一对永磁体，线圈部件和变形抑制部分。第一可移动部分可旋转地连接到基架。第二可移动部分可旋转地连接到第一可移动部分并且包括改变光路的反射镜。线圈部分包括从第一和第二可移动部分的顶表面突出的多个线圈部分。变形抑制部包括形成在线圈部之间的第一和第二可动部中的多个槽。变形抑制部抑制向线圈部施加电流时发生的热变形，以减少第一和第二可动部的变形。

6. 发明申请

US20070296532A1 MEMS device 审中-公开
标题翻译： MEMS器件
公开(公告)号：US20070296532A1
公开(公告)日：2007-12-27
申请号：US11709854
申请日：2007-02-23
申请人： Young-chul Ko , Jin-woo Cho , Yong-hwa Park , Hee-moon Jeong
发明人： Young-chul Ko , Jin-woo Cho , Yong-hwa Park , Hee-moon Jeong
IPC分类号： H01F7/00
CPC分类号： B81B3/0062 , B81B2201/042 , B81B2203/058 , G02B26/085 , H02K33/18
摘要： A two-axis micro-electro mechanical system (MEMS) device includes a moving plate, a stage, a driving coil, a pair of magnets, and a yoke magnetic body. The moving plate is supported coaxially on a first axis to move pivotably about the first axis. The stage is supported coaxially on the second axis in an inner region of the moving plate. The driving coil includes a coaxial coil portion arranged along the first axis of the driving plate and divided at a center by the stage, and a first connecting coil portion and a second connecting coil portion. The yoke magnetic body is disposed between the pair of magnets in a region above or below the magnets and is formed of a material capable of being magnetized by the magnets in order to suddenly change a magnetic flux density according to a distance between the pair of magnets.
摘要翻译：双轴微电子机械系统（MEMS）装置包括移动板，台，驱动线圈，一对磁体和轭磁体。移动板同轴地支撑在第一轴线上，以围绕第一轴线可枢转地运动。舞台在移动板的内部区域中同轴地支撑在第二轴上。驱动线圈包括沿着驱动板的第一轴线布置并在台架的中心被分割的同轴线圈部分，以及第一连接线圈部分和第二连接线圈部分。轭磁体设置在磁体上方或下方的区域中的一对磁体之间，并且由能够被磁体磁化的材料形成，以便根据一对磁体之间的距离突然改变磁通密度。

7. 发明授权

US07724411B2 2-axis driving electromagnetic scanner 失效
标题翻译： 2轴驱动电磁扫描仪
公开(公告)号：US07724411B2
公开(公告)日：2010-05-25
申请号：US12045722
申请日：2008-03-11
申请人： Young-chul Ko , Jun-o Kim , Jin-woo Cho , Hee-moon Jeong , Woo-hyek Choi
发明人： Young-chul Ko , Jun-o Kim , Jin-woo Cho , Hee-moon Jeong , Woo-hyek Choi
IPC分类号： G02B26/08
CPC分类号： G02B26/085 , G02B26/101
摘要： A 2-axis driving electromagnetic scanner, having a structure in which a mirror is separated from a driving unit and directly driven, is provided. The electromagnetic scanner includes: an outer driving unit which is capable of rotating around a first axis; an inner driving unit which is suspended from the outer driving unit so as to rotate around a second axis perpendicular to the first axis; and a stage which is located on an upper surface of the inner driving unit so as to rotate together with the inner driving unit. In the electromagnetic scanner, the stage is connected to the inner driving unit by a link unit protruding from a center of a lower surface of the stage.
摘要翻译：提供具有将反射镜与驱动单元分离并直接驱动的结构的2轴驱动电磁扫描器。电磁扫描器包括：能够围绕第一轴线旋转的外部驱动单元; 内部驱动单元，其从所述外部驱动单元悬挂以围绕垂直于所述第一轴线的第二轴线旋转; 以及位于内驱动单元的上表面上以与内驱动单元一起旋转的台。在电磁扫描器中，通过从台的下表面的中心突出的连杆单元将台连接到内驱动单元。

