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1. 发明授权

US06796178B2 Rotation-type decoupled MEMS gyroscope 失效
标题翻译：旋转型解耦MEMS陀螺仪
公开(公告)号：US06796178B2
公开(公告)日：2004-09-28
申请号：US10359272
申请日：2003-02-06
申请人： Hee-moon Jeong , Jun-o Kim , Byeung-leul Lee , Sang-woo Lee
发明人： Hee-moon Jeong , Jun-o Kim , Byeung-leul Lee , Sang-woo Lee
IPC分类号： G01P904
CPC分类号： G01C19/5712
摘要： A rotation-type decoupled MEMS gyroscope including a drive body movable about the X-axis, a sensing body movable about the Z-axis, a medium body moving together with the drive body about the X-axis and the sensing body about the Z-axis. The drive body is fixed on a substrate by a first torsion spring torsion-deformed about the X-axis, and the medium body is connected to the drive body by a first bending spring bending-deformed about the Z-axis. The sensing body is connected to the medium body by a second torsion spring torsion-deformed about the X-axis and fixed to the substrate by a second bending spring bending-deformed about the Z-axis. If angular velocity is applied relative to the Y-axis while the drive body vibrates in a certain range about the X-axis by a driving electrode, the sensing body rotates about the Z-axis by the Coriolis force and a sensing electrode senses the rotation.
摘要翻译：旋转型解耦MEMS陀螺仪，其包括可围绕X轴移动的驱动体，围绕Z轴可移动的感测体，与驱动体一起围绕X轴移动的介质体和围绕Z轴的传感体，轴。驱动体通过围绕X轴扭转变形的第一扭转弹簧固定在基板上，并且介质体通过围绕Z轴弯曲变形的第一弯曲弹簧连接到驱动体。感测体通过围绕X轴扭转变形的第二扭转弹簧连接到介质主体，并通过围绕Z轴弯曲变形的第二弯曲弹簧固定到基板。如果驱动体通过驱动电极绕X轴在一定范围内振动，则相对于Y轴施加角速度，则感测体通过科里奥利力围绕Z轴旋转，感测电极感测旋转。

2. 发明授权

US07501911B2 Vertical comb actuator radio frequency micro-electro-mechanical system switch 有权
标题翻译：立式梳子执行器射频微机电系统开关
公开(公告)号：US07501911B2
公开(公告)日：2009-03-10
申请号：US11417242
申请日：2006-05-04
申请人： Young-tack Hong , Seok-chul Yun , Seok-mo Chang , Sang-wook Kwon , Che-heung Kim , Jong-seok Kim , Hee-moon Jeong , Sang-hun Lee , Jun-o Kim , In-sang Song
发明人： Young-tack Hong , Seok-chul Yun , Seok-mo Chang , Sang-wook Kwon , Che-heung Kim , Jong-seok Kim , Hee-moon Jeong , Sang-hun Lee , Jun-o Kim , In-sang Song
IPC分类号： H01P1/15
CPC分类号： H01H59/0009
摘要： A vertical comb actuator radio frequency (RF) micro-electro-mechanical system (MEMS) switch. The RF MEMS switch includes a substrate; first and second signal lines spaced at a predetermined interval from each other and deposited on an upper surface of the substrate; an actuator positioned over the first and second signal lines when viewed from the upper surface of the substrate and spaced at a predetermined interval from the first and second signal lines; and a fixing portion positioned over the actuator when viewed from the upper surface of the substrate, wherein the fixing portion permits the actuator to come in contact with the first and second signal lines when a predetermined driving voltage is applied. Thus, it is possible to prevent the actuator from sticking to the substrate. In addition, the RF MEMS switch can be operated with a low voltage and insertion loss and power loss can be reduced.
摘要翻译：立式梳子致动器射频（RF）微机电系统（MEMS）开关。 RF MEMS开关包括基板; 第一和第二信号线以预定间隔彼此间隔开并沉积在基板的上表面上; 当从所述基板的上表面观察并且以与所述第一信号线和所述第二信号线预定的间隔隔开时，致动器定位在所述第一和第二信号线上方; 以及当从基板的上表面观察时定位在致动器上方的固定部分，其中当施加预定的驱动电压时，固定部分允许致动器与第一和第二信号线接触。因此，可以防止致动器粘附到基板。此外，RF MEMS开关可以在低电压和插入损耗下工作，并且可以降低功率损耗。

