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1. 发明授权

US06642484B2 Glass ceramic plates for holding substrates during pre-heating 失效
标题翻译：用于在预热期间保持基板的玻璃陶瓷板
公开(公告)号：US06642484B2
公开(公告)日：2003-11-04
申请号：US10264406
申请日：2002-10-04
申请人： Hartmut Eggert , Armin Kunkel , Juergen Vogt , Rolf Meyer , Peter Woerner
发明人： Hartmut Eggert , Armin Kunkel , Juergen Vogt , Rolf Meyer , Peter Woerner
IPC分类号： F27B514
CPC分类号： C23C16/4581 , C23C14/541 , C23C16/46
摘要： In the method for coating substrates the substrates are placed in recesses in a glass-ceramic plate or plates arranged over infrared high-temperature radiators with the surfaces to be coated on the radiators. The substrates are heated from below to the process temperature required for the coating. Subsequently the substrates are removed from the heating device, introduced into a coating chamber and coated. The preheating device for the substrates has two glass-ceramic plates that are placed loosely on top of each other and infrared high-temperature radiators. Substrate receptacles are provided in the glass-ceramic plates by approximately coincident recesses of different size in the plates so that the substrates can be held in close proximately to the radiators during the preheating.
摘要翻译：在用于涂布基板的方法中，将基板放置在布置在红外高温辐射器上的玻璃 - 陶瓷板或板中的凹槽中，其中要涂覆在散热器上的表面。将基底从下面加热到涂层所需的工艺温度。随后将基板从加热装置中取出，引入涂覆室并进行涂布。用于基板的预热装置具有两个宽松地放置在彼此之上的玻璃陶瓷板和红外高温散热器。在玻璃陶瓷板中通过在板中具有不同尺寸的几乎重合的凹槽来提供衬底插座，使得在预热期间，衬底可以靠近辐射器保持紧密。

2. 发明授权

US06511717B2 Method for coating substrates with improved substrate preheating 失效
标题翻译：用改进的衬底预热涂覆衬底的方法
公开(公告)号：US06511717B2
公开(公告)日：2003-01-28
申请号：US10139298
申请日：2002-05-03
申请人： Hartmut Eggert , Armin Kunkel , Juergen Vogt , Rolf Meyer , Peter Woerner
发明人： Hartmut Eggert , Armin Kunkel , Juergen Vogt , Rolf Meyer , Peter Woerner
IPC分类号： H05H120
CPC分类号： C23C16/4581 , C23C14/541 , C23C16/46
摘要： In the method for coating substrates the substrates are placed in recesses in a glass-ceramic plate or plates arranged over infrared high-temperature radiators with the surfaces to be coated on the radiators. The substrates are heated from below to the process temperature required for the coating. Subsequently the substrates are removed from the heating device, introduced into a coating chamber and coated. The preheating device for the substrates has two glass-ceramic plates that are placed loosely on top of each other and infrared high-temperature radiators. Substrate receptacles are provided in the glass-ceramic plates by approximately coincident recesses of different size in the plates so that the substrates can be held in close proximately to the radiators during the preheating.
摘要翻译：在用于涂布基板的方法中，将基板放置在布置在红外高温辐射器上的玻璃 - 陶瓷板或板中的凹槽中，其中要涂覆在散热器上的表面。将基底从下面加热到涂层所需的工艺温度。随后将基板从加热装置中取出，引入涂覆室并进行涂布。用于基板的预热装置具有两个宽松地放置在彼此之上的玻璃陶瓷板和红外高温散热器。在玻璃陶瓷板中通过在板中具有不同尺寸的几乎重合的凹槽来提供衬底插座，使得在预热期间，衬底可以靠近辐射器保持紧密。

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