8. 发明申请

US20090080049A1 2-AXIS DRIVING ELECTROMAGNETIC SCANNER 失效
标题翻译：双轴驱动电磁扫描仪
公开(公告)号：US20090080049A1
公开(公告)日：2009-03-26
申请号：US12045722
申请日：2008-03-11
申请人： Young-chul KO , Jun-o Kim , Jin-woo Cho , Hee-moon Jeong , Woo-hyek Choi
发明人： Young-chul KO , Jun-o Kim , Jin-woo Cho , Hee-moon Jeong , Woo-hyek Choi
IPC分类号： G02B26/08
CPC分类号： G02B26/085 , G02B26/101
摘要： A 2-axis driving electromagnetic scanner, having a structure in which a mirror is separated from a driving unit and directly driven, is provided. The electromagnetic scanner includes: an outer driving unit which is capable of rotating around a first axis; an inner driving unit which is suspended from the outer driving unit so as to rotate around a second axis perpendicular to the first axis; and a stage which is located on an upper surface of the inner driving unit so as to rotate together with the inner driving unit. In the electromagnetic scanner, the stage is connected to the inner driving unit by a link unit protruding from a center of a lower surface of the stage.
摘要翻译：提供具有将反射镜与驱动单元分离并直接驱动的结构的2轴驱动电磁扫描器。电磁扫描器包括：能够围绕第一轴线旋转的外部驱动单元; 内部驱动单元，其从所述外部驱动单元悬挂以围绕垂直于所述第一轴线的第二轴线旋转; 以及位于内驱动单元的上表面上以与内驱动单元一起旋转的台。在电磁扫描器中，通过从台的下表面的中心突出的连杆单元将台连接到内驱动单元。

9. 发明申请

US20070120207A1 Torsion spring for MEMS structure 审中-公开
标题翻译：用于MEMS结构的扭转弹簧
公开(公告)号：US20070120207A1
公开(公告)日：2007-05-31
申请号：US11582481
申请日：2006-10-18
申请人： Hee-moon Jeong , Young-chul Ko
发明人： Hee-moon Jeong , Young-chul Ko
IPC分类号： H01L29/84
CPC分类号： B81B3/0067 , B81B2203/058
摘要： A torsion spring for a micro-electro-mechanical system (MEMS) structure is provided. The torsion spring is connected between a pivoting member and a fixed member and supports the pivoting member so that the pivoting member can pivot about the torsion spring. The torsion spring includes: a horizontal beam; at least one vertical beam formed on the horizontal beam; and a plurality of auxiliary beams formed on the horizontal beam and parallel to the vertical beam.
摘要翻译：提供了用于微电子机械系统（MEMS）结构的扭转弹簧。扭转弹簧连接在枢转构件和固定构件之间并且支撑枢转构件，使得枢转构件能够围绕扭转弹簧枢转。扭簧包括：水平梁; 在水平梁上形成的至少一个垂直梁; 以及形成在水平梁上并平行于垂直梁的多个辅助光束。

10. 发明授权

US07043987B2 Rotary gyroscope 有权
标题翻译：旋转陀螺仪
公开(公告)号：US07043987B2
公开(公告)日：2006-05-16
申请号：US10793331
申请日：2004-03-05
申请人： Hee-moon Jeong , In-seob Song , Seok-jin Kang
发明人： Hee-moon Jeong , In-seob Song , Seok-jin Kang
IPC分类号： G01P9/04
CPC分类号： G01C19/5642 , G01C19/02
摘要： A rotary gyroscope includes a base plate, an intermediate structure, including a driven element floating over the base plate and supported by a driving supporter radially extending therefrom, the driven element performing an oscillating motion with respect to a first axis, which is normal to a center plane thereof, a driving electrode driving the driven element, and a sensing element disposed in the driven element and connected to the driven element by a sensing connector to oscillate together with the driven element and concurrently to perform a sensing motion with respect to a third axis, which is normal to the first axis and any second axis, which is parallel to a center plane, due to a Coriolis force when an angular velocity is inputted from the second axis, and a cover covering the intermediate structure and having a sensing electrode to detect the sensing motion of the sensing element.
摘要翻译：旋转陀螺仪包括基板，中间结构，其包括浮动在基板上并被由其径向延伸的驱动支撑件支撑的从动元件，所述从动元件相对于第一轴执行振荡运动，该第一轴垂直于驱动驱动元件的驱动电极，以及设置在从动元件中并通过感测连接器与被驱动元件连接的传感元件，与驱动元件一起摆动，并且同时执行相对于第三驱动元件的感测运动轴，其平行于中心平面垂直于第一轴线和任何第二轴线，由于当从第二轴线输入角速度时的科里奥利力，以及覆盖中间结构并具有感测电极的盖子以检测感测元件的感测运动。

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