3. 发明申请

US20070024403A1 MEMS switch actuated by the electrostatic force and piezoelectric force 审中-公开
标题翻译： MEMS开关由静电力和压电力驱动
公开(公告)号：US20070024403A1
公开(公告)日：2007-02-01
申请号：US11439144
申请日：2006-05-24
申请人： Sang-wook Kwon , Jun-o Kim , In-sang Song , Sang-hun Lee , Dong-kyun Kim , Hee-moon Jeong , Young-tack Hong , Jong-seok Kim , Che-heung Kim
发明人： Sang-wook Kwon , Jun-o Kim , In-sang Song , Sang-hun Lee , Dong-kyun Kim , Hee-moon Jeong , Young-tack Hong , Jong-seok Kim , Che-heung Kim
IPC分类号： H01H51/22
CPC分类号： H01H59/0009 , H01H2057/006
摘要： A MEMS (Micro Electro Mechanical Systems) switch actuated by electrostatic and piezoelectric forces, includes a substrate; a first contact point positioned in a predetermined first area on an upper surface of the substrate; a support layer suspended at a predetermined distance from the upper surface of the substrate; a second contact point formed on a lower surface of the support layer; a first actuator operative to move the support layer in a predetermined direction using an electrostatic force; and a second actuator operative to move the support layer in a predetermined direction using a piezoelectric force. The first actuator is used to turn on the MEMS switch. The second actuator can be used together with the first actuator to turn on the MEMS switch or can be separately used to turn off the MEMS switch. As a result, a stiction can be prevented from occurring between contact points.
摘要翻译：由静电和压电力驱动的MEMS（微机电系统）开关包括基板; 位于所述基板的上表面上的预定第一区域中的第一接触点; 从衬底的上表面预定距离悬挂的支撑层; 形成在所述支撑层的下表面上的第二接触点; 第一致动器，用于使用静电力使支撑层沿预定方向移动; 以及第二致动器，其用于使用压电力使支撑层沿预定方向移动。第一个致动器用于打开MEMS开关。第二致动器可以与第一致动器一起使用以打开MEMS开关，或者可以单独使用来关闭MEMS开关。结果，可以防止在接触点之间发生静电。

4. 发明申请

US20070171500A1 Micro mirror employing piezo actuator 审中-公开
标题翻译：微镜采用压电致动器
公开(公告)号：US20070171500A1
公开(公告)日：2007-07-26
申请号：US11472321
申请日：2006-06-22
申请人： Hee-moon Jeong , Jun-o Kim , Hwa-sun Lee
发明人： Hee-moon Jeong , Jun-o Kim , Hwa-sun Lee
IPC分类号： G02B26/08
CPC分类号： G02B26/0858
摘要： A micro device and a micro mirror employing a piezo actuator are provided. The micro mirror includes a substrate; a plate which is rotatably suspended about a rotation axis over the substrate; at least two cantilevers, each comprising a fixed end fixed to the substrate, and a free end perpendicularly crossing the rotation axis of the plate and connecting to a side of the plate, each cantilever having a piezo actuator installed on an upper surface of the cantilever; a plurality of connectors each one of which connects the free end of a corresponding one of the cantilevers to a side of the plate; and a pair of torsion springs which are connected to the plate and act as a rotational axis for the plate.
摘要翻译：提供了一种使用压电致动器的微器件和微镜。微反射镜包括基板; 围绕基板上的旋转轴线可旋转地悬挂的板; 至少两个悬臂，每个悬臂均固定在基板上，固定端固定在垂直于板的旋转轴线并与板的一侧连接的自由端，每个悬臂具有安装在悬臂上表面上的压电致动器 ; 多个连接器，每个连接器将相应的悬臂的自由端连接到板的一侧; 以及一对扭转弹簧，其连接到板并用作板的旋转轴线。

5. 发明授权

US07977207B2 MEMS device and fabrication method of the same 有权
标题翻译： MEMS器件及其制造方法相同
公开(公告)号：US07977207B2
公开(公告)日：2011-07-12
申请号：US12856308
申请日：2010-08-13
申请人： Hee-moon Jeong , Jin-woo Cho , Yong-hwa Park , Jun-o Kim , Seok-mo Chang
发明人： Hee-moon Jeong , Jin-woo Cho , Yong-hwa Park , Jun-o Kim , Seok-mo Chang
IPC分类号： H02N1/00
CPC分类号： B81B3/0051 , B81B2201/042 , B81B2203/058 , G02B26/085 , G02B26/101 , G02B26/105
摘要： A microelectromechanical systems (MEMS) device includes a frame, an actuator formed on the same layer as the frame and connected to the frame to be capable of performing a relative motion with respect to the frame, and at least one stopper restricting a displacement of the actuator in a direction along the height of the actuator. The MEMS device is fabricated by bonding a second substrate to a first substrate, forming the frame and the actuator by partially removing the first substrate, and forming the at least one stopper by partially removing the second substrate.
摘要翻译：微机电系统（MEMS）装置包括框架，致动器，其形成在与框架相同的层上并连接到框架以能够相对于框架执行相对运动;以及至少一个限制器致动器沿着致动器高度的方向。 MEMS器件通过将第二衬底接合到第一衬底，通过部分去除第一衬底而形成框架和致动器，并且通过部分去除第二衬底来形成至少一个止动器来制造。

