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1. 发明授权

US07884023B1 System and method for using siliciding PECVD silicon nitride as a dielectric anti-reflective coating and hard mask 有权
标题翻译：使用硅化PECVD氮化硅作为介电抗反射涂层和硬掩模的系统和方法
公开(公告)号：US07884023B1
公开(公告)日：2011-02-08
申请号：US11224150
申请日：2005-09-12
申请人： Heather E. McCulloh , Patrick McCarthy , Steven J. Adler , Henry G. Prosack, Jr.
发明人： Heather E. McCulloh , Patrick McCarthy , Steven J. Adler , Henry G. Prosack, Jr.
IPC分类号： H01L21/302 , H01L21/461
CPC分类号： H01L21/0217 , H01L21/02274 , H01L21/0276 , H01L21/32139 , H01L29/665 , H01L29/78
摘要： An electronic apparatus is disclosed that comprises a silicon nitride material that has an increased silicon content. The silicon nitride material is manufactured by exposing plasma enhanced chemical vapor deposition (PECVD) silicon nitride to an increased flow of silane while the PECVD silicon nitride is being deposited. The material has anti-reflective coating (ARC) properties and can also be used as a hard mask. When the material is covered with cobalt the material forms conductive cobalt silicide when the cobalt is annealed. A method for siliciding the PECVD silicon nitride is also disclosed.
摘要翻译：公开了一种包括硅含量增加的氮化硅材料的电子设备。氮化硅材料通过将等离子体增强化学气相沉积（PECVD）氮化硅暴露于增加的硅烷流而在沉积PECVD氮化硅的情况下制造。该材料具有抗反射涂层（ARC）性能，也可用作硬掩模。当材料被钴覆盖时，当钴退火时，材料形成导电钴硅化物。还公开了一种用于硅化PECVD氮化硅的方法。

2. 发明授权

US07678657B1 System and method for manufacturing an emitter structure in a complementary bipolar CMOS transistor manufacturing process 有权
标题翻译：用于在互补双极型CMOS晶体管制造工艺中制造发射极结构的系统和方法
公开(公告)号：US07678657B1
公开(公告)日：2010-03-16
申请号：US11591850
申请日：2006-11-02
申请人： Todd Patrick Thibeault , Steven J. Adler , Scott David Ruby
发明人： Todd Patrick Thibeault , Steven J. Adler , Scott David Ruby
IPC分类号： H01L21/44
CPC分类号： H01L21/8249
摘要： A system and method are disclosed for manufacturing an emitter structure in a complementary bipolar complementary metal oxide semiconductor (CBiCMOS) transistor manufacturing process. A protective layer is formed over an emitter layer in a transistor structure and lateral portions of the protective layer and the emitter layer are etched to form an emitter structure. An oxide layer is then deposited over the transistor structure and an etchback process is performed to remove portions of the oxide layer from the top of the protective layer. A source/drain implant process is then performed to implant an extrinsic base region of the transistor. The protective layer protects the emitter structure from the implant process. Then the protective layer is removed from the emitter structure.
摘要翻译：公开了用于制造互补双极互补金属氧化物半导体（CBiCMOS）晶体管制造工艺中的发射极结构的系统和方法。在晶体管结构中的发射极层上形成保护层，并且保护层和发射极层的横向部分被蚀刻以形成发射极结构。然后在晶体管结构上沉积氧化物层，并且执行回蚀工艺以从保护层的顶部去除氧化物层的部分。然后执行源极/漏极注入工艺以注入晶体管的外部基极区域。保护层保护发射器结构免受植入过程的影响。然后从发射器结构去除保护层。

