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1. 发明授权

US06951119B1 Method for producing micromechanical and micro-optic components consisting of glass-type materials 有权
标题翻译：用于生产由玻璃型材料组成的微机械和微光部件的方法
公开(公告)号：US06951119B1
公开(公告)日：2005-10-04
申请号：US09889956
申请日：2000-11-23
申请人： Hans-Joachim Quenzer , Peter Merz , Arne Veit Schulz
发明人： Hans-Joachim Quenzer , Peter Merz , Arne Veit Schulz
IPC分类号： G02B3/00 , C03B11/00 , C03B11/08 , C03B23/02 , C03B23/025 , C03B23/203 , C03C19/00 , C03B23/00
CPC分类号： B81C1/00047 , B81B2201/018 , B81B2201/047 , B81C99/008 , B81C99/0085 , B81C2201/034 , C03B11/082 , C03B23/0252 , C03B23/203 , C03B2215/41 , C03B2215/412
摘要： What is proposed here is a method of structuring surfaces of glass-type materials and variants of this method, comprising the following steps of operation: providing a semiconductor substrate, structuring, with the formation of recesses, of at least one surface of the semiconductor substrate, providing a substrate of glass-type material, joining the semiconductor substrate to the glass-type substrate, with a structured surface of the semiconductor substrate being joined to a surface of the glass-type substrate in an at least partly overlapping relationship, and heating the substrates so bonded by annealing in a way so as to induce an inflow of the glass-type material into the recesses of the structured surface of the semiconductor substrate. The variants of the method are particularly well suitable for the manufacture of micro-optical lenses and micro-mechanical components such as micro-relays or micro-valves.
摘要翻译：这里提出的是一种结构玻璃型材料的表面和该方法的变型的方法，包括以下步骤：提供半导体衬底，形成半导体衬底的至少一个表面的凹槽的形成提供玻璃型材料的基板，将所述半导体基板接合到所述玻璃型基板，所述半导体基板的结构化表面以至少部分重叠的关系与所述玻璃基板的表面接合，并且加热通过退火以使得玻璃类材料流入半导体衬底的结构化表面的凹槽中的方式被粘合的衬底。该方法的变型特别适用于制造微光学透镜和微机械部件，例如微型继电器或微型阀。

2. 发明授权

US07416961B2 Method for structuring a flat substrate consisting of a glass-type material 有权
标题翻译：用于构造由玻璃型材料构成的平坦基底的方法
公开(公告)号：US07416961B2
公开(公告)日：2008-08-26
申请号：US10471581
申请日：2002-03-13
申请人： Hans-Joachim Quenzer , Arne Veit Schulz , Bernd Wagner , Peter Merz
发明人： Hans-Joachim Quenzer , Arne Veit Schulz , Bernd Wagner , Peter Merz
IPC分类号： H01L21/00
CPC分类号： H01L21/2007 , B81C99/0085 , C03B19/02 , C03C27/00 , H01L2924/16235
摘要： Disclosed is a method for structuring a flat substrate consisting of a glass-type material. The invented method is distinguished by a combination of the following steps:providing a semiconductor flat substrate consisting of a semiconductor material, structuring at least one surface of said semiconductor flat substrate to obtain recesses in said surface,connecting said surface of said semiconductor flat substrate to said glass-type flat substrate, with said structured surface of said semiconductor flat substrate being connected to a surface of said glass-type flat surface at least partially covering the same, tempering said connected flat substrates in such a manner that at least a part of the said glass-type material flows into said recesses of said structured surface of said semiconductor flat substrate, removing material at least from the resolidified glass-type flat substrate in such a manner that said glass-type flat substrate assumes a surface which is flush with said structured surface of said semiconductor flat substrate.
摘要翻译：公开了一种用于构造由玻璃型材料组成的平坦基底的方法。本发明的方法通过以下步骤的组合来区分：提供由半导体材料组成的半导体平板基板，构成所述半导体平板基板的至少一个表面以在所述表面中获得凹部，将所述半导体平板基板的所述表面连接到所述玻璃型平板基板，其中所述半导体平板基板的所述结构化表面连接到所述玻璃型平表面的至少部分覆盖该玻璃平面的表面，以这样的方式回火所述连接的平坦基板，使得至少部分所述玻璃型材料流入所述半导体平板基板的所述结构化表面的所述凹部中，至少从所述再固化玻璃型平板基板除去材料，使得所述玻璃型平板基板呈现与所述半导体平面基板的所述结构化表面。

