专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US4184448A Vacuum coating apparatus having a plurality of lock chambers 失效
标题翻译：具有多个锁定室的真空镀膜装置
公开(公告)号：US4184448A
公开(公告)日：1980-01-22
申请号：US963062
申请日：1978-11-22
申请人： Hans Aichert , Walter Dietrich , Alfred Hauff , Herbert Stephan , Friedrich Stark
发明人： Hans Aichert , Walter Dietrich , Alfred Hauff , Herbert Stephan , Friedrich Stark
IPC分类号： B01J3/00 , C23C14/56 , C23C13/08
CPC分类号： C23C14/566 , B01J3/006 , Y10S414/137 , Y10S414/139
摘要： Apparatus for batch coating of substrates under vacuum including a vacuum chamber with a coating system and a plurality of lock chambers with substrate holders which can be introduced into the vacuum chamber. At least two lock chambers with substrate holders are positioned on a common axis on opposite sides of the vacuum chamber. Each lock chamber is provided on the side facing the vacuum chamber with a lock valve. The vacuum chamber is likewise provided with lock valves on the sides facing the lock chambers whereby the lock chambers can be coupled selectively with the vacuum chamber through the individual lock valves.
摘要翻译：用于在真空下批量涂布基材的装置，包括具有涂层系统的真空室和具有可被引入真空室中的基板保持件的多个锁定室。具有衬底保持器的至少两个锁定室位于真空室的相对侧上的公共轴上。每个锁定室设置在面向真空室的一侧，并具有锁定阀。真空室同样在面向锁定室的一侧设置有锁定阀，由此锁定室可以通过单独的锁定阀与真空室选择性地联接。

2. 发明授权

US4208042A Evaporating crucible 失效
标题翻译：蒸发坩埚
公开(公告)号：US4208042A
公开(公告)日：1980-06-17
申请号：US963059
申请日：1978-11-22
申请人： Hans Aichert , Walter Dietrich , Alfred Hauff , Otto-Horst Hoffmann , Herbert Stephan
发明人： Hans Aichert , Walter Dietrich , Alfred Hauff , Otto-Horst Hoffmann , Herbert Stephan
IPC分类号： C23C14/24 , F27B14/08
CPC分类号： C23C14/246 , C23C14/243
摘要： Evaporating crucible having a crucible floor and a peripheral rim therearound. The floor has a plurality of floor apertures for feeding a plurality of rods of evaporating material and, surrounding the floor apertures, superelevations are provided whereby the distance from the crucible floor to the maximum fill level of the evaporating material is reduced by at least fifteen percent.
摘要翻译：具有坩埚底板和周围边缘的蒸发坩埚。地板具有多个用于供给多个蒸发材料棒的地板孔，并且围绕地板孔，提供超高度，由此从坩埚地板到蒸发材料的最大填充水平的距离减少至少十五％。

3. 发明授权

US4230739A Method of evaporating melts of alloys of metals having different vapor pressures 失效
标题翻译：蒸发具有不同蒸气压的金属合金熔体的方法
公开(公告)号：US4230739A
公开(公告)日：1980-10-28
申请号：US963236
申请日：1978-11-22
申请人： Hans Aichert , Walter Dietrich , Alfred Hauff , Peter Sommerkamp , Herbert Stephan
发明人： Hans Aichert , Walter Dietrich , Alfred Hauff , Peter Sommerkamp , Herbert Stephan
IPC分类号： C23C14/30 , B05D3/06
CPC分类号： C23C14/30
摘要： Method for evaporating melts of alloys of metals of different vapor pressures from continuously fed, large-area evaporating crucibles by direct bombardment of the bath surface with focused electron beams which are periodically deflected according to a pattern. The alloy material is deposited on a plurality of substrates such as turbine blades which are positioned in a field above the evaporating crucible with local adaptation of the energy density to the thermal economy of the melt bath. At least one electron beam is deflected onto at least two substantially rectangular beam fields and is guided in each of these fields through a line raster at a frequency of at least 100 Hz while shifting periodically from one to the other field with a shift frequency of at most 5 Hz.
摘要翻译：通过直接轰击浴表面的聚焦电子束，根据图案周期性地偏转，蒸发来自连续供给的大面积蒸发坩埚的不同蒸汽压的金属的熔体熔融的方法。合金材料沉积在诸如涡轮叶片的多个基底上，涡轮叶片定位在蒸发坩埚上方的场中，其局部适应能量密度与熔融浴的热经济性。至少一个电子束被偏转到至少两个基本上矩形的光束场上，并且在这些场中的每一个中通过线性光栅以至少100Hz的频率被引导，同时以一个移位频率从一个周期性地移位到另一个场最多5 Hz。

4. 发明授权

US5769626A Evacuation system with exhaust gas cleaning and operating process for it 失效
标题翻译：疏散系统具有废气清洁和操作过程
公开(公告)号：US5769626A
公开(公告)日：1998-06-23
申请号：US637869
申请日：1996-04-25
申请人： Alfred Hauff , Volker Kinzig
发明人： Alfred Hauff , Volker Kinzig
IPC分类号： B01D53/34 , B01D53/00 , B01D53/46 , B01D53/68 , B01D53/81 , F04B23/02 , F27D17/00
CPC分类号： B01D53/00
摘要： An evacuation system (1) with exhaust gas cleaning, consists of at least one vacuum pump unit (4) and at least one cleaning unit (10) in series as to enable the continuous flow of fluid media supplied by the vacuum pump unit (4). In order to prevent condensates in a gas connection pipe (9) and in order to decrease the surface area, the at least one vacuum pump unit (4) and the at least one cleaning unit (10) are compressed into substantially one component, and the gas connection pipe (9) which runs between the vacuum pump unit (4) and the cleaning unit (10) is run in the shortest possible path and is, as a result, kept at a temperature which is above the condensation temperature of constituents in the fluid media capable of condensation, essentially without the addition of external heat, with only the compression heat of the vacuum pump unit (4). Further, a central control unit (16) for the vacuum pump unit (4) and the cleaning unit (10) can be placed over the at least one vacuum pump unit (4). In operation, the cleaning unit (10) is operated with an input temperature of the fluid media of at least 80.degree. C., and preferably of at least 160.degree. C.
摘要翻译：具有废气清洁的排气系统（1）由至少一个真空泵单元（4）和至少一个清洁单元（10）组成，以便能够连续流动由真空泵单元（4）供应的流体介质）。为了防止气体连接管（9）中的冷凝物并且为了减小表面积，至少一个真空泵单元（4）和至少一个清洁单元（10）被压缩成基本上一个部件，并且在真空泵单元（4）和清洁单元（10）之间延伸的气体连接管（9）以最短的路径运行，结果保持在高于组分的冷凝温度的温度在能够冷凝的流体介质中，基本上没有加上外部热量，仅具有真空泵单元（4）的压缩热。此外，用于真空泵单元（4）和清洁单元（10）的中央控制单元（16）可以放置在至少一个真空泵单元（4）上。在操作中，清洁单元（10）以至少80℃，优选至少160℃的流体介质的输入温度运行。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式