3. 发明授权

US08563345B2 Integration of structurally-stable isolated capacitive micromachined ultrasonic transducer (CMUT) array cells and array elements 有权
标题翻译：结构稳定的隔离电容微加工超声波传感器（CMUT）阵列单元和阵列元件的集成
公开(公告)号：US08563345B2
公开(公告)日：2013-10-22
申请号：US13419216
申请日：2012-03-13
申请人： Steven J. Adler , Peter Johnson , Gokhan Percin , Shahram Mostafazadeh
发明人： Steven J. Adler , Peter Johnson , Gokhan Percin , Shahram Mostafazadeh
IPC分类号： H01L29/72
CPC分类号： H01L27/1203 , B06B1/0292 , G01N29/2406 , H01L21/76898
摘要： A method for forming a capacitive micromachined ultrasonic transducer (CMUT) includes forming multiple CMUT elements in a first semiconductor-on-insulator (SOI) structure. Each CMUT element includes multiple CMUT cells. The first SOI structure includes a first handle wafer, a first buried layer, and a first active layer. The method also includes forming a membrane over the CMUT elements and forming electrical contacts through the first handle wafer and the first buried layer. The electrical contacts are in electrical connection with the CMUT elements. The membrane could be formed by bonding a second SOI structure to the first SOI structure, where the second SOI structure includes a second handle wafer, a second buried layer, and a second active layer. The second handle wafer and the second buried layer can be removed, and the membrane includes the second active layer.
摘要翻译：一种用于形成电容微加工超声换能器（CMUT）的方法包括在第一绝缘体上绝缘体（SOI）结构中形成多个CMUT元件。每个CMUT元素包括多个CMUT单元。第一SOI结构包括第一处理晶片，第一掩埋层和第一有源层。该方法还包括在CMUT元件上形成膜并通过第一处理晶片和第一掩埋层形成电触点。电触点与CMUT元件电连接。可以通过将第二SOI结构结合到第一SOI结构来形成膜，其中第二SOI结构包括第二处理晶片，第二掩埋层和第二有源层。可以去除第二处理晶片和第二掩埋层，并且膜包括第二有源层。

4. 发明申请

US20130001647A1 INTEGRATION OF VERTICAL BJT OR HBT INTO SOI TECHNOLOGY 审中-公开
标题翻译：将垂直BJT或HBT集成到SOI技术中
公开(公告)号：US20130001647A1
公开(公告)日：2013-01-03
申请号：US13170473
申请日：2011-06-28
申请人： Steven J. Adler
发明人： Steven J. Adler
IPC分类号： H01L21/331 , H01L29/737 , H01L29/732
CPC分类号： H01L29/7317 , H01L21/84 , H01L27/1207 , H01L29/66242 , H01L29/66265 , H01L29/66272 , H01L29/7322 , H01L29/7371
摘要： In an embodiment, a bipolar transistor structure is formed on a silicon-on-insulator (SOI) structure that includes a semiconductor substrate, a buried oxide layer formed on the semiconductor substrate and a top silicon layer formed on the buried oxide layer. The bipolar transistor structure includes: an opening formed in the top silicon layer; an opening in the buried oxide layer beneath the opening in the top silicon layer, the opening in the buried oxide layer including a region that undercuts the opening in the top silicon layer at a side of the opening in the top silicon layer; conductive material having a first conductivity type formed in the opening in the buried oxide layer such that the conductive material includes a region that undercuts the top silicon layer at the side of the opening in the top silicon layer; isolation dielectric material formed in the top silicon layer over the region of conductive material that undercuts the top silicon layer to define a bipolar transistor collector region having the first conductivity type, the collector region being in contact with the region of conductive material; a bipolar transistor base region formed in contact with an upper surface of the collector region, the base region having a second conductivity type that is opposite the first conductivity type; and an emitter region formed in contact with the base region, the emitter region having the first conductivity type.
摘要翻译：在一个实施例中，在包括半导体衬底，形成在半导体衬底上的掩埋氧化物层和形成在掩埋氧化物层上的顶部硅层的绝缘体上硅（SOI）结构上形成双极晶体管结构。双极晶体管结构包括：形成在顶部硅层中的开口; 在顶层硅层开口下方的埋置氧化物层中的开口，掩埋氧化物层中的开口包括在顶部硅层中的开口侧的顶部硅层中的开口下切的区域; 具有第一导电类型的导电材料，形成在掩埋氧化物层中的开口中，使得导电材料包括在顶部硅层中的开口侧的顶部硅层下切的区域; 隔离电介质材料，形成在导电材料区域上的顶部硅层中，该导电材料区域覆盖顶部硅层以限定具有第一导电类型的双极晶体管集电极区域，该集电极区域与导电材料区域接触; 形成为与所述集电极区域的上表面接触的双极晶体管基极区域，所述基极区域具有与所述第一导电类型相反的第二导电类型; 以及与基极区域接触形成的发射极区域，发射极区域具有第一导电类型。