6. 发明授权

US07446634B2 MEMS switch and manufacturing method thereof 有权
标题翻译： MEMS开关及其制造方法
公开(公告)号：US07446634B2
公开(公告)日：2008-11-04
申请号：US11429364
申请日：2006-05-08
申请人： Hee-moon Jeong , Sang-wook Kwon , Che-heung Kim , Jong-seok Kim , Jun-o Kim , Young-tack Hong , In-sang Song , Sang-hun Lee
发明人： Hee-moon Jeong , Sang-wook Kwon , Che-heung Kim , Jong-seok Kim , Jun-o Kim , Young-tack Hong , In-sang Song , Sang-hun Lee
IPC分类号： H01H51/22
CPC分类号： H01H59/0009 , H01H2059/0054
摘要： A MEMS switch including a substrate at least one fixed electrode formed on top of the substrate and at least one restoring electrode formed on top of the substrate and formed at a lateral surface of the fixed electrode. At least one signal line is formed on top of the substrate and has a switching contact part. A movable electrode is distantly connected from the top of the substrate at a predetermined space via an elastic connector on the substrate and at least one contact member formed on a bottom surface of the movable electrode or on a bottom surface of the elastic connector for attachment to or detachment from the switching contact part. At least one pivot boss is formed on either the bottom surface of the movable electrode or on the top of the substrate.
摘要翻译：一种MEMS开关，其包括形成在所述基板的顶部上的至少一个固定电极的基板和形成在所述基板的顶部上并形成在所述固定电极的侧表面上的至少一个恢复电极。至少一个信号线形成在基板的顶部上并且具有开关接触部分。可移动电极通过基板上的弹性连接器在预定空间处从基板的顶部远离连接，以及形成在可动电极的底表面上或弹性连接器的底表面上的至少一个接触件，用于附接到或从开关接触部分拆卸。至少一个枢转凸起形成在可动电极的底表面上或衬底的顶部上。

7. 发明申请

US20100304517A1 MEMS DEVICE AND FABRICATION METHOD OF THE SAME 有权
标题翻译： MEMS器件及其制造方法
公开(公告)号：US20100304517A1
公开(公告)日：2010-12-02
申请号：US12856308
申请日：2010-08-13
申请人： Hee-moon Jeong , Jin-woo Cho , Yong-hwa Park , Jun-o Kim , Seok-mo Chang
发明人： Hee-moon Jeong , Jin-woo Cho , Yong-hwa Park , Jun-o Kim , Seok-mo Chang
IPC分类号： H01L21/00
CPC分类号： B81B3/0051 , B81B2201/042 , B81B2203/058 , G02B26/085 , G02B26/101 , G02B26/105
摘要： A microelectromechanical systems (MEMS) device includes a frame, an actuator formed on the same layer as the frame and connected to the frame to be capable of performing a relative motion with respect to the frame, and at least one stopper restricting a displacement of the actuator in a direction along the height of the actuator. The MEMS device is fabricated by bonding a second substrate to a first substrate, forming the frame and the actuator by partially removing the first substrate, and forming the at least one stopper by partially removing the second substrate.
摘要翻译：微机电系统（MEMS）装置包括框架，致动器，其形成在与框架相同的层上并连接到框架以能够相对于框架执行相对运动;以及至少一个限制器致动器沿着致动器高度的方向。 MEMS器件通过将第二衬底接合到第一衬底，通过部分去除第一衬底而形成框架和致动器，并且通过部分去除第二衬底来形成至少一个止动器来制造。