3. 发明授权

US07364930B2 Method for producing micromechanical and micro-optic components consisting of glass-type materials 有权
标题翻译：用于生产由玻璃型材料组成的微机械和微光部件的方法
公开(公告)号：US07364930B2
公开(公告)日：2008-04-29
申请号：US11172892
申请日：2005-07-05
申请人： Hans-Joachim Quenzer , Peter Merz , Arne Veit Schulz
发明人： Hans-Joachim Quenzer , Peter Merz , Arne Veit Schulz
IPC分类号： H01L21/00
CPC分类号： B81C1/00047 , B81B2201/018 , B81B2201/047 , B81C99/008 , B81C99/0085 , B81C2201/034 , C03B11/082 , C03B23/0252 , C03B23/203 , C03B2215/41 , C03B2215/412
摘要： What is proposed here is a method of structuring surfaces of glass-type materials and variants of this method, comprising the following steps of operation: providing a semiconductor substrate, structuring, with the formation of recesses, of at least one surface of the semiconductor substrate, providing a substrate of glass-type material, joining the semiconductor substrate to the glass-type substrate, with a structured surface of the semiconductor substrate being joined to a surface of the glass-type surface in an at least partly overlapping relationship, and heating the substrates so bonded by annealing in a way so as to induce an inflow of the glass-type material into the recesses of the structured surface of the semiconductor substrate. The variants of the method are particularly well suitable for the manufacture of micro-optical lenses and micro-mechanical components such as micro-relays or micro-valves.
摘要翻译：这里提出的是一种结构玻璃型材料的表面和该方法的变型的方法，包括以下步骤：提供半导体衬底，形成半导体衬底的至少一个表面的凹槽的形成提供玻璃型材料的基板，将半导体基板与玻璃型基板接合，半导体基板的结构化表面以至少部分重叠的关系连接到玻璃类型表面的表面，并且加热通过退火以使得玻璃类材料流入半导体衬底的结构化表面的凹槽中的方式被粘合的衬底。该方法的变型特别适用于制造微光学透镜和微机械部件，例如微型继电器或微型阀。

4. 发明授权

US07259080B2 Glass-type planar substrate, use thereof, and method for the production thereof 有权
标题翻译：玻璃型平面基板，其用途及其制造方法
公开(公告)号：US07259080B2
公开(公告)日：2007-08-21
申请号：US10526962
申请日：2003-08-22
申请人： Hans-Joachim Quenzer , Arne-Veit Schulz , Peter Merz
发明人： Hans-Joachim Quenzer , Arne-Veit Schulz , Peter Merz
IPC分类号： H01L21/46 , H01L21/30 , H01L21/324 , H01L21/50 , H01L21/48
CPC分类号： B81C1/00611 , B81C2201/0126 , C03B19/02 , C03B23/02
摘要： The invented method is distinguished by a combination of the following method steps: provision of a semiconductor planar substrate composed of a semiconductor material, reduction of the thickness of the semiconductor planar substrate inside at least one surface region of the semiconductor planar substrate in order to form a raised surface region in relation to the surface planar region of reduced thickness, structuring the raised surface region of the semiconductor planar substrate by means of local mechanical removal of material in order to place impressions inside the raised surface regions, joining the structured surface of the semiconductor planar substrate with the glasslike planar substrate in such a manner that the glasslike planar substrate at least partially covers the surface planar region of reduced thickness, tempering the joined planar substrates in such a manner that in a first tempering phase, which is conducted under vacuum conditions, the glasslike planar substrate covering the surface region of reduced thickness forms a fluid-tight bond with the surface region of reduced thickness, with the planar substrate covering the impressions in a fluid-tight manner under vacuum conditions, and that in a second tempering phase, at least partial areas of the glasslike material flow into the impressions of the structured surface of the semiconductor planar substrate.
摘要翻译：本发明的方法通过以下方法步骤的组合来区分：提供由半导体材料构成的半导体平面基板，减小半导体平面基板的至少一个表面区域内的半导体平面基板的厚度，以形成相对于减小厚度的表面平面区域的凸起表面区域，通过局部机械去除材料构造半导体平面基板的凸起表面区域，以将印模放置在凸起表面区域内，将结构化表面具有玻璃状平面基板的半导体平面基板，使得玻璃状平面基板至少部分地覆盖厚度减小的表面平面区域，以这样的方式回火接合的平面基板，使得在真空下进行的第一回火阶段条件，玻璃状平面基板cov 减小厚度的表面区域形成与减小厚度的表面区域的流体密封结合，其中平面基板在真空条件下以流体密封的方式覆盖印模，并且在第二回火阶段中，至少部分区域的玻璃状材料流入半导体平面基板的结构化表面的印模中。