5. 发明授权

US5252848A Low on resistance field effect transistor 失效
标题翻译：低导通电阻场效应晶体管
公开(公告)号：US5252848A
公开(公告)日：1993-10-12
申请号：US829190
申请日：1992-02-03
申请人： Steven J. Adler , Robert B. Davies , Stephen J. Nugent , Hassan Pirastehfar
发明人： Steven J. Adler , Robert B. Davies , Stephen J. Nugent , Hassan Pirastehfar
IPC分类号： H01L29/06 , H01L29/10 , H01L29/40 , H01L29/417 , H01L29/78
CPC分类号： H01L29/402 , H01L29/1045 , H01L29/1087 , H01L29/4175 , H01L29/41775 , H01L29/7813 , H01L29/7835
摘要： A performance enhancing conductor (27) is employed to reduce a transistor's (10) on resistance and to also reduce the transistor's (10) parasitic gate to drain capacitance (32). The performance enhancing conductor (27) covers the transistor's (10) gate (22) and a portion of the drain region (18, 19) that is adjacent the transistor's channel (20). The performance enhancing conductor (27) is isolated from the gate (22) by an insulator (24, 26).
摘要翻译：使用性能增强导体（27）来减小晶体管（10）导通电阻并且还将晶体管（10）的寄生栅极减小到漏极电容（32）。性能增强导体（27）覆盖晶体管（10）栅极（22）和与晶体管通道（20）相邻的漏极区域（18,19）的一部分。性能增强导体（27）通过绝缘体（24,26）与栅极（22）隔离。

6. 发明授权

US08324006B1 Method of forming a capacitive micromachined ultrasonic transducer (CMUT) 有权
标题翻译：形成电容微加工超声波换能器（CMUT）的方法
公开(公告)号：US08324006B1
公开(公告)日：2012-12-04
申请号：US12589754
申请日：2009-10-28
申请人： Steven J. Adler , Peter Johnson , Ira Wygant
发明人： Steven J. Adler , Peter Johnson , Ira Wygant
IPC分类号： H01H9/00 , H01L21/449
CPC分类号： B06B1/0292
摘要： A method includes forming first isolation trenches in a first side of a first semiconductor-on-insulator (SOI) structure to electrically isolate multiple portions of the first SOI structure from each other. The method also includes bonding a second SOI structure to the first SOI structure to form multiple cavities between the SOI structures. The method further includes forming conductive plugs through a second side of the first SOI structure and forming second isolation trenches in the second side of the first SOI structure around the conductive plugs. In addition, the method includes removing portions of the second SOI structure to leave a membrane bonded to the first SOI structure. The isolated portions of the first SOI structure, the cavities, and the membrane form multiple capacitive micromachined ultrasonic transducer (CMUT) elements. Each CMUT element is formed in one of the isolated portions of the first SOI structure and includes multiple CMUT cells.
摘要翻译：一种方法包括在第一绝缘体绝缘体（SOI）结构的第一侧中形成第一隔离沟槽，以将第一SOI结构的多个部分彼此电隔离。该方法还包括将第二SOI结构接合到第一SOI结构以在SOI结构之间形成多个空腔。该方法还包括通过第一SOI结构的第二侧形成导电插塞，并在导电插塞周围的第一SOI结构的第二侧形成第二隔离沟槽。此外，该方法包括去除第二SOI结构的部分以留下结合到第一SOI结构的膜。第一SOI结构，空腔和膜的隔离部分形成多个电容微加工超声换能器（CMUT）元件。每个CMUT元件形成在第一SOI结构的隔离部分之一中，并且包括多个CMUT单元。

