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    • 5. 发明申请
    • High Resolution position coder
    • 高分辨率位置编码器
    • US20080074672A1
    • 2008-03-27
    • US11809227
    • 2007-05-31
    • Laurent TupinierOlivier MarrouxJohann MichelMandiaye NdaoBernard Kress
    • Laurent TupinierOlivier MarrouxJohann MichelMandiaye NdaoBernard Kress
    • G01B9/021
    • G01D5/38G01D5/34776
    • Coder of position of a first element in displacement relatively to a second element, the latter including an optical system provided with at least one coherent light source emitting a beam intended to interfere, after collimation in a diaphragm, with the second element and at least one photodetector with contiguous cells in a line for detection of the light signal after interference. The second element includes a succession of primary coding cells provided with diffraction holograms each defining therein a single location, the cells interfering in succession with the light beam in the course of their relative displacement. The diffracted signal is sent to the photodetector or photodetectors for measurement of absolute position. The coder includes a series of secondary coding cells provided with diffraction holograms interfering successively with the light beam. The said cells are provided with an identical hologram diffracting the incident light into aligned diffraction light spots, the said hologram including a modulation, in the form of a stripe or a plurality of identical stripes arranged in parallel, which modulates the diffracted signal by orientating it at each instant perpendicularly to the tangent to the said stripe progressively as the collimated beam is displaced relatively to the cell, the position of the centre of the diffraction spot of order 0 remaining unchanged. At least one relative position photodetector is provided so orientated as to correspond to the displacement of a diffraction light spot produced by the secondary coding cell.
    • 相对于第二元件位移的第一元件的位置编码器,后者包括设置有至少一个相干光源的光学系统,该至少一个相干光源发射光束,该光束在光阑准直之后与第二元件和至少一个 具有连续单元的光电检测器,用于检测干涉后的光信号。 第二个元件包括一系列具有衍射全息图的主编码单元,每个衍射全息图在其中限定单个位置,该单元在其相对位移过程中与光束相继干涉。 衍射信号被发送到光电检测器或光电检测器以测量绝对位置。 编码器包括一系列辅助编码单元,其具有与光束连续干涉的衍射全息图。 所述单元设置有将入射光衍射成对准的衍射光斑的相同的全息图,所述全息图包括以条状或多个平行排列的相同条纹的形式的调制,其通过使衍射信号定向来调制衍射信号 当准直光束相对于单元移位时,在垂直于所述条纹的切线垂直的每个时刻,级数为0的衍射光斑的中心位置保持不变。 至少一个相对位置光电检测器被设置为对应于由次级编码单元产生的衍射光斑的位移。