5. 发明申请

US20060110893A1 Glass-type planar substrate, use thereof, and method for the production thereof 有权
标题翻译：玻璃型平面基板，其用途及其制造方法
公开(公告)号：US20060110893A1
公开(公告)日：2006-05-25
申请号：US10526962
申请日：2003-08-22
申请人： Hans-Joachim Quenzer , Arne-Veit Schulz , Peter Merz
发明人： Hans-Joachim Quenzer , Arne-Veit Schulz , Peter Merz
IPC分类号： H01L21/30
CPC分类号： B81C1/00611 , B81C2201/0126 , C03B19/02 , C03B23/02
摘要： The invented method is distinguished by a combination of the following method steps: provision of a semiconductor planar substrate composed of a semiconductor material, reduction of the thickness of the semiconductor planar substrate inside at least one surface region of the semiconductor planar substrate in order to form a raised surface region in relation to the surface planar region of reduced thickness, structuring the raised surface region of the semiconductor planar substrate by means of local mechanical removal of material in order to place impressions inside the raised surface regions, joining the structured surface of the semiconductor planar substrate with the glasslike planar substrate in such a manner that the glasslike planar substrate at least partially covers the surface planar region of reduced thickness, tempering the joined planar substrates in such a manner that in a first tempering phase, which is conducted under vacuum conditions, the glasslike planar substrate covering the surface region of reduced thickness forms a fluid-tight bond with the surface region of reduced thickness, with the planar substrate covering the impressions in a fluid-tight manner under vacuum conditions, and that in a second tempering phase, at least partial areas of the glasslike material flow into the impressions of the structured surface of the semiconductor planar substrate.
摘要翻译：本发明的方法通过以下方法步骤的组合来区分：提供由半导体材料构成的半导体平面基板，减小半导体平面基板的至少一个表面区域内的半导体平面基板的厚度，以形成相对于减小厚度的表面平面区域的凸起表面区域，通过局部机械去除材料构造半导体平面基板的凸起表面区域，以将印模放置在凸起表面区域内，将结构化表面具有玻璃状平面基板的半导体平面基板，使得玻璃状平面基板至少部分地覆盖厚度减小的表面平面区域，以这样的方式回火接合的平面基板，使得在真空下进行的第一回火阶段条件，玻璃状平面基板cov 减小厚度的表面区域形成与减小厚度的表面区域的流体密封结合，其中平面基板在真空条件下以流体密封的方式覆盖印模，并且在第二回火阶段中，至少部分区域的玻璃状材料流入半导体平面基板的结构化表面的印模中。

