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    • 2. 发明授权
    • Method for forming a resist pattern on a substrate surface and a
scum-remover therefor
    • 在基板表面上形成抗蚀剂图案的方法和用于其的浮渣除去器
    • US4873177A
    • 1989-10-10
    • US229762
    • 1988-08-05
    • Hatsuyuki TanakaYoshiyuki SatoHidekatsu KoharaToshimasa Nakayama
    • Hatsuyuki TanakaYoshiyuki SatoHidekatsu KoharaToshimasa Nakayama
    • G03F7/32
    • G03F7/322
    • The pattern-wise photoresist layer formed on the surface of a substrate according to the inventive method is imparted with a greatly improved resolving power as a result of complete removal of the scum residua left after the development treatment. Namely, the positive-working photoresist layer formed on the substrate surface is exposed pattern-wise to actinic rays, developed with a developer solution which is typically a 2-7% aqueous solution of a quaternary ammonium hydroxide and then rinsed with a scum-remover solution which is a mixture of 100 parts of a 0.1-1.5% aqueous solution of a quaternary ammonium hydroxide and 1-30 parts of a water-miscible organic solvent and capable of dissolving away the scum residua in the pattern-wise photoresist layer without affecting the quality of the photoresist pattern reproduction.
    • 根据本发明方法形成在基材表面上的图案光致抗蚀剂层由于在显影处理后完全除去剩余的浮渣残留物而赋予极大改进的分辨能力。 也就是说,形成在基板表面上的正性光致抗蚀剂层以图案方式暴露于光化学射线,用显影剂溶液显影,显影剂溶液通常为2-7%氢氧化季铵水溶液,然后用浮渣除去剂 溶液,其为100份0.1-1.5%的季铵氢氧化物水溶液和1-30份水混溶性有机溶剂的混合物,并且能够将浮渣残留物溶解在图案化光致抗蚀剂层中而不影响 光刻胶图案再现的质量。
    • 5. 发明申请
    • STEERING DEVICE
    • 转向装置
    • US20120198956A1
    • 2012-08-09
    • US13363299
    • 2012-01-31
    • Naoyuki TAKEZAWAYoshiyuki Sato
    • Naoyuki TAKEZAWAYoshiyuki Sato
    • B62D1/187
    • B62D1/184B62D1/189
    • A steering device includes an outer column including fastening pieces formed to face each other at both sides, in the width direction, of a slot portion formed at either of a lower side or an upper side of an embracing body portion along an axial direction thereof, a fixed bracket clamping the outer column, a fastener that fastens the outer column and the fixed bracket, an inner column, and a pushing member having an expanding shaft portion. The two fastening pieces of the embracing body portion are connected by the fastener so that the two fastening pieces can be expanded and contracted, and the expanding shaft portion is elastically biased in an axial center direction of the outer column so as to abut on end zones of the slot portion and expand the two fastening pieces.
    • 转向装置包括外柱,该外柱包括形成为沿宽度方向彼此面对的紧固件,所述紧固件形成在沿其轴向方向的包围主体部分的下侧或上侧的槽部中, 夹紧外柱的固定支架,紧固外柱和固定支架的紧固件,内柱和具有扩张轴部分的推动构件。 包围主体部分的两个紧固件通过紧固件连接,使得两个紧固件可以膨胀和收缩,并且扩展轴部分沿外柱的轴向中心方向弹性偏置,以便抵靠端部区域 并扩大两个紧固件。