8. 发明授权

US07724411B2 2-axis driving electromagnetic scanner 失效
标题翻译： 2轴驱动电磁扫描仪
公开(公告)号：US07724411B2
公开(公告)日：2010-05-25
申请号：US12045722
申请日：2008-03-11
申请人： Young-chul Ko , Jun-o Kim , Jin-woo Cho , Hee-moon Jeong , Woo-hyek Choi
发明人： Young-chul Ko , Jun-o Kim , Jin-woo Cho , Hee-moon Jeong , Woo-hyek Choi
IPC分类号： G02B26/08
CPC分类号： G02B26/085 , G02B26/101
摘要： A 2-axis driving electromagnetic scanner, having a structure in which a mirror is separated from a driving unit and directly driven, is provided. The electromagnetic scanner includes: an outer driving unit which is capable of rotating around a first axis; an inner driving unit which is suspended from the outer driving unit so as to rotate around a second axis perpendicular to the first axis; and a stage which is located on an upper surface of the inner driving unit so as to rotate together with the inner driving unit. In the electromagnetic scanner, the stage is connected to the inner driving unit by a link unit protruding from a center of a lower surface of the stage.
摘要翻译：提供具有将反射镜与驱动单元分离并直接驱动的结构的2轴驱动电磁扫描器。电磁扫描器包括：能够围绕第一轴线旋转的外部驱动单元; 内部驱动单元，其从所述外部驱动单元悬挂以围绕垂直于所述第一轴线的第二轴线旋转; 以及位于内驱动单元的上表面上以与内驱动单元一起旋转的台。在电磁扫描器中，通过从台的下表面的中心突出的连杆单元将台连接到内驱动单元。

9. 发明申请

US20090080049A1 2-AXIS DRIVING ELECTROMAGNETIC SCANNER 失效
标题翻译：双轴驱动电磁扫描仪
公开(公告)号：US20090080049A1
公开(公告)日：2009-03-26
申请号：US12045722
申请日：2008-03-11
申请人： Young-chul KO , Jun-o Kim , Jin-woo Cho , Hee-moon Jeong , Woo-hyek Choi
发明人： Young-chul KO , Jun-o Kim , Jin-woo Cho , Hee-moon Jeong , Woo-hyek Choi
IPC分类号： G02B26/08
CPC分类号： G02B26/085 , G02B26/101
摘要： A 2-axis driving electromagnetic scanner, having a structure in which a mirror is separated from a driving unit and directly driven, is provided. The electromagnetic scanner includes: an outer driving unit which is capable of rotating around a first axis; an inner driving unit which is suspended from the outer driving unit so as to rotate around a second axis perpendicular to the first axis; and a stage which is located on an upper surface of the inner driving unit so as to rotate together with the inner driving unit. In the electromagnetic scanner, the stage is connected to the inner driving unit by a link unit protruding from a center of a lower surface of the stage.
摘要翻译：提供具有将反射镜与驱动单元分离并直接驱动的结构的2轴驱动电磁扫描器。电磁扫描器包括：能够围绕第一轴线旋转的外部驱动单元; 内部驱动单元，其从所述外部驱动单元悬挂以围绕垂直于所述第一轴线的第二轴线旋转; 以及位于内驱动单元的上表面上以与内驱动单元一起旋转的台。在电磁扫描器中，通过从台的下表面的中心突出的连杆单元将台连接到内驱动单元。

10. 发明申请

US20070024401A1 RF MEMS switch having asymmetrical spring rigidity 失效
标题翻译： RF MEMS开关具有不对称的弹簧刚度
公开(公告)号：US20070024401A1
公开(公告)日：2007-02-01
申请号：US11385700
申请日：2006-03-22
申请人： Jun-o Kim , Sang-wook Kwon , Che-heung Kim , Jong-seok Kim , Hee-moon Jeong , Young-tack Hong , Sang-hun Lee
发明人： Jun-o Kim , Sang-wook Kwon , Che-heung Kim , Jong-seok Kim , Hee-moon Jeong , Young-tack Hong , Sang-hun Lee
IPC分类号： H01P1/10
CPC分类号： H01P1/127 , B81B3/0013 , B81B2201/016 , H01H59/0009
摘要： An RF MEMS switch having asymmetrical spring rigidity. The RF MEMS switch has supporting members spaced apart in a certain interval on a substrate, a membrane being a motion member suspended by plural spring members extended on both sides of the membrane, and a bottom electrode being a contact surface on an upper surface of the substrate facing a bottom surface of the membrane, wherein the plural spring members placed on opposite sides of the membrane have asymmetrical rigidity, and a portion of the membrane on a side of stronger spring rigidity is first separated from the contact surface when the RF MEMS switch is turned off. The present invention has an advantage of easy separation of the switch from the contact surface, when the switch is turned off, due to the different rigidity of the springs located on the sides of the membrane.
摘要翻译：具有不对称弹簧刚度的RF MEMS开关。 RF MEMS开关具有在基板上以一定间隔隔开的支撑构件，膜是由在膜的两侧延伸的多个弹簧构件悬挂的运动构件，底电极是位于膜的上表面上的接触表面衬底面向膜的底表面，其中放置在膜的相对侧上的多个弹簧构件具有不对称的刚性，并且当RF MEMS开关在膜的另一侧具有更强的弹簧刚度的一部分首先与接触表面分离已关闭本发明的优点在于，当开关断开时，由于位于膜侧面的弹簧的刚度不同，开关与接触表面容易分离。

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