6. 发明申请

US20060096321A1 Method and device for aftertreating an optical lens 有权
标题翻译：光学透镜后处理方法和装置
公开(公告)号：US20060096321A1
公开(公告)日：2006-05-11
申请号：US10540211
申请日：2003-12-19
申请人： Hans-Joachim Quenzer , Peter Merz , Uwe Bott
发明人： Hans-Joachim Quenzer , Peter Merz , Uwe Bott
IPC分类号： C03B23/00
CPC分类号： C03B23/02 , C03B11/082 , C03B2215/414 , C03B2215/44
摘要： The invention relates to a method and a device for follow-up treatment of the contour of the surface of at least one optical lens, in particular a microlens which is made of glass or a glass-type material and which has a convex lens surface delimited by a circumferential line abutting on a plane section surrounding said circumferential line and which has a lens underside facing the convex lens surface. The invention, wherein along said circumferential line of the optical lens on said plane section is placed a means perfectly matching said circumferential line and at least laterally bordering said convex lens surface, said optical lens is heated to a temperature of at least the transformation temperature of said glass or glass-type material, pressure equalization prevails between said convex lens surface and said lens underside, after a certain period of time, during which said optical lens undergoes said temperature treatment and subsequent cooling below said transformation temperature, said means is removed from said optical lens.
摘要翻译：本发明涉及一种用于后续处理至少一个光学透镜的表面轮廓的方法和装置，特别是由玻璃或玻璃类材料制成并具有凸透镜表面限定的微透镜通过邻接在围绕所述圆周线的平面部分并且具有面向凸透镜表面的透镜下侧的圆周线。本发明，其中沿着所述平面部分上的光学透镜的所述圆周线设置完全匹配所述圆周线并且至少横向邻接所述凸透镜表面的装置，所述光学透镜被加热至至少相对于所述玻璃或玻璃类材料在所述凸透镜表面和所述透镜下侧之间经过一段时间之后，在所述光学透镜经历所述温度处理并随后冷却到所述转变温度以下之前，压力均衡化是所述装置从所述光学透镜。

7. 发明授权

US07716950B2 Method for producing single microlenses or an array of microlenses 有权
公开(公告)号：US07716950B2
公开(公告)日：2010-05-18
申请号：US10551285
申请日：2004-03-22
申请人： Hans Joachim Quenzer , Peter Merz , Uwe Bott
发明人： Hans Joachim Quenzer , Peter Merz , Uwe Bott
IPC分类号： B29D11/00
CPC分类号： C03B23/02 , C03B19/02 , C03B2215/412 , Y10T156/10
摘要： Disclosed is a method for producing single microlenses or an arrays of microlenses composed of a glass-type material, in which method a first substrate is provided with a surface containing impressions over which a second substrate composed of a glass-type material is placed at least partially overlapping it and is joined therewith under vacuum conditions. The substrate composite is tempered in such a manner that the second substrate softens and flows into the impressions of the first substrate, thereby structuring the side of the second substrate facing away from the first substrate in order to form at least one microlens surface.

8. 发明申请

US20090288449A1 METHOD FOR PRODUCING SINGLE MICROLENSES OR AN ARRAY OF MICROLENSES 有权
标题翻译：生产单一微生物或微阵列的方法
公开(公告)号：US20090288449A1
公开(公告)日：2009-11-26
申请号：US12512538
申请日：2009-07-30
申请人： HANS JOACHIM QUENZER , Peter Merz , Uwe Bott
发明人： HANS JOACHIM QUENZER , Peter Merz , Uwe Bott
IPC分类号： C03C19/00 , C03B23/00 , B32B37/12 , B23K11/00
CPC分类号： C03B23/02 , C03B19/02 , C03B2215/412 , Y10T156/10
摘要： Disclosed is a method for producing single microlenses or an arrays of microlenses composed of a glass-type material, in which method a first substrate is provided with a surface containing impressions over which a second substrate composed of a glass-type material is placed at least partially overlapping it and is joined therewith under vacuum conditions. The substrate composite is tempered in such a manner that the second substrate softens and flows into the impressions of the first substrate, thereby structuring the side of the second substrate facing away from the first substrate in order to form at least one microlens surface.
摘要翻译：公开了一种用于生产单一微透镜的方法或由玻璃型材料组成的微透镜阵列，其中第一基底设置有包含由玻璃型材料构成的第二基底的表面，至少具有部分重叠，并在真空条件下连接在一起。衬底复合材料以这样一种方式进行回火，使得第二衬底软化并流入第一衬底的压痕中，从而构成第二衬底的背离第一衬底的一侧，以便形成至少一个微透镜表面。

