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    • 3. 发明申请
    • Field emission device
    • 场发射装置
    • US20080003916A1
    • 2008-01-03
    • US11798481
    • 2007-05-14
    • Shang-hyeun ParkHang-woo LeeYou-jong KimPil-soo Ahn
    • Shang-hyeun ParkHang-woo LeeYou-jong KimPil-soo Ahn
    • H01J9/04
    • B82Y10/00H01J3/022H01J9/025
    • Provided is a field emission device using carbon nanotubes. The field emission device includes a substrate, a cathode, a gate insulating layer, an electron emitter, and a gate electrode. The cathode is formed on the substrate. The gate insulating layer is formed on the cathode and has a well exposing a portion of the cathode. The electron emitter is formed on the exposed portion of the cathode. The gate electrode is formed on the gate insulating layer and has a gate hole corresponding to the well. The gate electrode further includes a cylindrical electrode part that forms a focusing electric field from the gate hole toward a proceeding path of an electron beam. Accordingly, a focusing electric field can be formed around an electron beam emitted from the electron emitter so as to converge and focus the electron beam passing through the focusing electric field. As a result, color purity, brightness, and durability can be improved.
    • 提供了使用碳纳米管的场致发射器件。 场致发射器件包括衬底,阴极,栅极绝缘层,电子发射体和栅电极。 阴极形成在基板上。 栅绝缘层形成在阴极上并具有暴露阴极的一部分的良好的孔。 电子发射体形成在阴极的暴露部分上。 栅电极形成在栅极绝缘层上并具有与阱对应的栅极孔。 栅电极还包括圆柱形电极部分,其从门孔朝向电子束的前进路径形成聚焦电场。 因此,可以在从电子发射体发射的电子束周围形成聚焦电场,以使通过聚焦电场的电子束会聚并聚焦。 结果,可以提高色纯度,亮度和耐久性。
    • 7. 发明授权
    • Field emission device and field emission display including dual cathode electrodes
    • 场发射器件和场发射显示器,包括双阴极电极
    • US07372197B2
    • 2008-05-13
    • US11059437
    • 2005-02-17
    • Pil-soo AhnHang-woo Lee
    • Pil-soo AhnHang-woo Lee
    • H01J1/30
    • H01J29/04H01J3/021H01J29/481H01J31/127H01J2329/0407
    • A field emission device and a field emission display (FED) having dual cathode electrodes. The field emission device includes a substrate; a first cathode electrode formed on the substrate; a cathode insulating layer formed on the first cathode electrode, and having a first cavity that exposes a portion of the first cathode electrode; an electron emission source disposed on the first cathode electrode and being exposed by the first cavity; a second cathode electrode formed on the cathode insulating layer, and including a cathode hole aligned with the first cavity; a gate insulating layer formed on the second cathode electrode, and having a second cavity aligned with the first cavity; and a gate electrode formed on the gate insulating layer, and having a gate hole aligned with the second cavity.
    • 具有双阴极电极的场发射器件和场致发射显示器(FED)。 场致发射器件包括衬底; 形成在所述基板上的第一阴极电极; 阴极绝缘层,形成在所述第一阴极电极上,并且具有暴露所述第一阴极电极的一部分的第一腔; 电子发射源,设置在第一阴极电极上并被第一腔暴露; 形成在所述阴极绝缘层上的第二阴极,并且包括与所述第一腔对准的阴极孔; 栅极绝缘层,形成在所述第二阴极电极上,并且具有与所述第一空腔对准的第二空腔; 以及形成在所述栅极绝缘层上并具有与所述第二腔对准的栅极孔的栅电极。
    • 8. 发明授权
    • Method for manufacturing field emission device
    • 场致发射器件制造方法
    • US06632114B2
    • 2003-10-14
    • US09754275
    • 2001-01-05
    • Jun-hee ChoiSeung-nam ChaHang-woo Lee
    • Jun-hee ChoiSeung-nam ChaHang-woo Lee
    • H01J902
    • H01J3/022H01J1/3042H01J9/025
    • A field emission device (FED) and a method for fabricating the FED are provided. The FED includes micro-tips with nano-sized surface features, and a focus gate electrode over a gate electrode, wherein one or more gates of the gate electrode is exposed through a single opening of the focus gate electrode. In the FED, occurrence of arcing is suppressed. Although an arcing occurs in the FED, damage of a cathode and a resistor layer is prevented, so that a higher working voltage can be applied to the anode. Also, due to the micro-tips with nano-sized surface features, the emission current density of the FED increases, so that a high-brightness display can be achieved with the FED. The gate turn-on voltage can be lowered due to the micro-tip as a collection of nano-sized tips, thereby reducing power consumption.
    • 提供场发射装置(FED)和制造FED的方法。 FED包括具有纳米尺寸表面特征的微型尖端以及栅电极上的聚焦栅电极,其中栅电极的一个或多个栅极通过聚焦栅电极的单个孔露出。 在FED中,电弧的发生被抑制。 虽然在FED中发生电弧,但是可以防止阴极和电阻层的损坏,从而可以向阳极施加较高的工作电压。 此外,由于具有纳米尺寸表面特征的微尖端,FED的发射电流密度增加,从而可以用FED实现高亮度显示。 由于微尖作为纳米级尖端的集合,可以降低栅极导通电压,从而降低功耗。
    • 9. 发明授权
    • Method of forming structure having surface roughness due to nano-sized surface features
    • 由于纳米尺寸表面特征而形成具有表面粗糙度的结构的方法
    • US06468916B2
    • 2002-10-22
    • US09754274
    • 2001-01-05
    • Jun-hee ChoiSeung-nam ChaHang-woo Lee
    • Jun-hee ChoiSeung-nam ChaHang-woo Lee
    • H01L21302
    • H01J9/025
    • A method of forming a micro structure having nano-sized surface features is provided. The method includes the steps of forming a micro structure having predetermined size and shape on a substrate, coating a carbon polymer layer on the substrate including the micro structure to a predetermined thickness, performing a first etch on the carbon polymer layer by means of plasma etching using a reactive gas in which O2 gas for etching the carbon polymer layer and a gas for etching the micro structure are mixed and forming a mask layer by the residual carbon polymer layer on the surface of the micro structure, and performing a second etch by means of plasma etching using the mixed reactive gas to remove the mask layer and etch the surface of the micro structure not covered by the mask layer so that the micro structure has nano-sized surface features.
    • 提供了一种形成具有纳米尺寸表面特征的微结构的方法。 该方法包括以下步骤:在衬底上形成具有预定尺寸和形状的微结构,将包含微结构的衬底上的碳聚合物层涂覆至预定厚度,通过等离子体蚀刻在碳聚合物层上进行第一次蚀刻 使用其中用于蚀刻碳聚合物层的O 2气体和用于蚀刻微结构的气体的反应性气体混合并通过微结构表面上的残留碳聚合物层形成掩模层,并且通过手段进行第二次蚀刻 使用混合的反应气体进行等离子体蚀刻以去除掩模层并蚀刻未被掩模层覆盖的微结构的表面,使得微结构具有纳米尺寸的表面特征。