7. 发明授权

US07910447B1 System and method for providing a self aligned bipolar transistor using a simplified sacrificial nitride emitter 有权
标题翻译：使用简化的牺牲氮化物发射器提供自对准双极晶体管的系统和方法
公开(公告)号：US07910447B1
公开(公告)日：2011-03-22
申请号：US11803539
申请日：2007-05-15
申请人： Mingwei Xu , Steven J. Adler
发明人： Mingwei Xu , Steven J. Adler
IPC分类号： H01L21/8222
CPC分类号： H01L29/0821 , H01L29/66287 , H01L29/7322
摘要： A system and method are disclosed for providing a self aligned bipolar transistor using a simplified sacrificial nitride emitter. An active region of a transistor is formed and a silicon nitride sacrificial emitter is formed above the active region of the transistor. Then a physical vapor deposition oxide layer is deposited over the silicon nitride sacrificial emitter using a physical vapor deposition process. The physical vapor deposition oxide layer is then etched away from the side walls of the sacrificial emitter. The sacrificial emitter is then etched away to form an emitter window. Then a polysilicon emitter structure is formed in the emitter window. The self aligned bipolar transistor architecture of the invention is compatible with BiCMOS technology.
摘要翻译：公开了一种使用简化的牺牲氮化物发射器提供自对准双极晶体管的系统和方法。形成晶体管的有源区，并且在晶体管的有源区上方形成氮化硅牺牲发射极。然后使用物理气相沉积工艺在氮化硅牺牲发射体上沉积物理气相沉积氧化物层。物理气相沉积氧化物层然后从牺牲发射体的侧壁蚀刻掉。然后将牺牲发射器蚀刻掉以形成发射器窗口。然后在发射器窗口中形成多晶硅发射极结构。本发明的自对准双极晶体管结构与BiCMOS技术兼容。

8. 发明授权

US07781295B1 System and method for providing a single deposition emitter/base in a bipolar junction transistor 有权
标题翻译：在双极结型晶体管中提供单个沉积发射极/基极的系统和方法
公开(公告)号：US07781295B1
公开(公告)日：2010-08-24
申请号：US11486967
申请日：2006-07-13
申请人： Jamal Ramdani , Craig Printy , Steven J. Adler , Andre P. Labonte
发明人： Jamal Ramdani , Craig Printy , Steven J. Adler , Andre P. Labonte
IPC分类号： H01L21/331
CPC分类号： H01L29/7371 , H01L29/66287
摘要： A system and method is disclosed for manufacturing a bipolar junction transistor that comprises an emitter/base layer that is formed by a single deposition process. In one advantageous embodiment of the invention the emitter/base layer comprises an emitter layer that comprises an epitaxially grown mono-silicon emitter. The epitaxially grown mono-silicon emitter significantly reduces the electrical resistivity of the emitter. A non-dopant impurity such as germanium is added to the base layer to endpoint a dry plasma etch process that is applied to etch the emitter/base layer.
摘要翻译：公开了用于制造双极结型晶体管的系统和方法，该双极结型晶体管包括通过单个沉积工艺形成的发射极/基极层。在本发明的一个有利实施例中，发射极/基极层包括包含外延生长单晶硅发射极的发射极层。外延生长的单硅发射极显着降低了发射极的电阻率。将诸如锗的非掺杂杂质添加到基底层中，以终止用于蚀刻发射极/基底层的干等离子体蚀刻工艺。