9. 发明申请

US20050239228A1 Method for producing micromechanical and micro-optic components consisting of glass-type materials 有权
标题翻译：用于生产由玻璃型材料组成的微机械和微光部件的方法
公开(公告)号：US20050239228A1
公开(公告)日：2005-10-27
申请号：US11172892
申请日：2005-07-05
申请人： Hans-Joachim Quenzer , Peter Merz , Arne Schulz
发明人： Hans-Joachim Quenzer , Peter Merz , Arne Schulz
IPC分类号： G02B3/00 , C03B11/00 , C03B11/08 , C03B23/02 , C03B23/025 , C03B23/203 , C03C19/00 , H01L21/00
CPC分类号： B81C1/00047 , B81B2201/018 , B81B2201/047 , B81C99/008 , B81C99/0085 , B81C2201/034 , C03B11/082 , C03B23/0252 , C03B23/203 , C03B2215/41 , C03B2215/412
摘要： What is proposed here is a method of structuring surfaces of glass-type materials and variants of this method, comprising the following steps of operation: providing a semiconductor substrate, structuring, with the formation of recesses, of at least one surface of the semiconductor substrate, providing a substrate of glass-type material, joining the semiconductor substrate to the glass-type substrate, with a structured surface of the semiconductor substrate being joined to a surface of the glass-type surface in an at least partly overlapping relationship, and heating the substrates so bonded by annealing in a way so as to induce an inflow of the glass-type material into the recesses of the structured surface of the semiconductor substrate. The variants of the method are particularly well suitable for the manufacture of micro-optical lenses and micro-mechanical components such as micro-relays or micro-valves.
摘要翻译：这里提出的是一种结构玻璃型材料的表面和该方法的变型的方法，包括以下步骤：提供半导体衬底，形成半导体衬底的至少一个表面的凹槽的形成提供玻璃型材料的基板，将半导体基板与玻璃型基板接合，半导体基板的结构化表面以至少部分重叠的关系连接到玻璃类型表面的表面，并且加热通过退火以使得玻璃类材料流入半导体衬底的结构化表面的凹槽中的方式被粘合的衬底。该方法的变型特别适用于制造微光学透镜和微机械部件，例如微型继电器或微型阀。

10. 发明授权

US08015843B2 Method and device for selectively changing the contour of the surface of an optical lens made of glass or a glass-type material 有权
标题翻译：用于选择性地改变由玻璃或玻璃类材料制成的光学透镜的表面轮廓的方法和装置
公开(公告)号：US08015843B2
公开(公告)日：2011-09-13
申请号：US10540211
申请日：2003-12-19
申请人： Hans-Joachim Quenzer , Peter Merz , Uwe Bott
发明人： Hans-Joachim Quenzer , Peter Merz , Uwe Bott
IPC分类号： C03B23/035
CPC分类号： C03B23/02 , C03B11/082 , C03B2215/414 , C03B2215/44
摘要： A method and a device are disclosed for follow-up treatment of the contour of the surface of at least one optical lens, in particular a microlens which is made of glass or a glass-type material and which has a convex lens surface delimited by a circumferential line abutting on a plane section surrounding the circumferential line and which has a lens underside facing the convex lens surface. Along the circumferential line of the optical lens on the plane section is placed a device perfectly matching the circumferential line and at least laterally bordering the convex lens surface, the optical lens is heated to a temperature of at least the transformation temperature of glass or glass-type material, pressure equalization prevails between the convex lens surface and the lens underside, after a certain period of time, during which the optical lens undergoes the temperature treatment and subsequent cooling below the transformation temperature, the device is removed from the optical lens.
摘要翻译：公开了用于后续处理至少一个光学透镜的表面的方法和装置，特别是由玻璃或玻璃类材料制成的微透镜，并且具有由透镜表面限定的凸透镜表面圆周线邻接在围绕圆周线的平面部分上，并且具有面向凸透镜表面的透镜下侧。沿着平面部分上的光学透镜的圆周线放置与圆周线完全匹配的装置，并且至少横向邻近凸透镜表面，将光学透镜加热至至少玻璃或玻璃 - 在一段时间之后，在光学透镜进行温度处理和随后的冷却转变温度以下，该装置从光学透镜去除。

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