9. 发明申请

US20120187508A1 INTEGRATION OF STRUCTURALLY-STABLE ISOLATED CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER (CMUT) ARRAY CELLS AND ARRAY ELEMENTS 有权
标题翻译：结构稳定隔离电容式微超声波超声波传感器（CMUT）阵列单元和阵列元件的集成
公开(公告)号：US20120187508A1
公开(公告)日：2012-07-26
申请号：US13419216
申请日：2012-03-13
申请人： Steven J. Adler , Peter Johnson , Gokhan Percin , Shahram Mostafazadeh
发明人： Steven J. Adler , Peter Johnson , Gokhan Percin , Shahram Mostafazadeh
IPC分类号： H01L29/84 , H01L21/50
CPC分类号： H01L27/1203 , B06B1/0292 , G01N29/2406 , H01L21/76898
摘要： A method for forming a capacitive micromachined ultrasonic transducer (CMUT) includes forming multiple CMUT elements in a first semiconductor-on-insulator (SOI) structure. Each CMUT element includes multiple CMUT cells. The first SOI structure includes a first handle wafer, a first buried layer, and a first active layer. The method also includes forming a membrane over the CMUT elements and forming electrical contacts through the first handle wafer and the first buried layer. The electrical contacts are in electrical connection with the CMUT elements. The membrane could be formed by bonding a second SOI structure to the first SOI structure, where the second SOI structure includes a second handle wafer, a second buried layer, and a second active layer. The second handle wafer and the second buried layer can be removed, and the membrane includes the second active layer.
摘要翻译：一种用于形成电容微加工超声换能器（CMUT）的方法包括在第一绝缘体上绝缘体（SOI）结构中形成多个CMUT元件。每个CMUT元素包括多个CMUT单元。第一SOI结构包括第一处理晶片，第一掩埋层和第一有源层。该方法还包括在CMUT元件上形成膜并通过第一处理晶片和第一掩埋层形成电触点。电触点与CMUT元件电连接。可以通过将第二SOI结构结合到第一SOI结构来形成膜，其中第二SOI结构包括第二处理晶片，第二掩埋层和第二有源层。可以去除第二处理晶片和第二掩埋层，并且膜包括第二有源层。

10. 发明授权

US07927958B1 System and method for providing a self aligned bipolar transistor using a silicon nitride ring 有权
标题翻译：使用氮化硅环提供自对准双极晶体管的系统和方法
公开(公告)号：US07927958B1
公开(公告)日：2011-04-19
申请号：US11803515
申请日：2007-05-15
申请人： Mingwei Xu , Steven J. Adler
发明人： Mingwei Xu , Steven J. Adler
IPC分类号： H01L21/00
CPC分类号： H01L29/732 , H01L29/0821 , H01L29/66287
摘要： A system and method are disclosed for providing a self aligned bipolar transistor using a silicon nitride ring. An active region of the transistor is formed and a sacrificial emitter is formed above the active region of the transistor. A silicon nitride ring is formed around the sacrificial emitter. The sacrificial emitter and the silicon nitride ring are formed by depositing a layer of silicon nitride material over the active area of the transistor and performing an etch process to simultaneously create both the sacrificial emitter and the silicon nitride ring. The silicon nitride ring provides support for forming a raised external base for the transistor.
摘要翻译：公开了一种用于提供使用氮化硅环的自对准双极晶体管的系统和方法。形成晶体管的有源区，并在晶体管的有源区之上形成牺牲发射极。在牺牲发射体周围形成氮化硅环。牺牲发射极和氮化硅环通过在晶体管的有源区域上沉积氮化硅材料层并执行蚀刻工艺以同时产生牺牲发射极和氮化硅环两者来形成。氮化硅环提供用于形成用于晶体管的升高的外部基极的支撑。

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